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1. 发明专利

JP2010041558A Impedance matching device and method of impedance matching 有权
标题翻译：阻抗匹配装置和阻抗匹配方法
公开(公告)号：JP2010041558A
公开(公告)日：2010-02-18
申请号：JP2008204124
申请日：2008-08-07
申请人： Kyosan Electric Mfg Co Ltd , Yokohama National Univ , 国立大学法人横浜国立大学 , 株式会社京三製作所
发明人： KAWAMURA TOKUO , HIROSE YUKI , TAKAYANAGI ATSUSHI , TAKADA KOICHI
IPC分类号： H03H11/30 , H03H7/40
摘要： PROBLEM TO BE SOLVED: To prevent the loss of control in impedance matching.
SOLUTION: In an impedance matching device for adjusting the impedance of a high-frequency power supply and a load, the impedance matching device includes: an impedance matching circuit in which the impedance variable element between the high-frequency power supply and the load is provided; and an impedance control section for performing impedance matching by controlling the phase difference of voltage and current and the absolute value of the input impedance of the impedance matching circuit so as to conform with each target value, by changing the impedance value of the impedance variable element of the impedance matching circuit. By carrying out the impedance matching for combining a seek control and a following control, the loss of control in the impedance matching is prevented.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：防止阻抗匹配失控。解决方案：在用于调整高频电源和负载的阻抗的阻抗匹配装置中，阻抗匹配装置包括：阻抗匹配电路，其中高频电源和提供负载; 以及阻抗控制部，其通过控制电压和电流的相位差以及阻抗匹配电路的输入阻抗的绝对值，以便符合每个目标值，通过改变阻抗可变元件的阻抗值来执行阻抗匹配的阻抗匹配电路。通过执行用于组合搜索控制和后续控制的阻抗匹配，可以防止阻抗匹配中的失控。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2013012958A Impedance matching device, impedance matching method and calibration method 有权
标题翻译：阻抗匹配装置，阻抗匹配方法和校准方法
公开(公告)号：JP2013012958A
公开(公告)日：2013-01-17
申请号：JP2011144897
申请日：2011-06-29
申请人： Kyosan Electric Mfg Co Ltd , 株式会社京三製作所
发明人： TAKAYANAGI ATSUSHI , TAKADA KOICHI , KAWAMURA TOKUO , IMAIZUMI TOMOYA
IPC分类号： H03H7/40 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To prevent impedance matching from becoming uncontrollable owing to a deviation from a characteristic impedance due to a wiring inductance or the like, and especially implement high stability seek control.SOLUTION: For reducing the effect of a wiring inductance in an impedance matching circuit, which is a factor of imperfect matching control, the impedance matching circuit is modeled by a concentrated constant and the wiring inductance is set as an unknown parameter, the unknown parameter is identified, and an impedance variable element of the impedance matching circuit is adjusted with the identified unknown parameter for matching control.
摘要翻译：要解决的问题：为了防止阻抗匹配由于与布线电感等引起的特性阻抗的偏离而变得不可控制，并且特别地实现了高稳定性搜索控制。
解决方案：为了降低作为不完全匹配控制的因素的阻抗匹配电路中的布线电感的影响，阻抗匹配电路由集中常数建模，布线电感设置为未知参数，识别未知参数，并用识别的未知参数调整阻抗匹配电路的阻抗可变元件以进行匹配控制。版权所有（C）2013，JPO＆INPIT

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