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    • 4. 发明专利
    • METHOD AND INSTRUMENT FOR MEASUREMENT USING MOIRE METHOD
    • JPH08101025A
    • 1996-04-16
    • JP23635894
    • 1994-09-30
    • MATSUMOTO TETSUYAHYOGO PREFECTURE
    • MATSUMOTO TETSUYA
    • G01B11/25G01B11/24G06T1/00G06T7/00
    • PURPOSE: To provide a measuring method, etc., by which the three-dimensional shape of the surface of an object to be measured can be measured with high accuracy by making the phase shifting method applicable to the Moire method. CONSTITUTION: A laser beam B is set so that the beam B can get in Moire fringes having one measuring depth by means of optical interferometers BS1 , M3 , M4 , and BS2 after the beam is enlarged by means of a beam expander L1 and collimator L2 . The laser beam formed into a state of interference fringes is split into two laser beams by means of a beam splitter BS3 and one laser beam B1 is projected upon the surface of an object O through a phase shifter OP2 . Then Moire fringes formed on the surface of the object O by projecting the other laser beam B2 superposing on the beam B1 and another Moire fringes similarly formed on the surface of the object O by shifting the phase of the Moire fringes by means of a phase shifter OP2 are detected by means of a photodetector element, and the phase shift between the Moire fringes at the part is obtained by performing arithmetic operation on the luminance at each point on the photodetector element detected several times and a picture is displayed by means a displaying means based-on the phase shift and position of the photodetector element.