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    • 1. 发明专利
    • PRODUCTION OF OXIDE SINGLE CRYSTAL
    • JP2000063196A
    • 2000-02-29
    • JP23140598
    • 1998-08-18
    • MURATA MANUFACTURING CO
    • KUMATORIDANI MAKOTOSATO HIDETOFUJII TAKASHI
    • C30B15/22
    • PROBLEM TO BE SOLVED: To provide a method for producing an oxide single crystal by Czochralski technique, so designed that the fluctuation of the intensity of the thermal radiation from a single crystal being in growth is measured with a thermosensor, and based on the result, a feedback control of single crystal growth environment is performed so as to diminish the above fluctuation to raise the yield of the aimed single crystal. SOLUTION: This method involves a system as follows: a single crystal growing oven 10 holds a thermal insulation cylinder 12 therefor, a noble metallic crucible 14 holding a stock melt therein is placed in the interior of the cylinder, and a heating coil 16 is set up around the crucible; a support bar 18 with a seed crystal attached to its lower end is set up above the crucible 14, while a load cell 20 is mounted on the opposite side; signals from the load cell 20 is inputted via a digital voltmeter 22 into a personal computer 24, which, in turn, is connected, via a set-point controller 26 and a high-frequency oscillator 28, to the heating coil 16; a peephole 30 is preferably provided on the upper part of the oven 10, and there is disposed a radiation thermometer 32 for a thermosensor 32 with which the temperature of a single crystal being in growth is measured.