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1. 发明专利

JP2004095677A Substrate treatment device 审中-公开
标题翻译：基板处理装置
公开(公告)号：JP2004095677A
公开(公告)日：2004-03-25
申请号：JP2002251909
申请日：2002-08-29
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： KOBAYASHI TOSHIRO , HIRAI ETSURO , WADA TETSUYOSHI , KAMIKAWA SUSUMU , YOSHITAKE TAKASHI , TSUMOTO YOSHIKIMI
IPC分类号： C23C14/56 , C23C16/54 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide a substrate treatment device capable of preventing a substrate having flexibility from being deflected in the widthwise direction of the substrate, preventing the infiltration of gas from adjacent treatment rooms, and continuously performing a plurality of different treatment.
SOLUTION: The substrate treatment device 1 provided with at least a delivering roll 3 for delivering a substrate having flexibility to treatment rooms 6, 7, the treatment rooms 6, 7 for treating the surface of the delivered substrate 20, and a rewinding roll 5 for rewinding the treated substrate 20, is provided also with a passing roll 4 for allowing the substrate 20 to abut on its side face 4a, and allowing the substrate 20 to pass through the treatment rooms 6, 7, and differential exhaust rooms 8-10 arranged adjacently to the treatment rooms 6, 7 arranged in the peripheral direction of the passing roll 4 to exhaust gas from the differential exhaust rooms 8-10. Consequently the infiltration of gas into the adjacent treatment rooms 7, 6 can be prevented and a plurality of different treatment can be continuously performed.
COPYRIGHT: (C)2004,JPO
摘要翻译：解决的问题：提供一种能够防止具有挠性的基板在基板的宽度方向上偏转的基板处理装置，防止来自相邻处理室的气体的渗透，并且连续进行多种不同的处理。解决方案：至少设置有用于将具有柔性的基板输送到治疗室6,7，用于处理输送的基板20的表面的处理室6,7的基板处理装置1和倒带用于重新卷绕经处理的基板20的辊5还设置有用于允许基板20邻接其侧面4a的通过辊4，并且允许基板20通过处理室6,7和差动排气室8 10，其布置在经过辊4的圆周方向上的处理室6,7中，排出来自差动排气室8-10的废气。因此，可以防止气体渗透到相邻的处理室6,7中，并且可以连续地进行多种不同的处理。版权所有（C）2004，JPO

2. 发明专利

JPH1018025A BORON NITRIDE COATING MEMBER AND ITS PRODUCTION 失效
公开(公告)号：JPH1018025A
公开(公告)日：1998-01-20
申请号：JP26156996
申请日：1996-10-02
申请人： MITSUBISHI HEAVY IND LTD
发明人： WATANABE TOSHIYA , WADA TETSUYOSHI , YAMASHITA NOBUKI
IPC分类号： C23C14/06
摘要： PROBLEM TO BE SOLVED: To provide a boron nitride coating member having sufficient adhesive strength even in the case the coating is thick and to provide a method for producing the same. SOLUTION: This boron nitride coating member is provided with a substrate 1, an intermediate layer 2 composed of the nitride of at least one kind of elements selected from the groups IVa, Va and VIa, a mixing layer 3 composed of the mixture of the nitride of these elements and baron nitride and having a gradient compsn. in which the compsn. and structure continuously change and boron nitride coating 4 applied on the mixing layer 3. In this case, before the formation of the mixing layer 3, an interposing layer 5 in which the elements high in the nitriding rate as it goes to the side of the intermediate layer 2 is formed, and after that, the mixing layer 3 is formed so as to finally eliminate the interposing layer 5, i.e., to be mixed with the interposing layer 5, by which the affinity among the mixing layer 3, intermediate layer 2 and baron nitride coating 4 is increased to smoothly disperse the internal stress of the boron nitride coating 4 into the mixing layer 3.

