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1. 发明专利

JP2004109045A Standard gas production device 审中-公开
公开(公告)号：JP2004109045A
公开(公告)日：2004-04-08
申请号：JP2002275004
申请日：2002-09-20
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： ARITA YOSHIHIKO , YOSHIDA MAKOTO , AKIYAMA SHIGEYUKI
IPC分类号： G01N1/00
摘要： PROBLEM TO BE SOLVED: To provide a standard gas production device capable of easily producing standard gas having an optional concentration by using gas which is chemically unstable and difficult to be preserved in a gas bomb or the like.
SOLUTION: This device is equipped with a gas generation part 1 for generating gas by injecting one liquid Lb into another liquid La between a plurality of liquids La, Lb reacting mutually, and a carrier gas supply line 2 for supplying carrier gas for sending generated gas generated from the gas generation part 1 to the downstream side. The device is constituted so that the standard gas having an optional concentration can be produced by controlling either or both of the injection rate of the liquid Lb and the flow rate of the carrier gas.
COPYRIGHT: (C)2004,JPO

2. 发明专利

JP2007248369A Gas analyzer and analysis method 审中-公开
标题翻译：气体分析仪和分析方法
公开(公告)号：JP2007248369A
公开(公告)日：2007-09-27
申请号：JP2006074785
申请日：2006-03-17
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： MINAMI MASAKAZU , NISHIMURA KATSUMI , YOSHIDA MAKOTO , SAKAGUCHI YUUHEI
IPC分类号： G01N21/61 , G01N21/35 , G01N21/3504
摘要： PROBLEM TO BE SOLVED: To improve measurement accuracy by preventing dew formation without having to require heating temperature control and measure a high concentration of a component to be measured exceeding a concentration range detectable by an apparatus. SOLUTION: A gas analyzer includes a circulating tube 2 for circulating a sample gas SG; a measuring cell 3 provided for the circulating tube 2 for measuring the component to be measured in the sample gas SG; an analysis part 4 for irradiating light L to the measuring cell 3, detecting light L transmitted through the measuring cell 3, and analyzing the component to be measured on the basis of its light intensity signal; a pressure regulating mechanism 5 for regulating the pressure in the circulating tube 2 and in the measuring cell 3; and a control part 75 of the pressure regulating mechanism 5 for reducing the partial pressure of the component to be measured in the sample gas SG to the vapor pressure P MAX of the component to be measured by controlling the pressure regulating mechanism 5 and regulating the pressure in the circulating tube 2 and in the measuring cell 3. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过防止结露而不需要加热温度控制并且测量超过被设备可检测的浓度范围的待测量的组分的高浓度来提高测量精度。气体分析仪包括用于循环样品气体SG的循环管2; 设置在循环管2中的测量单元3，用于测量样品气体SG中待测量的成分; 用于将光L照射到测量单元3的分析部分4，检测通过测量单元3传输的光L，并且基于其光强度信号分析待测量的分量; 用于调节循环管2和测量单元3中的压力的压力调节机构5; 以及压力调节机构5的控制部75，用于通过控制压力来将待测部件的分压降低到要测量的部件的蒸气压P MAX 调节机构5并调节循环管2和测量单元3中的压力。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2002277395A GAS ANALYSIS SYSTEM 失效
公开(公告)号：JP2002277395A
公开(公告)日：2002-09-25
申请号：JP2001079031
申请日：2001-03-19
申请人： HORIBA LTD
发明人： YOSHIDA MAKOTO
IPC分类号： G01N21/35 , G01N21/27 , G01N21/3504
摘要： PROBLEM TO BE SOLVED: To precisely and quantitatively analyze plural measuring components different in concentration ranges over a wide range of an infrared absorption wavelength area, by a single gas cell part. SOLUTION: A branch flow passage 5 is connected to an exhaust passage 2 inside which exhaust gas G after used for manufacture of a semiconductor flows, an FTIR gas analyzer 8 is provided in the branch passage 5 to analyze quantitatively the components contained in the exhaust gas G, the measurements over a wide wave number range are conducted concurrently by the FTIR gas analyzer 8, and a wave number area used for computation is changed based on a concentration of the component of the measuring object.

