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1. 发明专利

JP2007071670A Glow discharge excavation device and glow discharge excavation method 有权
标题翻译： GLOW排放装置和GLOW排放挖掘方法
公开(公告)号：JP2007071670A
公开(公告)日：2007-03-22
申请号：JP2005258495
申请日：2005-09-06
申请人： Horiba Ltd , Keio Gijuku , 学校法人慶應義塾 , 株式会社堀場製作所
发明人： MITANI TOMOAKI , SHIMIZU KENICHI , HIRANO AKIHIRO , MATSUMOTO KOICHI , UCHIDA YOSHINOBU
IPC分类号： G01N21/67
摘要： PROBLEM TO BE SOLVED: To measure a temperature of an excavated portion in a sample, and to carry out excavation work by glow discharge while preventing a thermal influence, even in the thermally weak sample.
SOLUTION: This glow discharge excavation device 1 is provided with an infrared sensor 31 of a radiation temperature measuring instrument 30 in parallel to a glow discharge tube 2, and receives an infrared ray radiated from a sample surface drilled by spattering accompanied to the glow discharge, by the infrared sensor 31, when light emission is not generated accompanied to the spattering, to measure the temperature of the excavated portion in the sample S. When the measured temperature comes to a reference temperature or more, a voltage value of a voltage impressed to the sample S for carrying out the excavation work is reduced to reduce a heat value supplied to the sample S, and deterioration such as melting is prevented from being generated even when the sample S is a thermally weak material, to form a sample face favorable for observation.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了测量样品中的挖掘部分的温度，并且即使在热弱样品中也能够防止热影响，通过辉光放电进行挖掘作业。＆lt; P＆gt;解决方案：该辉光放电挖掘装置1设置有与辉光放电管2并联的辐射温度测量装置30的红外线传感器31，并且接收从伴随着溅射的飞溅而钻出的样品表面辐射的红外线通过红外线传感器31发出辉光放电，当伴随着溅射而不产生发光时，测量样品S中的挖掘部分的温度。当测量的温度达到参考温度或更高时，电压值为降低施加到样品S上的用于进行挖掘作业的电压，以降低供给到样品S的热值，并且即使当样品S是热弱材料时也防止产生诸如熔化的劣化，以形成样品有利于观察。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2007003279A Glow discharge drilling apparatus and glow discharge drilling method 有权
标题翻译： GLOW卸载钻机和喷砂钻孔方法
公开(公告)号：JP2007003279A
公开(公告)日：2007-01-11
申请号：JP2005182014
申请日：2005-06-22
申请人： Horiba Ltd , Keio Gijuku , 学校法人慶應義塾 , 株式会社堀場製作所
发明人： MITANI TOMOAKI , SHIMIZU KENICHI , HIRANO AKIHIRO , MATSUMOTO KOICHI , UCHIDA YOSHINOBU
IPC分类号： G01B11/22 , C23F4/00
摘要： PROBLEM TO BE SOLVED: To measure the drilling depth of a sample with high precision and allows processing to be automatically terminated at the completion of drilling to a desired depth.
SOLUTION: The glow discharge drilling apparatus 1 includes a glow discharge tube 2 provided with a sensor head 32 of a length measuring instrument 30, irradiates the surface of the sample to be drilled by sputtering associated with glow discharge with laser light from the sensor head 32, receives the laser light reflected off the surface of the sample, and measures a drilled part directly by the length measuring instrument 30 while performing drilling processing. The length measuring instrument 30 is connected to a computer 7 to output a measured value to the computer 7. The computer 7 sets a drilling depth before the processing, compares the set drilling depth to the measured value output from the length measuring instrument 30, and, when the two values become the same, performs control of terminating power supply to a generator 6 to automatically terminate the drilling processing.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：以高精度测量样品的钻削深度，并允许在钻削完成时自动终止所需深度的处理。解决方案：辉光放电钻孔设备1包括设置有长度测量仪器30的传感器头32的辉光放电管2，通过来自激光的激光照射与辉光放电相关的溅射的待钻探样品的表面传感器头32接收从样品表面反射的激光，并在执行钻孔处理时由长度测量仪30直接测量钻孔部分。长度测量仪器30连接到计算机7以将测量值输出到计算机7.计算机7在处理之前设置钻孔深度，将设定的钻削深度与从长度测量仪器30输出的测量值进行比较，以及当两个值相同时，执行对发电机6的终端电力的控制，以自动终止钻孔处理。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2008191166A Glow discharge drilling device and glow discharge drilling method 有权
标题翻译：玻璃排放钻井装置和玻璃排放钻井方法
公开(公告)号：JP2008191166A
公开(公告)日：2008-08-21
申请号：JP2008096156
申请日：2008-04-02
申请人： Horiba Ltd , Keio Gijuku , 学校法人慶應義塾 , 株式会社堀場製作所
发明人： MITANI TOMOAKI , SHIMIZU KENICHI , HIRANO AKIHIRO , MATSUMOTO KOICHI , UCHIDA YOSHINOBU
IPC分类号： G01N1/28 , G01N1/32
摘要： PROBLEM TO BE SOLVED: To surely drill a sample by using blow discharge, irrespective of the characteristic of the sample.