3. 发明专利

JPH0849065A PRODUCTION OF BORON NITRIDE COATED MEMBER 失效
公开(公告)号：JPH0849065A
公开(公告)日：1996-02-20
申请号：JP20299594
申请日：1994-08-05
申请人： MITSUBISHI HEAVY IND LTD
发明人： WATANABE TOSHIYA , WADA TETSUYOSHI , YAMASHITA NOBUKI
IPC分类号： C23C14/06 , C23C14/22 , C23C28/04
摘要： PURPOSE:To ensure superior adhesion at the time of producing a member coated with cubic boron nitride or hard boron nitride contg. cubic boron nitride and applied to a sliding member such as the bearing or slider of a tool or other various rotary machines. CONSTITUTION:A middle layer 2 is formed on a substrate 1 and a thin film of cubic boron nitride(CBN) is synthesized on the middle layer to form a CBN layer. Ions of rare gas are implanted into the resultant member to convert each a part of the middle layer 2 and that of the CBN layer 4 into a boundary layer 3. This boundary layer is made of a mixture of the coating material with the material of the middle layer in a state having a gradient compsn. and has superior adhesion.

4. 发明专利

JPH073441A METHOD FOR FORMING CUBIC BORON NITRIDE 失效
公开(公告)号：JPH073441A
公开(公告)日：1995-01-06
申请号：JP15017693
申请日：1993-06-22
申请人： MITSUBISHI HEAVY IND LTD
发明人： WATANABE TOSHIYA , WADA TETSUYOSHI , YAMASHITA NOBUKI , OGAWA MAKOTO
IPC分类号： C23C14/06 , C23C14/30
摘要： PURPOSE:To form a cubic system boron nitride film on the member having a complicated shape. CONSTITUTION:Biased voltage is impressed on the upper holder 12 supporting a base material 13 to generate the electric field which pulls the ion to the base material 13 around a base material electrode, and the ion is allowed to sneak to the widely inclined base material 13 to suppress the increase of etching velocity, to enable the formation of the cubic boron nitride film and to enable the coating of the cubic boron nitride on the member having a complicated shape.

5. 发明专利

JPH0553866B2 失效
公开(公告)号：JPH0553866B2
公开(公告)日：1993-08-11
申请号：JP13342885
申请日：1985-06-19
申请人： KOGYO GIJUTSUIN , MITSUBISHI HEAVY IND LTD
发明人： MINETA SHINEI , YASUNAGA NOBUO , TARUMI NOBORU , TESHIGAHARA EIICHI , IKEDA MASAYUKI , ODOHIRA TOSHIHIKO , WADA TETSUYOSHI , ITANO SHIGEO
IPC分类号： C23C14/28

6. 发明专利

JPH0547627B2 失效
公开(公告)号：JPH0547627B2
公开(公告)日：1993-07-19
申请号：JP7345785
申请日：1985-04-09
申请人： MITSUBISHI HEAVY IND LTD
发明人： ATSUKAWA MASUMI , ODOHIRA TOSHIHIKO , ITANO SHIGEO , WADA TETSUYOSHI , NAKAGAWA YOSHIKYO
IPC分类号： C23C14/24

7. 发明专利

JPH04136157A MEMBER COATED WITH BORON NITRIDE 失效
公开(公告)号：JPH04136157A
公开(公告)日：1992-05-11
申请号：JP25742790
申请日：1990-09-28
申请人： MITSUBISHI HEAVY IND LTD
发明人： YAMASHITA NOBUKI , WADA TETSUYOSHI , MORITA SHOJI , OGAWA MAKOTO
IPC分类号： C23C14/06
摘要： PURPOSE:To produce the member which is coated with boron nitride and is additionally improved in hardness by incorporating a rare gas into a boron nitride coating at the time of forming this boron nitride film on a substrate. CONSTITUTION:The inside of a reaction chamber 1 and a vacuum chamber 3 is previously discharged and a gaseous mixture composed of diborane and argon (about 10vol.% diborane) is introduced from a gas introducing pipe 2 into these chambers The inside thereof is maintained under a prescribed pressure and a base material 7 is heated to a prescribed temp. by a heater 9. A magnetic field is then impressed into the reaction chamber 1 by a coil 5 for impressing the magnetic field and microwaves are introduced via an introducing pipe 4 into the reaction chamber 1 to generate electron cyclotron resonance plasma. A high-frequency electric power is impressed from a high-frequency power source 11 to a base material holder 6 to generate self-biasing. The boron nitride film contg. the argon is formed on the base material 7 (high-speed steel, etc.) and the member coated with the boron nitride having the excellent hardness is obtd. This member is adequate for cutting tools and sliding members, such as bearings and slides of various rotating machines.

