专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2013218901A Sample holding device and sample analysis device 有权
标题翻译：样品保持装置和样品分析装置
公开(公告)号：JP2013218901A
公开(公告)日：2013-10-24
申请号：JP2012088918
申请日：2012-04-10
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , MATSUSHIMA HIDEKI
IPC分类号： H01J37/20 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a sample holding device capable of performing crystal orientation analysis of a sample without taking time and effort.SOLUTION: In performing EBSD measurement of a sample, an operator extracts a sample table 1 with sample 13 fixed from a first hole 7, and inserts the sample table into a second hole 8. In this state, a sample analysis surface 13a is inclined by 70° with respect to a horizontal plane. When sample holder 6 is attached to a sample stage of an electron beam irradiation device having an option axis in a vertical direction, a satisfactory backscattering electron diffraction pattern can be acquired without performing inclination adjustment of the sample stage.
摘要翻译：要解决的问题：提供一种能够在不花费时间和精力的情况下进行样品的晶体取向分析的样品保持装置。解决方案：在进行样品的EBSD测量中，操作者从第一个样品13固定的样品13提取样品台1 孔7，并将样品台插入第二孔8.在该状态下，样品分析表面13a相对于水平面倾斜70°。当样品保持器6附着到具有垂直方向的选择轴的电子束照射装置的样品台时，可以获得令人满意的反向散射电子衍射图案，而不进行样品台的倾斜调节。

