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    • 5. 发明专利
    • Method of forming transparent layer on inside surface of quartz crucible
    • 在QUARTZ可溶性表面形成透明层的方法
    • JP2004292211A
    • 2004-10-21
    • JP2003085211
    • 2003-03-26
    • Kuramoto Seisakusho Co Ltd株式会社倉元製作所
    • WATABE HIROYUKIFUJISHIRO MASARUNAKAJIMA SHINICHI
    • C03B20/00C30B15/10C30B29/06
    • C03B19/095Y02P40/57
    • PROBLEM TO BE SOLVED: To provide a technique for forming a transparent layer on the inside surface of a quartz crucible and a method of inexpensively manufacturing the quartz crucible for improving the yield of a silicon single crystal. SOLUTION: The inside surface of quartz powder is sintered at first in the melting in the quartz crucible to set bulk density from 1.7 to 1.8. Next the transparent layer is formed on the inside surface of the quartz crucible by rapidly increasing the melting temperature. When the bulk density is set from 1.7 to 1.8, the thickness of the sintered layer is increased and the thickness of the transparent layer is also increased by passing gaseous argon. When the temperature is rapidly elevated, the size of the bubbles in the transparent layer is decreased by passing gaseous hydrogen to prevent the expansion. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供在石英坩埚的内表面上形成透明层的技术和廉价制造石英坩埚以提高硅单晶的产率的方法。

      解决方案:石英粉末的内表面首先在石英坩埚的熔化中烧结,使堆积密度为1.7至1.8。 接着,通过快速提高熔融温度,在石英坩埚的内表面上形成透明层。 当体积密度为1.7〜1.8时,烧结层的厚度增加,通过气态氩也增加透明层的厚度。 当温度迅速升高时,通过使气态氢气阻止膨胀,透明层中气泡的尺寸减小。 版权所有(C)2005,JPO&NCIPI