4. 发明专利

JPH1114537A OVERFLOW TANK 失效
公开(公告)号：JPH1114537A
公开(公告)日：1999-01-22
申请号：JP18063797
申请日：1997-06-21
申请人： HORIBA LTD
发明人： YOSHIDA MAKOTO
IPC分类号： G01N21/03
摘要： PROBLEM TO BE SOLVED: To enhance internal visibility by stretching a connecting member between the upper overflow port of an inner tank and an outer tank, guiding the liquid flowed over the inner wall face of the outer tank from the connecting member and wiping off the dew adhering to the inner wall face by the liquid. SOLUTION: An interconnecting member 5 is provided, in the upper surface thereof, with a guide groove 51 and an outer tank 1 is provided, on the opposite sides thereof touching the inner wall face 11, with guide side grooves in the vertical direction. Even a small quantity of sample liquid 8 flowing over the overflow port, i.e., the cut part 21, of an inner tank 2 is guided by the guide groove 51 to the inner wall face 11 and dispersed semi-forcedly to the inner wall face 11 from the guide side groove. Consequently, dew adhering to the inner wall face 11 are wiped off surely by the sample liquid 8 to remove the blur due to dew formation 81 from the flow-down region of the sample liquid 8 and the interior can be seen clearly. According to the structure, the overflowing liquid arrives at the inner wall face 11 of the outer tank 1 regardless of the flow rate thereof and the internal visibility can be enhanced by wiping off dew formation 81 surely.

5. 发明专利

JPH10142216A TOTAL NITROGEN MEASURING DEVICE 失效
公开(公告)号：JPH10142216A
公开(公告)日：1998-05-29
申请号：JP31279296
申请日：1996-11-09
申请人： HORIBA LTD
发明人： HIRATA SHUICHI , YOSHIDA MAKOTO , YAMADA TOSHINORI , FUKUSHIMA RYOSUKE
IPC分类号： G01N31/00 , G01N21/33 , G01N33/18
摘要： PROBLEM TO BE SOLVED: To positively eliminate disturbance caused by heavy metal ion so as to make an accurate measurement by filtering oxidizingly decomposed sample liquid to feed it to a measuring part. SOLUTION: Sample liquid S oxidizingly decomposed through ultraviolet irradiation in an oxidizing decomposer 7 is supplied to a meter 8 through a filter 15, but at the time of passing through the filter 15, a heavy metal hydroxide contained in the sample liquid S is captured by the filter 15. Filtered sample liquid S is measured by the meter 8, and a hydrochloride solution from a tank is added to adjust pH of the sample liquid to about 2-3. In this case, even though the sample liquid S becomes acid, heavy metal ion is not generated to the sample liquid S since the heavy metal hydroxide is eliminated. The sample liquid adjusted to acidity is fed to a measuring part 9, where ultraviolet absorbance is measured. In this case, even though the sample liquid S is adjusted to acidity, since heavy metal ion is not contained in the sample liquid S, a measuring error caused by heavy metal ion is not generated.

6. 发明专利

JPH09220410A FILTER DEVICE 失效
公开(公告)号：JPH09220410A
公开(公告)日：1997-08-26
申请号：JP5102996
申请日：1996-02-13
申请人： HORIBA LTD
发明人： TERADA KUNIO , YOSHIDA MAKOTO
IPC分类号： G01N33/18 , B01D29/07 , B01D35/02
摘要： PROBLEM TO BE SOLVED: To prevent the clogging of a filter by installing a sample liquid intake chamber and a sample liquid take-out chamber into which divided by a filter in a vessel and connecting a suction path for sucking up sample liquid filtered by a filter from the sample liquid take-out chamber to the lower part of the sample liquid take-out chamber. SOLUTION: In a filter device for filtering sample liquid or the like for a water analyzer, after when a suction pipe 8 is sucked by a pump, sample liquid 11 is sucked up into a intake chamber 5 and is filtered by a filter 4, it is introduced into take-out chamber 6 and is introduced into the water analyzer through an inner path 82 and a tube 20. At this time, since when clogging occurs in the filter 4, a level L indicated in a level gage 7 rises, the level L is monitored to grasp the clogging conditions of the filter 4. After analysis completed, since the sample liquid 11 in the intake chamber 5 and the take-out chamber 6 is discharged from an opening 9 and the filter 4 is not immersed in the sample liquid 11, the clogging of the filter 4 hardly occurs.

