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    • 8. 发明专利
    • COMPOSITION FOR SPIN COATING
    • JPH0827421A
    • 1996-01-30
    • JP16224894
    • 1994-07-14
    • MITSUBISHI CHEM CORP
    • YAMAMOTO MASAKITODA ATSUSHICHOKAI TAKASHI
    • B05D1/40B05D7/24C08G77/02C09D183/00C09D183/02G11B7/24G11B7/254G11B7/257H01L21/027H01L21/316
    • PURPOSE:To obtain a composition for spin coating, consisting essentially of a tetraalkoxysilane (a partial hydrolyzate), an organic solvent having a specific boiling point, water and an organic carboxylic acid, good in preservation stability and capable of providing a film having a flat surface without any striation. CONSTITUTION:This composition for spin coating consists essentially of (A) a tetraalkoxysilane (e.g. tetramethoxysilane) and/or its partial hydrolyzate, (B) an organic solvent having 110-170 deg.C boiling point (e.g. 2-ethoxyethanol), (C) water and (D) an organic carboxylic acid (e.g. maleic acid). The composition for the spin coating is obtained by mixing the tetraalkoxysilane (a partial hydrolyzate) with the organic solvent, stirring the resultant mixture at ambient temperature, uniformly dissolving the tetraalkoxysilane therein, then adding water and organic carboxylic acid thereto in the order, stirring the prepared mixture until the organic carboxylic acid is dissolved and subsequently allowing the resultant solution to stand at ambient temperature for 4 days. Thereby, the composition for the spin coating is good in preservation stability of the liquid and capable of providing a silica film having an extremely small dispersion in thickness and a flat surface without any striation.