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1. 发明专利

JP2006162314A Compound sensor 审中-公开
标题翻译：化合物传感器
公开(公告)号：JP2006162314A
公开(公告)日：2006-06-22
申请号：JP2004350907
申请日：2004-12-03
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： ISHIDA TAKAMI , TERADA JIRO , KAWASAKI TETSUO
IPC分类号： G01C19/56 , G01C19/5621 , G01P15/125
摘要： PROBLEM TO BE SOLVED: To provide a compound sensor capable of achieving compact mounting boards by combining an angular velocity sensor and an acceleration sensor and reducing mounting areas. SOLUTION: The compound sensor is provided with an oscillator 10 having a frame-like fixed base 1; a center base 3 arranged inside the frame-like fixed base 1 and connected via a connecting part 2; a first piezoelectric element 4 connected to the center base 3; a weight part 6 connected to the center base 3; and counter electrodes 7 opposed to each other between the weight part 6 and the frame-like fixed base 1. The first piezoelectric element 4 is driven to oscillate. The compound sensor computes angular velocities by detecting bending oscillations of the first piezoelectric element 4 which change due to the Coriolis force and computes acceleration by detecting the electrostatic capacitance of the counter electrodes which changes due to the motion of the weight part 6. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够通过组合角速度传感器和加速度传感器并减少安装面积来实现紧凑安装板的复合传感器。解决方案：复合传感器设置有具有框架状固定基座1的振荡器10; 中央基座3，其布置在框架状固定基座1的内部，经由连接部2连接; 连接到中心基座3的第一压电元件4; 连接到中心基座3的重物部分6; 以及在重量部分6和框架状固定基座1之间彼此相对的对置电极7.第一压电元件4被驱动以摆动。复合传感器通过检测由于科氏力引起的第一压电元件4的弯曲振荡而计算角速度，并且通过检测由于重量部分6的运动而改变的对电极的静电电容来计算加速度。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2005249645A Angular velocity sensor and its manufacturing method 审中-公开
标题翻译：角速度传感器及其制造方法
公开(公告)号：JP2005249645A
公开(公告)日：2005-09-15
申请号：JP2004061965
申请日：2004-03-05
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： YASUMI MASAHIRO , KOMAKI KAZUKI , MURASHIMA YUJI , NAKAMURA YUKI , KAWASAKI TETSUO
IPC分类号： G01C19/56 , G01C19/5621 , G01C19/5628 , H01L41/08 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/316 , H01L41/319 , G01P9/04
CPC分类号： G01C19/5628 , G01C19/5621 , Y10T29/42
摘要： PROBLEM TO BE SOLVED: To realize a piezoelectric substance and an angular velocity sensor being made compact. SOLUTION: The angular velocity sensor 1 is composed of a substrate 4 made of a single crystal silicon; a barrier layer 12 made of a silicon dioxide film; a first adhesion layer 5 made of at least titanium; and a lower electrode layer 6 made of platinum including at least titanium or titanium oxide. Therefore, the angular velocity sensor 1 can be made compact. In other words, a piezoelectric thin film having a good piezoelectric property can be made up, even in the case its area is small, thereby realizing the compact angular velocity sensor 1. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：实现压电材料和角速度传感器的紧凑化。角速度传感器1由单晶硅制成的基板4构成，由二氧化硅膜制成的阻挡层12; 至少由钛构成的第一粘合层5; 以及由至少包含钛或氧化钛的铂制成的下电极层6。因此，可以使角速度传感器1紧凑。换句话说，即使在面积小的情况下，也可以构成具有良好压电特性的压电薄膜，从而实现紧凑的角速度传感器1.（C）2005，JPO＆NCIPI

3. 发明专利

JP2004242182A Surface acoustic wave device 审中-公开
公开(公告)号：JP2004242182A
公开(公告)日：2004-08-26
申请号：JP2003031207
申请日：2003-02-07
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： NAKANISHI HIDEKAZU , TAKAYAMA RYOICHI , KAWASAKI TETSUO , INOUE TAKASHI , IWASAKI YUKIO
IPC分类号： H03H9/145
摘要： PROBLEM TO BE SOLVED: To provide a surface acoustic wave device of which the satisfactory attenuation quantity can be secured while maintaining the excellent temperature characteristics.
SOLUTION: The surface acoustic wave device of which the satisfactory attenuation quantity is secured as realizing the excellent temperature characteristics is provided by forming an interdigital electrode 3 and a reflection electrode 4 on the surface of a lithium tantalate substrate 2 as a piezoelectric monocrystal substrate and forming a silicon dioxide film 5 of which the internal stress is ≥80MPa and ≤500MPa in a compression direction so as at least to cover the interdigital electrode 3 and the reflection electrode 4.
COPYRIGHT: (C)2004,JPO&NCIPI

