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    • 9. 发明专利
    • MANUFACTURE OF MULTILAYER PRINTED WIRING BOARD
    • JPH03290993A
    • 1991-12-20
    • JP9180290
    • 1990-04-06
    • MITSUBISHI ELECTRIC CORP
    • ARAI HITOSHIKOBAYASHI ISAOSAKIDA KIKUOYAMAZAKI RYOICHI
    • H05K3/00H05K3/46
    • PURPOSE:To improve adjustment accuracy of a boring position by providing a land for observing radiation at required intervals for each lamination inner layer, by laminating an inner layer, by boring a reference hole for radiation observation based on the land, and by measuring deviation error of a land position thereto for fine-adjustment of a boring position. CONSTITUTION:A hole for radiation observation is formed by providing a land group m1 which is formed by lands 3 arranged at a specified intervals for each lamination inner layer 2 without overlapping each other. The layer 2 is laminated in the state, and a reference hole group m2 of a reference hole 4 which passes through a lamination is bored based on the hole 4 of the group m1. The hole 4 each of groups m1, m2 is observed by radiation to measure position deviation error of the hole 4 of the group m1 based on the hole 4 of the group m2. A position of the lamination when bored is adjusted in accordance with the error. Thereby, a hole position is fine-adjusted with high accuracy and development of defects of a multilayer printed wiring board caused by hole position deviation can be prevented.
    • 10. 发明专利
    • EXPOSURE OF PRINTED WIRING BOARD
    • JPH01166037A
    • 1989-06-29
    • JP32442587
    • 1987-12-22
    • MITSUBISHI ELECTRIC CORP
    • ARAI HITOSHIKOBAYASHI ISAOMORIHIRO YOSHIYUKI
    • G03F7/20H05K3/00
    • PURPOSE:To improve a precision of exposure for forming an electric circuit pattern, etc., to permit efficient exposure of internal wall surfaces of small holes of a small diameter, and to improve working efficiency by using a light source provided by inserting a lamp into a tubular roller comprising a rotatable glass tube, etc. CONSTITUTION:A masking film 4 for electric pattern is superposed on a substrate 3 having a penetrated hole such as a through-hole having a photosensitive resist film formed thereon, etc. Then, the substrate 3 superposed with the masking film 4 is allowed to contact with a space between a pair of upper and lower light source 10 provided by inserting a lamp 1 into a rotatable roller 9 comprising glass etc., such as ultraviolet rays transmissive glass, etc. The exposure is executed by passing the substrate at a fixed speed. The exposure may be executed by moving the light source by rotating the glass tube 9 without moving the substrate 3. Thus, the photosensitive resist film on the internal wall surface of the through-hole is exposed efficiently, and the precision of the pattern is improved. Moreover, continuous operation has become possible and the productivity is improved because an evacuation stage is no more necessary.