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    • 10. 发明专利
    • CRYOPUMP
    • JPH04362283A
    • 1992-12-15
    • JP13880991
    • 1991-06-11
    • HITACHI LTD
    • SAHO NORIHIDENEMOTO TAKEOOGATA HISANAOKAMIIDE YASUOYAMASHITA YASUO
    • F04B37/08
    • PURPOSE:To secure proper regenerative operation and reduce the arrangement space of a shutter mechanism by installing a shutter which is shiftble between a gas inlet surface and the inner-most wall surface, in a cryopump equipped with a cryopanel and a radiation heat shielding body. CONSTITUTION:A cryopump is arranged in a vacuum container, and a front surface frame 38 forms an inlet surface 37 for exhaust gas. A cryopanel 22 which condenses exhaust gas and traps it is cooled by the liquid helium which naturally circulates inside. Further, a louver 29, front surface heat sealing plates 30 and 31, back surface heat shield plate 31, and a side surface heat shielding plate 34 are cooled by the liquid nitrogen which naturally circulates in a pipe 7. In this case, the back surface heat shielding plate 33 and the back surface wall of the vacuum container are connected by a cylindrical pipe 39 having a small heat conductivity, and the held heat shielding pipe 41 of a shutter 40 is shifted in the cylindrical pipe 39. The shutter 40 is retreated to the innermost part in the exhaust of the cryopump, and closes an inlet surface 37 in regeneration.