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JP2013105825A Biomagnetic sensor and manufacturing method thereof 有权
标题翻译：生物传感器及其制造方法
公开(公告)号：JP2013105825A
公开(公告)日：2013-05-30
申请号：JP2011247362
申请日：2011-11-11
申请人： Konica Minolta Advanced Layers Inc , コニカミノルタアドバンストレイヤー株式会社 , Tohoku Univ , 国立大学法人東北大学
发明人： NISHIKAWA TAKAO , ARAKAWA HIROAKI , ANDO YASUO , OKANE MIKIHIKO , FUJIWARA KOSUKE
IPC分类号： H01L43/08 , G01R33/09 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To achieve high sensitivity of a tunnel magnetoresistive element in a biomagnetic sensor using the tunnel magnetoresistive element and measure biomagnetism with high accuracy by the sensor.SOLUTION: In a zero magnetic field, an easy magnetization axis 4a of a ferromagnetic metal magnetization free layer 4 is at a twisted position with respect to an easy magnetization axis 6a of a ferromagnetic metal magnetization fixed layer 6. Preferably, the twist angle is between 45 degrees and 135 degrees. The fixed layer is laminated at a position upper than the free layer, and the area of the fixed layer is arranged smaller than the area of the free layer. The free layer and the fixed layer each comprise three layers -- a first ferromagnetic body, an ultra thin non-magnetic metal layer, and a second ferromagnetic body -- and have an anti-parallel coupling film structure having exchange coupling force, in the structure the magnetization direction of the first ferromagnetic body and the magnetization direction of the second ferromagnetic body with the ultra thin non-magnetic metal layer interposed therebetween becoming anti-parallel. MgO and Ru are used as for an insulation layer and the ultra thin non-magnetic metal layer respectively.
摘要翻译：要解决的问题：使用隧道磁阻元件实现生物磁传感器中隧道磁阻元件的高灵敏度，并通过传感器以高精度测量生物磁性。解决方案：在零磁场中，强磁性金属磁化自由层4的易磁化轴线4a相对于强磁性金属磁化固定层6的易磁化轴线6a处于扭转位置。优选地，扭转角度在45度到135度之间。固定层层叠在自由层上方的位置，固定层的面积比自由层的面积小。自由层和固定层各自包括三层 - 第一铁磁体，超薄非磁性金属层和第二铁磁体 - 并具有具有交换耦合力的反平行耦合膜结构，在结构化第一铁磁体的磁化方向和第二铁磁体的磁化方向与其间的超薄非磁性金属层成为反平行。 MgO和Ru分别用作绝缘层和超薄非磁性金属层。版权所有（C）2013，JPO＆INPIT

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