2. 发明专利

JP2010197272A Sample coating method of electron microscope 审中-公开
标题翻译：电子显微镜样品涂层方法
公开(公告)号：JP2010197272A
公开(公告)日：2010-09-09
申请号：JP2009043653
申请日：2009-02-26
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , SHIBATA MASATERU
IPC分类号： G01N1/28 , H01J37/20 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To provide a sample coating method of an electron microscope capable of performing the conductive treatment of an insulating sample by a simple constitution, concerning the sample coating method of the electron microscope. SOLUTION: A multi-beam device including optical systems of a scanning electron microscope 10 and a focused ion beam device 11, and having a structure wherein each optical axis of the two optical systems intersects each other at one point of a sample position is constituted as follows: a manipulator 12 whose probe 13 position at the tip is movable is installed in a chamber 1 of the multi-beam device; an evaporation material holding mechanism is provided at a probe tip of the installed manipulator 12; the evaporation material holding mechanism is brought close to the periphery of a processing cross section of the insulating sample processed by ion beams; sputtering is performed by irradiating a evaporation material in the evaporation material holding mechanism with ion beams from the focused ion beam device 11; and thereby the processing cross section of the insulating sample is coated with the evaporation material. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够通过简单的结构对电子显微镜的样品涂布方法进行绝缘样品的导电处理的电子显微镜的样品涂布法。解决方案：包括扫描电子显微镜10和聚焦离子束装置11的光学系统的多光束装置，并且具有其中两个光学系统的每个光轴在样本位置的一个点处彼此相交的结构构造如下：其中探针13位于尖端的可操作的操纵器12安装在多光束装置的腔室1中; 蒸发材料保持机构设置在安装的操纵器12的探头顶端处; 蒸发材料保持机构靠近由离子束加工的绝缘样品的处理截面的周边; 通过用离子束从聚焦离子束装置11照射蒸发材料保持机构中的蒸发材料进行溅射; 由此绝缘样品的加工横截面涂覆有蒸发材料。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2008014899A Sample preparing method 审中-公开
标题翻译：样品制备方法
公开(公告)号：JP2008014899A
公开(公告)日：2008-01-24
申请号：JP2006189128
申请日：2006-07-10
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI
IPC分类号： G01N1/20 , G01N1/08 , G01N23/04
CPC分类号： H01J2237/208
摘要： PROBLEM TO BE SOLVED: To provide a sample preparing method capable of processing a cross section after plane observation more inexpensively and easily than existing technology. SOLUTION: The sample 1 is cut to a block shape in a chamber of a focused ion beam (FIB) device, the sample block (bulk) 4 is taken out of vacuum and is brought into contact with a glass probe 5 set at the tip of a manipulator to be supported. Next, the bulk 4 is fixed through epoxy resin to the tip of a cylindrical pin 6 as a sample stand. Next, a thin film sample for plane observation is prepared by FIB processing. Next, an internal defective position is two-dimensionally observed and identified by a TEM/STEM. Then, the pin 6 is manually rotated by 90°, and then the position including the defective part is cross-sectionally processed. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够比现有技术更廉价和容易地处理平面观察后的横截面的样品制备方法。解决方案：将样品1在聚焦离子束（FIB）装置的腔室中切割成块状，将样品块（本体）4从真空中取出并与玻璃探针5接触在要支撑的操纵器的尖端。接下来，本体4通过环氧树脂固定到作为样品台的圆柱形销6的末端。接下来，通过FIB处理制备用于平面观察的薄膜样品。接下来，通过TEM / STEM二维观察和识别内部缺陷位置。然后，将销6手动旋转90°，然后将包括缺陷部的位置进行横截面处理。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2010286276A Method of preparing sample for transmission-type electron microscope, and sample holder 有权
标题翻译：传输型电子显微镜样品的制备方法和样品瓶
公开(公告)号：JP2010286276A
公开(公告)日：2010-12-24
申请号：JP2009138367
申请日：2009-06-09
申请人： Jeol Ltd , 日本電子株式会社
发明人： MURAKAMI YASUKAZU , SUZUKI TOSHIAKI
IPC分类号： G01N1/28 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a method of preparing a sample for a transmission-type electron microscope capable of easily passing a current through a sample piece, and a sample holder. SOLUTION: An electric insulating film 3 is formed to the bowstring part of a semicircular conductive member 1 out of a vacuum, a gold wire 4 is adhered to the surface of the electric insulating film 3 and the preliminarily prepared sample piece 2a is attached to the bowstring part of the semicircular conductive member 1 using an actuator to be fixed thereto. Deposition for electric continuity is performed to the part of the sample piece under vacuum, a conductive probe is attached between the gold wire 4 and the sample piece 2a by deposition for fixing and the conductive probe is cut to prepare the sample for the transmission-type electron microscope. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种制备能够容易地使电流通过样品片的透射型电子显微镜样品和样品保持器的方法。解决方案：在真空中形成半导电构件1的弓弦部分的电绝缘膜3，金电线4粘附到电绝缘膜3的表面，预先制备的样品2a是使用致动器固定到半圆形导电构件1的弓弦部分。在真空下对样品的一部分进行电连续性的沉积，通过沉积固定将导电探针附着在金线4和样品2a之间，并且导电探针被切割以制备用于透射型的样品电子显微镜。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2009098088A Sample preparing method 审中-公开
标题翻译：样品制备方法
公开(公告)号：JP2009098088A
公开(公告)日：2009-05-07
申请号：JP2007272107
申请日：2007-10-19
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , NISHIOKA HIDEO
IPC分类号： G01N1/28
摘要： PROBLEM TO BE SOLVED: To provide a sample preparing method for preparing a sample suitable for an observation in a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM).
SOLUTION: An adhesive 34 is applied to a substrate 30. Spacers 31, 32 are disposed and adhered so as to put a specimen 40a between them on the substrate 30. A laminated body is formed by applying the adhesive on the adhered specimen 40a and the spacers 31, 32 and sticking a transparent protection film 33. After the adhesive is cured, the laminated body is cut with a cutter. The cut specimen 40a sticks to a glass plate. The sample is prepared by grinding the laminated body to a predetermined thickness.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于制备适用于透射电子显微镜（TEM）或扫描透射电子显微镜（STEM）中观察的样品的样品制备方法。解决方案：将粘合剂34施加到基底30上。间隔件31,32被设置和粘附以便将它们之间的试样40a放置在基底30上。通过将粘合剂施加在附着的试样上而形成层压体 40a和间隔件31,32，并粘贴透明保护膜33.在粘合剂固化之后，用切割器切割层压体。切割的标本40a粘在玻璃板上。通过将层压体研磨成预定厚度来制备样品。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2008083033A Sample preparation method 审中-公开
标题翻译：样品制备方法
公开(公告)号：JP2008083033A
公开(公告)日：2008-04-10
申请号：JP2007207448
申请日：2007-08-09
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , NISHIOKA HIDEO
IPC分类号： G01N1/28 , G01N1/06
摘要： PROBLEM TO BE SOLVED: To provide a sample preparation method capable of preparing a sample piece with a desired portion held under a favorable condition.
SOLUTION: A transparent protecting glass 2 is bonded onto a semiconductor element 1 surface by an epoxy resin 3 (Fig.2(a)). The epoxy resin 3 is heated (130°C) while applying pressure from an upper side of the protecting glass 2 to cure the epoxy resin 3 (Fig.2(b)). The sample piece 5 having 0.1 mm of thickness, 2.5 mm of width and 0.5 mm of height is cut out using a dicing saw (Fig.2(c)). The cut-out sample piece 5 is bonded onto a sample holder of an ion beam sample preparation device.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够制备具有保持在有利条件下的所需部分的样品片的样品制备方法。解决方案：通过环氧树脂3将透明保护玻璃2结合到半导体元件1表面上（图2（a））。将环氧树脂3加热（130℃），同时从保护玻璃2的上侧施加压力以固化环氧树脂3（图2（b））。使用切割锯切割具有0.1mm厚度，2.5mm宽度和0.5mm高度的样品5（图2（c））。切出的样品片5结合到离子束样品制备装置的样品架上。版权所有（C）2008，JPO＆INPIT

