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1. 发明专利

JP2003338489A Fluid temperature regulating device 有权
标题翻译：流体温度调节装置
公开(公告)号：JP2003338489A
公开(公告)日：2003-11-28
申请号：JP2003064403
申请日：2003-03-11
申请人： Komatsu Ltd , 株式会社小松製作所
发明人： KUBOTA KAZUHIKO , SHIBATA ISAO
IPC分类号： F28F21/02 , F25B21/02 , F25B21/04 , F28F3/08 , F28F7/02 , F28F19/02 , F28F21/06 , H01L21/00 , H01L21/304 , H01L21/306 , H01L35/30
CPC分类号： H01L21/67248 , F25B21/04 , F25B2321/023 , F28D2021/0077 , F28F3/083 , F28F7/02 , F28F19/02 , F28F21/065 , F28F2265/26 , H01L21/67103 , H01L35/30
摘要： PROBLEM TO BE SOLVED: To provide a fluid temperature regulating device, in which chemical hardly remains after extracting from a heat transfer chamber and which heats or cools the fluid efficiently.
SOLUTION: The fluid temperature regulating device for regulating the temperature of the fluid by passing the same through the heat transfer chamber is provided with a heat transfer block 1 having a recessed part 5, a heat transfer plate 2 for forming the heat transfer chamber 10 by covering the recessed part 5, and a temperature regulating unit 50 for effecting heat exchange with the fluid passing through the heat transfer chamber 10 through the heat transfer plate 2. The heat transfer block 1 is provided with inflow ports 13a-13e for the inflow of the fluid into the heat transfer chamber 10 and outflow ports 14a-14e for the outflow of the fluid out of the heat transfer chamber 10, while the inflow ports 13a-13e and the outflow ports 14a-14c are respectively formed at the end parts 5d, 5c which are opposed with the recessed part 5 mutually.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种流体温度调节装置，其中在从传热室提取后几乎不残留化学物质，并且有效地加热或冷却流体。解决方案：通过使流体通过传热室来调节流体的温度的流体温度调节装置设置有传热块1，传热块1具有凹部5，传热板2，用于形成传热通过覆盖凹部5的腔室10，以及与通过传热板10通过传热室10的流体进行热交换的温度调节单元50.传热块1设置有流入口13a-13e，用于流体流入传热室10和流出口14a-14e以便将流体从传热室10流出，而流入口13a-13e和流出口14a-14c分别形成在与凹部5相对的端部5d，5c。版权所有（C）2004，JPO

2. 发明专利

JP2004279340A Microchip and temperature regulator therefor 审中-公开
公开(公告)号：JP2004279340A
公开(公告)日：2004-10-07
申请号：JP2003074106
申请日：2003-03-18
申请人： Komatsu Ltd , 株式会社小松製作所
发明人： AKIBA HIRONAGA , SHIBATA ISAO
IPC分类号： G01N1/28 , C12M1/00 , C12N15/09 , G01N37/00
摘要： PROBLEM TO BE SOLVED: To make accurately detectable the temperature of a substrate of microchip. SOLUTION: A microchip 1 is equipped with a substrate 5 having upper and under surfaces, one or more reaction chambers 6 provided to the substrate 5 and one or a plurality of temperature sensors 10 provided to the parts other than the reaction chambers 6 of the inside, under surface and upper surface of the substrate 5 or to the inner surfaces of the reaction chambers 6 to output temperature detection signals to the outside of the substrate 5. The temperature sensors 10 may also be arranged to the surface on the side of the microchip 1 of a Peltier thermoelectric transducer 9, having a temperature regulator of the microchip 1, or to a position near the microchip 1 in the Peltier thermoelectric transducer 9. COPYRIGHT: (C)2005,JPO&NCIPI

3. 发明专利

JPH11282545A Temperature controller and method therefor 有权
标题翻译：温度控制器及其方法
公开(公告)号：JPH11282545A
公开(公告)日：1999-10-15
申请号：JP30258698
申请日：1998-10-23
申请人： Komatsu Ltd , 株式会社小松製作所
发明人： OSANAI HITOSHI , MIYAMOTO SHUNSUKE , SATO TOMOHISA , TAKECHI HIROAKI , HATANAKA TSUTOMU , TAKAHASHI NORIO , KAMEI TOSHIYUKI , SUGIHARA TAKUMI , SHIBATA ISAO , AKIBA HIRONAGA
IPC分类号： F04B49/06 , F04B41/00 , F25B1/00 , G05D23/00 , G05D23/19
CPC分类号： G05D23/1919 , Y02P80/156
摘要： PROBLEM TO BE SOLVED: To provide a temperature controller for controlling an object whose temperature should be controlled as accurately as possible. SOLUTION: This temperature controller is provided with a chiller 18 interposed in a fluid circulating and supplying system 3 for cooling temperature fluid returned from a vacuum chamber 1, a first flow rate control valve 40 interposed in the fluid circulating and supply system 3 intending from the chiller 10 to the vacuum chamber 1, a by-pass passage 50 for branching and supplying the temperature fluid returned from the vacuum chamber 1 to a position from the first flow rate control valve 40 to the vacuum chamber 1 before the temperature fluid reaches the chiller 10, a second flow rate control valve 60 interposed on the by-pass passage 50, and a halogen lamp heater 30 interposed in the fluid circulating and supply system 3 from a junction point X with the by-pass passage 50 to the vacuum chamber 1 for adjusting the temperature of the passing temperature fluid to a set temperature.
摘要翻译：要解决的问题：提供一种用于控制温度应尽可能准确地控制的物体的温度控制器。解决方案：该温度控制器设置有冷冻机18，该制冷机18插入在用于冷却从真空室1返回的温度的流体的流体循环供给系统3中，第一流量控制阀40插入在流体循环供给系统3中，冷冻机10到真空室1，旁通通路50，用于在温度流体到达冷却器之前将从真空室1返回的温度流体分支和供给到从第一流量控制阀40到真空室1的位置如图10所示，设置在旁路通路50上的第二流量控制阀60和从流路循环供给系统3中插入到旁路通路50的连接点X到真空室1的卤素灯加热器30 用于将通过的温度流体的温度调节到设定温度。

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