8. 发明专利

JPH04120267A METHOD OF FORMING THIN FILM AND PRODUCTION OF BORON NITRIDE COATED MEMBER 失效
公开(公告)号：JPH04120267A
公开(公告)日：1992-04-21
申请号：JP30250190
申请日：1990-11-09
申请人： MITSUBISHI HEAVY IND LTD
发明人： WADA TETSUYOSHI , YAMASHITA NOBUKI , OGAWA MAKOTO , MORITA SHOJI , ROKKAKU TADASHI , KOBAYASHI TOSHIRO
IPC分类号： C23C14/06 , C23C14/22
摘要： PURPOSE:To form a thin film having excellent adhesion with a substrate, high crystallinity and high quality by forming the thin film by two steps of procedures with specified acceleration voltage of ions in the method of forming a thin film by vapor deposition and ion beam irradiation. CONSTITUTION:A thin film is formed by heating and vaporizing the thin film material or a part of it to carry out vapor deposition on a substrate surface while simultaneously irradiating the substrate with various ions from the ion source. The acceleration voltage of ions is varied by two steps, 5-100KV in the first step and 0. 5-5KV in the second step. Thereby, a mixture layer is formed in the first step, and then a thin film of high crystallinity and high quality is formed thereon in the second step. Moreover, the mixture layer first formed gives excellent adhesion property with the substrate. By this method, the baron nitride-coated member having a boundary layer of an oblique structure in the interface, with excellent adhesion and high hardness can be obtained.

9. 发明专利

JPH0421776A INSULATING FILM FORMING DEVICE 失效
公开(公告)号：JPH0421776A
公开(公告)日：1992-01-24
申请号：JP12300390
申请日：1990-05-15
申请人： MITSUBISHI HEAVY IND LTD
发明人： MORITA SHOJI , WADA TETSUYOSHI , YAMASHITA NOBUKI , OGAWA MAKOTO
IPC分类号： C23C14/48
摘要： PURPOSE:To relax the positive charge on a film growth surface and to form a high-purity insulating film by providing a vaporization source, ion source, and electron source and simultaneously irradiating a substrate with the mixed ion and atom to vapor-deposit the film on the substrate. CONSTITUTION:This insulating film forming device consists of the vaporization source 8, ion source 5 and electron source 11, and an insulating film 14 is formed on the surface of a substrate 4 set in a vacuum chamber 1. The surface of the substrate 4 is irradiated with the ion 7 and electron from the ion source 5 and electron source 11. The positive charge on the surface of a film grown on the substrate 4 is relaxed by the electron irradiation, and the high-purity insulating film 14 is obtained.

10. 发明专利

JPH01252303A CUTTING TOOL TIP 失效
公开(公告)号：JPH01252303A
公开(公告)日：1989-10-09
申请号：JP7482088
申请日：1988-03-30
申请人： MITSUBISHI HEAVY IND LTD
发明人： YAMASHITA NOBUKI , WADA TETSUYOSHI , GOTO TAKAYUKI
IPC分类号： B23B27/14
摘要： PURPOSE:To enhance the heat resistance of a tip and the cutting accuracy during the cutting operation of hard materials to prolong the life of a cutting tool by forming a CBN layer on the surface of a diamond tip on which a cutting edge is previously formed. CONSTITUTION:A sharp cutting edge is formed on a diamond tip 14. The surface of the diamond tip 14 is covered by a cubic boron nitride (CBN) layer 15. As a result, even when relatively hard materials such as iron, etc. are cut, the heat resistance of the tip can be remarkably improved to prolong the life of a cutting tool, and very high cutting accuracy can also be obtained.

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