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JP2013228333A Method and device for measuring particle beam distribution 有权
标题翻译：用于测量颗粒束分布的方法和装置
公开(公告)号：JP2013228333A
公开(公告)日：2013-11-07
申请号：JP2012101797
申请日：2012-04-26
申请人： Jfe Engineering Corp , Jfeエンジニアリング株式会社
发明人： DOI MAKOTO , HATTORI TAKUMI , MATSUMOTO TORU , MANJO SHIN
IPC分类号： G01T1/29 , G01T1/20 , G01T1/28 , G21K5/04 , G21K5/08
摘要： PROBLEM TO BE SOLVED: To provide a method and device for measuring a particle beam distribution, which can easily measure the distribution of high-voltage and high-output particle beams with high accuracy without using an amperometric element.SOLUTION: A metal plate 20 is arranged at a boundary between a vacuum at a particle beam application part (including a cathode electron gun 10) and an atmosphere or on an atmospheric side of a transmission window 18. Particle beams (electrons 12) are made collide with the metal plate 20, so that X-rays 21 are generated. The X-rays 21 generated at the metal plate 20 are converted to light by a scintillator 22 arranged on the atmospheric side, so that the light generated from the scintillator 22 is captured by a camera (a CCD camera 24).
摘要翻译：要解决的问题：提供一种用于测量粒子束分布的方法和装置，其可以在不使用电流分析元件的情况下以高精度容易地测量高电压和高输出粒子束的分布。解决方案：金属板20是布置在粒子束施加部（包括阴极电子枪10）的真空与透光窗18的气氛或大气侧之间的边界处。粒子束（电子12）与金属板20碰撞，从而产生X射线21。在金属板20上产生的X射线21通过布置在大气侧的闪烁器22转换为光，从而由闪光体22产生的光被照相机（CCD照相机24）捕获。

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