7. 发明专利

JP2010055988A Thin film sample observation system, cooling sample holder, and thin film sample observation method 有权
标题翻译：薄膜样品观察系统，冷却样品夹具和薄膜样品观察方法
公开(公告)号：JP2010055988A
公开(公告)日：2010-03-11
申请号：JP2008221123
申请日：2008-08-29
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , NAKAJIMA YUHEI
IPC分类号： H01J37/20
摘要： PROBLEM TO BE SOLVED: To accurately produce a thin film of the water-containing sample, and enable image observation with regard to a thin film sample observation system for a water-containing sample including a living sample, a cooling sample holder, and a thin film sample observation method. SOLUTION: The thin film sample observation system has an FIB device 1 for processing the water-containing sample represented as the biological sample at a thin film while the water-containing sample is cooled and freezed; and a sample observation device capable of attaining a TEM image or an STEM image of a cooled and freezed sample flake 20a conveyed by using the sample holder 10 while a cooled and freezed state of the sample flake is retained, when the sample flake 20a processed at a thin film state by the FIB device 1 is conveyed while the cooled and freezed state of the sample flake 20a is retained. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了精确地制造含水样品的薄膜，并且能够对包含活体样品，冷却样品保持器的含水样品的薄膜样品观察系统进行图像观察，和薄膜样品观察方法。解决方案：薄膜样品观察系统具有FIB装置1，用于在将含水样品冷却并冷冻的同时在薄膜处理表示为生物样品的含水样品; 以及样品观察装置，其能够获得当样品片的冷冻和冷冻状态保持时通过使用样品保持器10输送的冷冻和冷冻样品片20a的TEM图像或STEM图像，当样品片20a在当保持样品片20a的冷却和冻结状态时，通过FIB装置1的薄膜状态被传送。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2009216534A Thin-film sample preparation method 审中-公开
标题翻译：薄膜样品制备方法
公开(公告)号：JP2009216534A
公开(公告)日：2009-09-24
申请号：JP2008060471
申请日：2008-03-11
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , NAKAJIMA YUHEI
IPC分类号： G01N1/28 , H01J37/317
CPC分类号： H01J2237/208
摘要： PROBLEM TO BE SOLVED: To hold an observation desired portion stably on a sample holder, when extracting surely the observation desired portion from a large sample substrate and performing finishing process for preparing a thin-film sample, in a method for preparing the thin-film sample for performing observation by a transmission electron microscope by using a focused ion beam.
SOLUTION: A projection part 27a on an upper part of a sample block 27 is grasped by tips of nano-tweezers 40. The sample block 27 is grasped out from a sample substrate 23, and the sample block 27 is inserted into a groove 41 formed beforehand on the end face 29a of a silicon block 29. When the sample block 27 is difficult to be pressed into the groove 41 only by a force gripping the sample block by the nano-tweezers 40 because of a great frictional force between the outer wall surface of the sample block 27 and the inner wall surface of the groove 41, a step part of the projection part 27a of the sample block 27 is pressed by the tips of nano-tweezers 40.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了将样品保持器上的观察期望部分稳定地保持，当从大样品基板确定地观察所需部分并执行制备薄膜样品的精加工工艺时，在制备通过使用聚焦离子束通过透射电子显微镜进行观察的薄膜样品。解决方案：样品块27的上部的突出部27a由纳米镊子40的尖端抓住。样品块27从样品基底23中被抓取，并且样品块27插入到凹槽41预先形成在硅块29的端面29a上。当样品块27难以被压入凹槽41中时，只有通过由纳米镊子40夹住样品块的力，因为它们之间的摩擦力大样品块27的外壁表面和凹槽41的内壁表面，样品块27的突出部27a的台阶部分被纳米镊子40的尖端按压。版权所有（C））2009，JPO＆INPIT

