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1. 发明专利

JP2005321415A Defect inspection method and defect inspecting apparatus 审中-公开
标题翻译：缺陷检查方法和缺陷检查装置
公开(公告)号：JP2005321415A
公开(公告)日：2005-11-17
申请号：JP2005212914
申请日：2005-07-22
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： ONOYAMA AYUMI , SAKURAI KOICHI , OKA KAZUHIRO , ISHII HIROYUKI , FUJIYOSHI KATSUHIRO
IPC分类号： G01N21/956 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To detect defects, such as lack of conductors, short-circuitings, and adhesion of foreign matters on a wafer containing a normal conductive pattern, having irregularities with high probability in a film formation and etching process, in the manufacture of a semiconductor device.
SOLUTION: A defect inspection apparatus has an imaging element for converting the optical image of a part, containing a normal conductive pattern having surface irregularities, and that of a part compared with a part to be inspected, to an electric charge image for extracting as an electrical signal. The optical image containing a conductive pattern part, having surface irregularities, is set to be an element signal by the imaging element, and the quantity of light in the optical image is controlled so that the element signal is saturated. Further, the element signal of the part to be inspected is fetched by using the quantity of light, thus determining the defects, according to the differential signal of an element signal fetched from the part to be compared and the absolute value of the difference between the element signal of the part having irregularities in the conductive pattern and a saturation level.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了检测诸如缺少导体，短路以及含有正常导电图案的晶片的缺陷，在成膜和蚀刻工艺中具有高概率的不规则性的缺陷，制造半导体器件。解决方案：缺陷检查装置具有成像元件，用于将包含具有表面凹凸的正常导电图案的部分的光学图像和与被检查部分相比的部分的光学图像转换成电荷图像，提取为电信号。含有具有表面不规则性的导电图案部分的光学图像被成像元件设置为元件信号，并且控制光学图像中的光量，使得元件信号饱和。此外，通过使用光量来取出要检查的部件的元件信号，从而根据从要比较的部件取出的元件信号的差分信号和第元件信号在导电图案中具有不规则性和饱和度。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2000081841A CIPHER MANAGEMENT DEVICE AND ENCRYPTION METHOD 失效
公开(公告)号：JP2000081841A
公开(公告)日：2000-03-21
申请号：JP24972298
申请日：1998-09-03
申请人： MITSUBISHI ELECTRIC CORP
发明人： SAKAI YASUYUKI , SAKURAI KOICHI
IPC分类号： G09C1/00
摘要： PROBLEM TO BE SOLVED: To realize a high seed hyperelliptic curve public key enciphering method. SOLUTION: When a Jacobi manifold on the finite body Fq annexed to a hyperelliptic curve C is defined as J(C, Fq), a hyperelliptic curve C generating part 30 generaters the hyperelliptic curve C based on a CPU bit width N so that the number #J(C, Fq) of elements of the Jacobi manifold J(C, Fq) is divisible by a large prime number. Then, calculations in the Jacobi manifold J(C, Fq) can be executed with an ordinary integer arithmetic in which a multi-length- precise arithmetic is unnecessary. Moreover, this device has good authority of securuty in the difficulty of the descret logarithm problem defined on the Jacobi manifold J(C, Fq).

3. 发明专利

JPH11161166A CIPHER COMMUNICATION EQUIPMENT AND METHOD THEREFOR 失效
公开(公告)号：JPH11161166A
公开(公告)日：1999-06-18
申请号：JP33061797
申请日：1997-12-01
申请人： MITSUBISHI ELECTRIC CORP
发明人： SAKAI YASUYUKI , ISHIZUKA YUICHI , SAKURAI KOICHI
IPC分类号： G09C1/00
摘要： PROBLEM TO BE SOLVED: To permit high-speed processing for ciphering and deciphering without lowering the security of cipher communication by making the number of finite bodies less than that of elements of a Jacobi polymorphism. SOLUTION: A parameter selection part 4 selects an algebraic curve C, a finite body F(q) having (q) elements, and an element D of the Jacobi polymorphism J, and outputs the element of the Jacobi polymorphism J to a data reception device 3 and a data transmission device 2. To increase the safety of cipher communication, such a Jacobi polymorphism J that elements of Jacobi polymorphism J are as large as possible and the number of its elements can be divided by a large prime number is selected. The algebraic curve C and finite body (q) are so selected that the Jacobi polymorphism J is not mapped to a small multiplication group Z((g ) )* by mapping called a Tate pair. To make it difficult to solve a discrete logarithmic problem on the Jacobi polymorphism, the algebraic curve C and finite body F(g) are so selected that the genus (g) of the algebraic curve C and the number (q) of the elements of the finite body F(q) have a relation 3g+1