SOLUTION: A glow discharge drilling device 1 is provided which allows switching between a continuous mode for supplying electric power continuously and an intermittent mode for supplying the electric power intermittently. The sample S is drilled to obtain an observation face for a satisfactory observation, by supplying the electric power in the intermittent mode to the sample S being easily molten by heat accompanying the glow discharge, and to the sample S being easily broken by the power of spattering accompanying the glow discharge, or the like. The sample S is efficiently drilled to obtain the observation face for the satisfactory observation, by supplying the electric power in the continuous mode, when the sample S does not have the characteristic being easily molten or broken.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：无论样品的特性如何，都可以通过吹扫放电来确定钻取样品。解决方案：提供一种辉光放电钻孔装置1，其能够连续地供给电力的连续模式和间歇地供给电力的间歇模式之间切换。对样品S进行钻孔以获得令人满意的观察的观察面，通过间歇模式的电力向随着辉光放电的热量容易熔融的样品S提供，并且样品S容易被切断的能量伴随辉光放电的飞溅等。当样品S不具有容易熔融或破裂的特征时，可以通过以连续模式供给电力来有效地钻取样品S以获得令人满意的观察的观察面。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2006300673A Glow discharge drilling device and glow discharge drilling method 有权
标题翻译：玻璃排放钻井装置和玻璃排放钻井方法
公开(公告)号：JP2006300673A
公开(公告)日：2006-11-02
申请号：JP2005121473
申请日：2005-04-19
申请人： Horiba Ltd , Keio Gijuku , 学校法人慶應義塾 , 株式会社堀場製作所
发明人： MITANI TOMOAKI , SHIMIZU KENICHI , HIRANO AKIHIRO , MATSUMOTO KOICHI , UCHIDA YOSHINOBU
IPC分类号： G01N1/28 , G01N1/32
摘要： PROBLEM TO BE SOLVED: To surely drill a sample by blow discharge irrespective of a characteristic of the sample.
SOLUTION: This glow discharge drilling device 1 allows switching between a continuous mode for supplying electric power continuously and an intermittent mode for supplying the electric power intermittently, and the sample S is drilled to obtain an observation face for satisfactory observation, by supplying the electric power by the intermittent mode to the sample S easily molten by heat accompanied to the glow discharge, and to the sample S easily broken by power of spattering accompanied to the glow discharge, or the like. The sample S is efficiently drilled to obtain the observation face for the satisfactory observation, by supplying the electric power by the continuous mode, when the sample S does not have the characteristic easily molten or broken.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：无论样品的特性如何，都可以通过吹扫来确定钻取样品。解决方案：该辉光放电钻孔装置1允许在连续供电的连续模式和间歇供电的间歇模式之间进行切换，并且通过供应来提供样品S以获得令人满意的观察的观察面通过伴随辉光放电的热容易熔融的样品S的间歇模式的电力以及伴随着辉光放电的飞溅动力容易断裂的样品S等。当样品S不具有容易熔融或破裂的特征时，通过连续模式供给电力，可以有效地钻取样品S以获得令人满意的观察的观察面。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2007108148A Apparatus and method for forming sample 有权
标题翻译：装置和形成样品的方法
公开(公告)号：JP2007108148A
公开(公告)日：2007-04-26
申请号：JP2005302226
申请日：2005-10-17
申请人： Horiba Ltd , Keio Gijuku , 学校法人慶應義塾 , 株式会社堀場製作所
发明人： MITANI TOMOAKI , SHIMIZU KENICHI , HIRANO AKIHIRO , MATSUMOTO KOICHI , UCHIDA YOSHINOBU
IPC分类号： G01N1/28 , G01N1/32 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide an apparatus and a method for forming samples and capable of forming a sufficiently wide area of a sample into a shape observable by TEM in a short time by using a method for cutting the sample through the use of a glow discharge. SOLUTION: The sample forming apparatus generates glow discharge by the application of a voltage between a hollow electrode 12 and a sample S in a glow discharge tube 2 filled with argon gas (an inert gas) and cuts a part of the sample S opposed to the electrode 12. The speed of cutting is gradually reduced with the time that has elapsed since the start of cutting. The thickness of the sample S is determined by detecting argon ions passing through the sample by an ion sensor 32 when the cutting of the sample S has progressed and cracks or pinholes have occurred in the sample. The sample S is formed in such a way as to have a desired thickness observable by TEM by terminating the cutting of the sample in the case that the thickness of the sample S reaches a target value. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于形成样品的装置和方法，并且能够通过使用通过使用方法切割样品，在短时间内将样品的足够宽的面积形成为可观察到的TEM形状的辉光放电。解决方案：样品形成装置通过在填充有氩气（惰性气体）的辉光放电管2中的中空电极12和样品S之间施加电压而产生辉光放电，并切割一部分样品S 与电极12相对。切割速度随着切割开始经过的时间逐渐减小。样品S的厚度通过在样品S的切割已经进行并且样品中已经发生裂纹或针孔的情况下通过离子传感器32检测通过样品的氩离子来确定。通过在样品S的厚度达到目标值的情况下终止样品的切割，样品S形成为具有通过TEM可观察到的期望厚度。版权所有（C）2007，JPO＆INPIT

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