基本信息:
- 专利标题： Method for fabricating sample for transmission electron microscope
- 申请号：JP2002367715 申请日：2002-12-19
- 公开(公告)号：JP2004198276A 公开(公告)日：2004-07-15
- 发明人： SUZUKI TOSHIAKI , NISHIOKA HIDEO , SATO YASUHIKO , OKUNISHI EIJI , ENDO NORIAKI
- 申请人： Jeol Ltd , 日本電子株式会社
- 专利权人： Jeol Ltd,日本電子株式会社
- 当前专利权人： Jeol Ltd,日本電子株式会社
- 优先权： JP2002367715 2002-12-19
- 主分类号： G01N1/06
- IPC分类号： G01N1/06 ; G01N1/28 ; G01N1/32 ; H01J37/20
摘要：
PROBLEM TO BE SOLVED: To provide a method for fabricating a sample for a transmission electron microscope which easily fabricates the thin film sample with a desired cross section. SOLUTION: A sample block 1 cut from a sample raw material is placed on a placement face 2a of a sample base 2 so as to laterally turn a processed face of the sample block 1. The processed face of the sample block 1 is orthogonal to the placement face 2a. After the placement, the sample base 2 is mounted to a FIB and a thin film process for the sample block 1 is implemented. COPYRIGHT: (C)2004,JPO&NCIPI
公开/授权文献:
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
| ------G01N1/00 | 取样；制备测试用的样品 |
| --------G01N1/02 | .取样装置 |
| ----------G01N1/04 | ..固体的，如采用切割 |
| ------------G01N1/06 | ...制成薄片，如用切片机 |