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    • 1. 发明专利
    • PARTS CASSETTE ENGAGING/DISENGAGING DEVICE
    • JPH03234428A
    • 1991-10-18
    • JP3021090
    • 1990-02-09
    • MATSUSHITA ELECTRIC IND CO LTD
    • YAMANE MANABUNAKADA AKIRA
    • B23P19/00
    • PURPOSE:To automate the transfer and engaging/disengaging operation of a parts cassette, and to enable the use of an existing parts cassette by providing both a first driving means for moving an engaging part in the engaging/ disengaging direction and a second driving means for moving a lock lever in the rocking direction. CONSTITUTION:An engaging member 25 is enabled to be moved in the engaging/ disengaging direction by a first driving means 28 with respect to a lock lever 24 of a parts cassette 3 retained in a retaining part 4. And in such a condition that the engaging member 25 has been engaged with the lock lever 24, turning operation of the lock lever 24 is enabled by moving the engaging member 25 by a second driving means 29. Thus, locking and unlocking of the parts cassette 3 in the parts-feeding part 5 of a component mounting machine can be performed. And, transfer operation of the parts cassette 3 to the parts-feeding part 5 can be carried out by moving the retaining part 4, in which the parts cassette 3 in an unlocked condition has been retained, by means of a moving means.
    • 4. 发明专利
    • SUBSTRATE HOLDER
    • JPH01319968A
    • 1989-12-26
    • JP15318488
    • 1988-06-21
    • MATSUSHITA ELECTRIC IND CO LTD
    • YASUHIRA NOBUONAKADA AKIRA
    • H01L21/673H01L21/68
    • PURPOSE:To change the pattern of the selection of substrates by forming an irregular section to a substrate support bar and selecting and chucking the substrate coinciding with the irregular section pattern. CONSTITUTION:A substrate 5 is held when the diameter of the substrate 5 is larger than the spaces of each projecting section and projecting section of substrate support bars 8 in the relationship of the substrate 5 in a groove section at a certain position of a substrate chucking plate 6 and the substrate support bars 8. When chucking rods are turned respectively at 60 deg., when the spaces of each recessed section and recessed section of the substrate support bars 8 are made larger than the diameter of the substrate 5, on the other hand, the holding of the substrate 5 is released. The substrate support bars 8 have the irregular sections to all grooves of the substrate chucking plates 6, thus operating the chucking plates as substrate chucks for jumping pitches. Accordingly, the substrate support bars 8 have the irregular sections, and the irregular rows are changed over by the rotational operation of the substrate support bars 8, thus conducting the holding and release of holding of an arbitrary silicon wafer.
    • 5. 发明专利
    • MAINTENANCE APPARATUS FOR CLEAN SPACE
    • JPS63233231A
    • 1988-09-28
    • JP6639587
    • 1987-03-20
    • MATSUSHITA ELECTRIC IND CO LTD
    • NAKADA AKIRAYASUHIRA NOBUO
    • F24F7/06
    • PURPOSE:To prevent the reduction of cleanness in the inside of a clean space during maintenance work by forming an open port for maintenance in the side wall and providing its opening end closing device and providing a cover which can be connected to the periphery of the open port on its one end and has an open section on its other end and covers at least part of the body of a worker. CONSTITUTION:At a suitable position of a side wall 8 which divides a clean space 2 an open port 10 for maintenenace is provided at an intermediate position or at the lower section in the up-and-down direction, and the open port 10 is openably closed by an opening and closing device 11 such as a tightly closing door. A connection flange section 12 is provided so as to surround the open port 10. An opening 15 through which a worker can enter or exit is formed in the side wall of a cover body 13, and the connection flange section 12 is provided with a connection frame 17 which can be connected with a fixing member 19 to the flange section 12. An air cleaning device 18 is operated to clean the cover body 13 and then the opening and closing device 11 of the open port 10 is opened to perform maintenance work. Because the inside of the cover body 13 is clean, the cleanness in the clean space 2 does not drop very much, and when the work is finished, the treatment of works cen be restarted at once when the opening and closing device 11 is closed.