4. 发明专利

JPH06305200A PRINTER AND PRINTING VERIFICATION DEVICE FOR ELECTRONIC APPROVAL INFORMATION 失效
公开(公告)号：JPH06305200A
公开(公告)日：1994-11-01
申请号：JP9400193
申请日：1993-04-21
申请人： MITSUBISHI ELECTRIC CORP
发明人： OKAMOTO TAKASHI , SAKURAI KOICHI
IPC分类号： B41J5/30 , B41J29/00 , G06F17/21 , G06F21/24 , G09C1/00 , G09C5/00 , G06F15/20
摘要： PURPOSE:To find an interpolation when a sentence is interpolated all over after approval. CONSTITUTION:With the input of electronic information 102 and confidential information 100, an approval information generation means 19 generates approval information 103 for the electronic information 102 using the confidential information 100. The generated approval information 103 is converted to a printing form by an approval information conversion means 21 and printed by an approval information printing means 22. The electronic information 102 is printed by an electronic information printing means 20. The information on a printed matter 32 is read by an electronic information input means 23 and an approval information input means 25. The read information is respectively converted to electronic information 102 and approval information 103. The presence/absence of interpolation is verified by an approval verifying means 28 in accordance with open information 101, the electronic information 102, and the approval information 103. If the information is not interpolated, the processing is normally terminated. If the information is interpolated, the processing is, abnormally terminated.

5. 发明专利

JPH04100681A ENERGY BEAM MACHINING METHOD 失效
公开(公告)号：JPH04100681A
公开(公告)日：1992-04-02
申请号：JP21440490
申请日：1990-08-15
申请人： MITSUBISHI ELECTRIC CORP
发明人： YAMANE YOSHIO , SAKURAI KOICHI
IPC分类号： B23K15/00 , B23K15/02 , B23K26/00 , B23K26/064 , B23K26/382
摘要： PURPOSE:To perform machining in a short time while strain and cracking of a workpiece being prevented by carrying out deflection irradiation of an energy beam while the energy beam irradiation quantities of a machining part and non-machining parts of the workpiece being regulated, respectively. CONSTITUTION:Since machining can be performed in a short time while strain and cracking of the workpiece 14 being prevented, the machining time can be reduced remarkably by regulating the irradiation of the energy beam so as to maintain almost uniformly a temperature distribution between the machining area 15 and the non-machining areas 16 of the workpiece 14 by using an energy beam machine having an uniaxial beam deflection means at least.

6. 发明专利

JPH03281072A ELECTRON BEAM DRILLING MACHINE 失效
公开(公告)号：JPH03281072A
公开(公告)日：1991-12-11
申请号：JP7961690
申请日：1990-03-28
申请人： MITSUBISHI ELECTRIC CORP
发明人： SAKURAI KOICHI , YAMANE YOSHIO
IPC分类号： B26F1/26 , B23K15/08
摘要： PURPOSE:To carry out an inspection in process of the irradiation position by providing a metallic plate having holes corresponding to the drilling positions by sticking it to an insulator in focused electron beam drilling work on the insulator. CONSTITUTION:When the insulator 1 is irradiated with the focused electron beam 3 to perform drilling work, the metallic plate 11 having the holes 12 on the positions corresponding to drilling places of the insulator 1 is provided by sticking it to the insulator 1 or in the vicinity thereof. Consequently, the insulator is protected for the positional deviation of the electron beam irradiation and further, whether or not the irradiation position of the electron beam is correct can be inspected in process by detecting an electrical signal from the metallic plate.