4. 发明专利

JP2004303745A Capacitive element and its fabricating process 审中-公开
公开(公告)号：JP2004303745A
公开(公告)日：2004-10-28
申请号：JP2003091171
申请日：2003-03-28
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： KAWASAKI TETSUO , MORINO TAKASHI , YAMAGUCHI MASAKO
IPC分类号： H01G4/255 , H01G4/33 , H01L21/822 , H01L27/04
摘要： PROBLEM TO BE SOLVED: To provide a capacitive element n which the capacitance can be regulated in both increasing and decreasing directions.
SOLUTION: The capacitive element comprises a first lower electrode 12a, a second lower electrode 12b and a third lower electrode 12c provided separately at three or more positions on a substrate 11, a dielectric layer 13 provided continuously on the substrate 11 while overlapping the first lower electrode 12a, a first resistor layer 14a provided across the dielectric layer 13 and the second lower electrode 12b not to be connected with the first lower electrode 12a, a second resistor layer 14b provided continuously across the third lower electrode 12c and the first lower electrode 12a, the second lower electrode 12b or a fourth lower electrode 12d through the substrate 11, and an upper electrode 15 provided at least on the first resistor layer 14a and across the first resistor layer 14a and the dielectric layer 13 on the first lower electrode 12a.
COPYRIGHT: (C)2005,JPO&NCIPI

5. 发明专利

JP2004207996A Electronic component and electronic apparatus using the electronic component 审中-公开
公开(公告)号：JP2004207996A
公开(公告)日：2004-07-22
申请号：JP2002374398
申请日：2002-12-25
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： TAKAYAMA RYOICHI , NAKANISHI HIDEKAZU , INOUE TAKASHI , KAWASAKI TETSUO , IWASAKI YUKIO
IPC分类号： H03H9/145 , H03H9/25
摘要： PROBLEM TO BE SOLVED: To obtain an electronic component, having superior temperature characteristics and electric characteristics by forming a protective film on an electrode.
SOLUTION: A relation "h≤t2 (where the relations η'-0.3