9. 发明专利

JP2005293865A Sample holder and sample tilt holder 有权
标题翻译：样品支架和样品倾斜支架
公开(公告)号：JP2005293865A
公开(公告)日：2005-10-20
申请号：JP2004102815
申请日：2004-03-31
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , NISHIOKA HIDEO , SATO YASUHIKO , OKUNISHI EIJI , ENDO NORIAKI
IPC分类号： G01N1/32 , G01N1/28 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a sample holder for easily arranging a sample to a biaxial tilt holder.
SOLUTION: A rod-like introduction section 21 is formed so that it can be fitted to the goniometer of a transmission electron microscope. A chip-on cartridge 22 comprises a mounting section 23 and a shuttle (sample retaining section) 24. In the chip-on cartridge 22, a conventional chip-on cartridge is divided into two portions. One end of the mounting section 23 is formed so that it can be detachably mounted to the tip of the introduction section 21. The shuttle 24 is formed so that it can be detachably mounted to the other end of the mounting section 23. Therefore, a sample holder 20 shown in Fig. (b) can be obtained, by mounting the shuttle 24 to the mounting section 23 and by mounting the mounting section 23 to the tip of the introductions section 21.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供用于将样品容易地布置到双轴倾斜保持器的样品保持器。解决方案：形成杆状导入部21，使其能够配合到透射型电子显微镜的测角器上。芯片盒22包括安装部分23和梭子（样品保持部分）24。在芯片上的卡盘22中，常规的打码卡盒被分成两部分。安装部23的一端形成为能够可拆卸地安装在导入部21的前端。梭24形成为可拆卸地安装在安装部23的另一端。因此，图1所示的样品保持器20。（b）可以通过将梭24安装到安装部23并且将安装部23安装到引入部21的末端来获得。（C）版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2004198276A Method for fabricating sample for transmission electron microscope 有权
公开(公告)号：JP2004198276A
公开(公告)日：2004-07-15
申请号：JP2002367715
申请日：2002-12-19
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , NISHIOKA HIDEO , SATO YASUHIKO , OKUNISHI EIJI , ENDO NORIAKI
IPC分类号： G01N1/06 , G01N1/28 , G01N1/32 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a method for fabricating a sample for a transmission electron microscope which easily fabricates the thin film sample with a desired cross section. SOLUTION: A sample block 1 cut from a sample raw material is placed on a placement face 2a of a sample base 2 so as to laterally turn a processed face of the sample block 1. The processed face of the sample block 1 is orthogonal to the placement face 2a. After the placement, the sample base 2 is mounted to a FIB and a thin film process for the sample block 1 is implemented. COPYRIGHT: (C)2004,JPO&NCIPI

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式