7. 发明专利

JPH0335884A ENERGY BEAM MACHINE 失效
公开(公告)号：JPH0335884A
公开(公告)日：1991-02-15
申请号：JP16689989
申请日：1989-06-30
申请人： MITSUBISHI ELECTRIC CORP
发明人： YAMANE YOSHIO , SAKURAI KOICHI
IPC分类号： B23K15/00
摘要： PURPOSE:To cover evaporative material and to prevent contamination by providing a rotatable disk which is arranged between an energy beam converging and deflecting means and a workpiece and provided with a hole for passing and a rotating and detecting means to rotate this disk and detect the hole position. CONSTITUTION:The rotary disk 12 is driven by a motor 14 and the rotating position of the hole 13 is detected by an encoder 15 and a counter 16 and the detected signal is transmitted to a high-pressure power source 1 as a generation timing signal of an electron beam 3. After the electron beam 3 finished passing the rotary disk 12, the evaporative material 11 is covered by the rotary disk 12 and does not attain the upper part from the rotary disk 12, namely, a convergent lens 4 and an electron gun 2. By this method, deterioration of the electron gun and contamination of the converging and deflecting means are reduced and safety and reliability of the energy beam machine are improved.

8. 发明专利

JPH037443A VERIFICATION EQUIPMENT 失效
公开(公告)号：JPH037443A
公开(公告)日：1991-01-14
申请号：JP4531789
申请日：1989-02-28
申请人： MITSUBISHI ELECTRIC CORP
发明人： SAKURAI KOICHI
IPC分类号： H04L9/32 , H04L9/00 , H04L9/10 , H04L9/12
摘要： PURPOSE:To attain safe verification with high reliability by devising the equipment such that a verifying personnel checks a date of a verification data sent from a verified person and checks the validity of the verified data and identifies whether or not the verified person is the concerned person. CONSTITUTION:A verified person A uses a random number generator 1 to generate a random number and generates a verified data from a date, time at verification, the random number and secret information of the verified person A and sends the result to a verifying personnel B. The verifying personnel B checks whether or not the date, time of the verified data sent from the verified person A is correct and checks whether or not the verified data is correct and verifies whether or not the verified person A is the concerned person. Thus, disguise or intercept are prevented, and only the verified person A requires the random number generator 1 with high security of verification, only one communication is enough and the verification with excellent communication efficiency is attained.

9. 发明专利

JPH02295689A ENERGY BEAM DRILLING METHOD 失效
公开(公告)号：JPH02295689A
公开(公告)日：1990-12-06
申请号：JP11710789
申请日：1989-05-10
申请人： MITSUBISHI ELECTRIC CORP
发明人： SAKURAI KOICHI , YAMANE YOSHIO
IPC分类号： B23K15/08 , B23K26/382 , H05K3/00
摘要： PURPOSE:To perform drilling at high speed with high accuracy by changing repetitive frequency of an energy beam and forming drilled holes having funnel- shaped cross-sectional forms at the time of performing drilling with plural beam pulses per hole. CONSTITUTION:When materials such as ceramic and synthetic resin are irradiated with an electron beam 8 from an electron gun 1, since evaporated materials are generated and scattered at the time of machining these materials, the irradiation electron beam is scattered by those evaporated particles. The higher the repetitive frequency is, the more this scattering effect becomes remarkable. lt is considered that this cause is due to the fact that the interval of the beam irradiations becomes shorter and the particles are hardly scattered. Even if the same electron beam is projected, when the repetitive frequency is made high, the machined hole diameter is increased by the scattering effect. By this method, in energy beam drilling work to perform drilling with the plural beam pulses per hole, many holes having funnel-shaped cross-sectional forms can drilled at high speed with high accuracy by changing the repetitive frequency of the beam and using the scattering effect.

10. 发明专利

JPH02229682A BEAM DEFLECTING METHOD FOR ELECTRON BEAM MACHINE 失效
公开(公告)号：JPH02229682A
公开(公告)日：1990-09-12
申请号：JP4644889
申请日：1989-03-01
申请人： MITSUBISHI ELECTRIC CORP
发明人： YAMANE YOSHIO , SAKURAI KOICHI
IPC分类号： B23K15/00
摘要： PURPOSE:To efficiently shield the splashes from a work and to improve the reliability of the processing machine by applying the signal which is always constant with time to one deflection axis and applying a scanning signal to the remaining deflection axis. CONSTITUTION:An electron beam 2 accelerated and released from an electron gun 1 is converged to focus near the surface of the work 5 by a focusing lens 3 and is thereafter deflected and scans in accordance with the beam deflection signals A to D of deflection lenses 4 consisting of two sets. The beam scanning signal is applied to A and C and the deflection signal invariable with time is applied to B and D. The beam scanning axis is confined to one axis and the work is irradiated with the beam through a shielding plate 8 provided with a slit 8, by which the scattering of the splashes 6 toward the upper side of the plane of the figure is suppressed and the reliability of the device is improved.

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