6. 发明专利

JP2006196811A Capacitor and composite parts using the same 审中-公开
标题翻译：电容器和使用它的复合零件
公开(公告)号：JP2006196811A
公开(公告)日：2006-07-27
申请号：JP2005008784
申请日：2005-01-17
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： MURASHIMA YUJI , KAWASAKI TETSUO , KIMURA RYO
IPC分类号： H01G4/12 , H01G4/38 , H01G4/40 , H03H7/06 , H03H7/075
摘要： PROBLEM TO BE SOLVED: To provide a capacitor which is suitable especially for miniaturization and thinning, and which is superior in high-frequency characteristics and composite parts that use it.
SOLUTION: At least one through-hole 10 is formed on a substrate 11, having conductivity, a dielectric layer 12 is formed on the inner wall of the through-hole 10, and an electrode 13, formed inside the through-hole 10 where the dielectric layer 12 is formed, the end of the substrate 11, is formed with one connection terminal 16 connected to the substrate 11, and at least one face of the electrode part 13 is formed with the other connection terminal 15.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种特别适用于小型化和细化的电容器，其特征在于高频特性优异的复合部件。解决方案：在具有导电性的基板11上形成至少一个通孔10，在通孔10的内壁上形成电介质层12，形成在通孔内的电极13 如图10所示，形成电介质层12的基板11的端部形成有连接到基板11的一个连接端子16，并且电极部分13的至少一个面形成有另一个连接端子15.
版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2006162313A Compound sensor 有权
标题翻译：化合物传感器
公开(公告)号：JP2006162313A
公开(公告)日：2006-06-22
申请号：JP2004350906
申请日：2004-12-03
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： ISHIDA TAKAMI , TERADA JIRO , KAWASAKI TETSUO
IPC分类号： G01C19/56 , G01C19/5621 , G01P15/10 , G01P15/18
摘要： PROBLEM TO BE SOLVED: To provide a compound sensor capable of achieving compact mounting boards by combining an angular velocity sensor and an acceleration sensor and reducing mounting areas.
SOLUTION: The compound sensor is provided with an oscillator 10 having a fixed substrate 2; a first piezoelectric element 4 connected to the fixed substrate 2; a weight part 6 arranged in the periphery of the fixed substrate 2; and a second piezoelectric element 8 connecting the weight part 6 to the fixed substrate 2. The first piezoelectric element 4 and the second piezoelectric element 8 are each driven to oscillate. The compound sensor as an angular velocity sensor computes angular velocities by detecting bending oscillations of the first piezoelectric element 4 which change due to the Coriolis force and as an acceleration sensor computes acceleration by detecting the drive and oscillations of the second piezoelectric element 8 which changes due to the motion of the weight part 6.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够通过组合角速度传感器和加速度传感器并减少安装面积来实现紧凑安装板的复合传感器。解决方案：复合传感器设置有具有固定基板2的振荡器10; 连接到固定基板2的第一压电元件4; 布置在固定基板2的周边的重量部分6; 以及将配重部6连接到固定基板2的第二压电元件8.第一压电元件4和第二压电元件8分别被驱动振荡。作为角速度传感器的复合传感器通过检测由于科里奥利力而改变的第一压电元件4的弯曲振荡来计算角速度，并且作为加速度传感器，通过检测第二压电元件8的驱动和振荡来计算加速度，关于重量部分6的运动。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2007074754A Surface acoustic wave device, and mobile communication device and sensor both using same 有权
标题翻译：表面声波装置和移动通信装置以及使用它的传感器
公开(公告)号：JP2007074754A
公开(公告)日：2007-03-22
申请号：JP2006326760
申请日：2006-12-04
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： TAKAYAMA RYOICHI , SEKI SHUNICHI , KAWASAKI TETSUO , NAKANISHI HIDEKAZU , HASEGAWA HIROHARU
IPC分类号： H03H9/25 , H01L41/08 , H01L41/09 , H01L41/18 , H03H9/02 , H03H9/145 , H03H9/64
CPC分类号： H03H9/25 , H03H9/02559 , H03H9/02661 , H03H9/02929 , H03H9/145 , H03H9/6483
摘要： PROBLEM TO BE SOLVED: To minimize loss and to improve steep characteristics in a surface acoustic wave (SAW) device, such as a SAW resonator or a SAW filter. SOLUTION: IDT electrodes and a reflector are provided on a piezoelectric substrate 1 cut out at a cut-angle which allows the substrate to excite a leakly surface acoustic wave (LSAW). A sonic velocity of a SAW conventionally utilized as LSAW is reduced and by utilizing a SAW decelerated than a velocity of slow shear wave propagating on the piezoelectric substrate, the SAW conventionally utilized as LSAW is utilized as a Rayleigh surface acoustic wave (RSAW), thereby obtaining a SAW filter or a SAW resonator which reduces insertion-loss and improves steep characteristics in comparison with a conventional SAW filter or SAW resonator using the LSAW. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了使表面声波（SAW）器件（例如SAW谐振器或SAW滤波器）中的损耗最小化并改善陡峭特性。解决方案：IDT电极和反射器设置在以切割角切割的压电基板1上，该基板允许基板激发泄漏表面声波（LSAW）。通常用作LSAW的SAW的声速被减小，并且通过利用比在压电衬底上传播的慢剪切波的速度减速的SAW，作为LSAW常规使用的SAW被用作瑞利声表面波（RSAW），由此与使用LSAW的传统SAW滤波器或SAW谐振器相比，获得了降低插入损耗并改善陡峭特性的SAW滤波器或SAW谐振器。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2004222266A Electronic component and electronic equipment using the same 有权
公开(公告)号：JP2004222266A
公开(公告)日：2004-08-05
申请号：JP2003429476
申请日：2003-12-25
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： TAKAYAMA RYOICHI , NAKANISHI HIDEKAZU , INOUE TAKASHI , KAWASAKI TETSUO , HASEGAWA HIROHARU , IWASAKI YUKIO
IPC分类号： H03H9/145 , H03H9/25
摘要： PROBLEM TO BE SOLVED: To obtain an electronic component excellent in temperature characteristics and electric characteristics.
SOLUTION: The electronic component has a substrate 1, an interdigital transducer (IDT) 2 provided on the upper surface of the substrate 1, and a protective film 4 covering the IDT 2 and having an uneven shape on its top surface. Each parameter is set so as to satisfy a formula L1≤p1 and L2≥p2 (meanwhile, relation of L≈p, p1+p2=p, L1+L2=L is satisfied), where the pitch width per pitch of the uneven shape of the protective film 4 is L, the width of a convex portion 4a of uneven portion per pitch of the uneven shape of the protective film 4 is L1, the width of a concave portion 4b is L2, the pitch width per pitch of the IDT 2 is p, the width of each electrode finger constituting the IDT 2 is p1, and the width between electrode fingers is p2.
COPYRIGHT: (C)2004,JPO&NCIPI

10. 发明专利

JP2004014853A Thin film capacitor 审中-公开
公开(公告)号：JP2004014853A
公开(公告)日：2004-01-15
申请号：JP2002167200
申请日：2002-06-07
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： NAKANISHI TSUTOMU , KAWASAKI TETSUO , YAMAGUCHI MASAKO , MORINO TAKASHI
IPC分类号： H01G4/33 , H01L21/822 , H01L27/04
摘要： PROBLEM TO BE SOLVED: To provide a thin film capacitor which obtains sufficient equivalent series resistance and a superior impedance characteristic, suppress a leak current of its capacitor, and obtains a superior insulating characteristic.
SOLUTION: The thin film capacitor comprises a dielectric thin film 13 provided on and over a lower electrode 12 on a substrate 11 to the substrate 11, an upper electrode 14 which is formed on and over the dielectric thin film 13 to an electric insulator body 15 by providing the electric insulator 15 on the dielectric thin film 13 at least from the end of the lower electrode 12 in such a direction that the upper electrode 14 and a lead-out electrode 17a are formed, terminating electrodes 16a and 16b provided on the substrate 11, and a protection coat 18 which is provided to be overlapped with a portion of the electrode 14 or a portion of the lower electrode 12 and portions of the terminating electrodes 16a and 16b and covers them except portions of the lead-out electrodes 17a and 17b which are made of conductive materials each having lower volume resistivity than the lower electrode 12.
COPYRIGHT: (C)2004,JPO

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