7. 发明专利

JP2002277361A METHOD AND SYSTEM FOR ANALYZING EXHAUST GAS IN SEMICONDUCTOR PROCESS 失效
公开(公告)号：JP2002277361A
公开(公告)日：2002-09-25
申请号：JP2001079052
申请日：2001-03-19
申请人： HORIBA LTD
发明人： YOSHIDA MAKOTO , NAKAJIMA YOSHIYUKI
IPC分类号： G01N27/62 , G01N1/00 , G01N1/22 , G01N21/35 , G01N21/3504 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To restrain adsorption, by a pump or the like, of exhaust gas from a semiconductor process to the minimum, accurately analyze an event generated in the semiconductor process, and facilitate maintenance for a gas analyzer during an operation of the semiconductor process. SOLUTION: The first valve 3 is provided in an exhaust gas flow passage 2 brought into a sub-vacuum condition by the first vacuum pump 4 to suck and discharge the exhaust gas G from the semiconductor prosess 1, the second valve 7 is provided in a branch flow passage 5 branched in the upstream of the first valve 3, the gas analyzer 8 is provided in the branch flow passage 5, the second vacuum pump 9 is provided in the downstream of the flow passage 5, and the exhaust gas G flowing in the exhaust gas flow passage 2 in the semiconductor process 1 is made to flow in the branch flow passage 5 by operations of the second vacuum pump 9 and the second valve 7, so as to conduct quantitative analysis for the exhaust gas G.

8. 发明专利

JPH08201274A ULTRAVIOLET OXIDATION/DECOMPOSITION DEVICE 失效
公开(公告)号：JPH08201274A
公开(公告)日：1996-08-09
申请号：JP2883395
申请日：1995-01-24
申请人： HORIBA LTD
发明人： HIRATA SHUICHI , SHINOHARA MASAYOSHI , YOSHIDA MAKOTO , FUKUSHIMA RYOSUKE
IPC分类号： G01N1/36 , B01J19/08 , C02F1/32 , G01N21/01 , G01N33/18
摘要： PURPOSE: To provide the ultraviolet oxidation/decomposition device, which is manufactured at low cost, consumes a small power and has a long life, by using a cold-cathode type low-pressure mercury lamp as an ultraviolet irradiation means. CONSTITUTION: A cold-cathode type low-pressure mercury lamp 5 is wound around a cylindrical thick reaction tube 4 comprising a quartz tube in a spiral pattern. A reflecting plate 7 is provided so as to surround the lamp 5. In the inner space of a casing main body 2, inactive gas is filled. A tube 8 for introducing test liquid is connected to an inlet port 4a of the reaction tube 4. Meanwhile, an outlet port 4b is connected to an analyzer 10 through a tube 9. The test liquid, which is introduced into the tube 8 by a pump 11, is diluted. After the mixing with reagent, the liquid is introduced into the reaction tube 4. The liquid undergoes oxidation and decomposition by the irradiation of the ultraviolet rays from the lamp 5. Thereafter, the liquid is introduced into the analyzer 10, and the measurement of the total amount of nitrogen and the total amount of phosphorus is performed.

9. 发明专利

JPH1157436A CONDENSATION PREVENTING DEVICE FOR GASIFIED LIQUID 失效
公开(公告)号：JPH1157436A
公开(公告)日：1999-03-02
申请号：JP24182497
申请日：1997-08-21
申请人： HORIBA LTD
发明人： NISHIYAMA NOBUYUKI , YOSHIDA MAKOTO , FUKUSHIMA RYOSUKE , YONEZAWA HIYOUSUKE
IPC分类号： F17D1/05 , B01F3/04 , B01F3/08
摘要： PROBLEM TO BE SOLVED: To reduce an area where a gasified liquid comes into contact relatively with another liquid through a fine liquid feed pipe by soaking the fine liquid feed pipe into the other liquid contained in a container and causing the gasified liquid to bubble into the other liquid. SOLUTION: A liquid feed pipe 1 which is of a smaller diameter than a liquid feed pipe 01 is immersed into another liquid S contained in a container 2 and a gasified liquid G is dissolved into the other liquid S by causing the gasified liquid G to bubble into the other liquid S. Thus it is possible to reduce the surface area of the liquid feed pipe 1 and accelerate the flow velocity of the gasified liquid G by causing the gasified liquid G to bubble into the other liquid S through the fine liquid feed pipe 1. Consequently the value of received heat per unit area and unit time of the gasified liquid G flowing through the liquid feed pipe 1 can be lessened and the regurgitation of the other liquid S into the liquid feed pipe 1 can be eliminated.

10. 发明专利

JPH08201244A METHOD FOR DILUTING SAMPLE WATER 失效
公开(公告)号：JPH08201244A
公开(公告)日：1996-08-09
申请号：JP2751395
申请日：1995-01-23
申请人： HORIBA LTD
发明人： YOSHIDA MAKOTO , TERADA KUNIO , NISHIYAMA NOBUYUKI , HIRATA SHUICHI
IPC分类号： G01N1/10 , G01N33/18
摘要： PURPOSE: To provide a diluting method whereby a sample water can be diluted inexpensively with a correct dilution ratio. CONSTITUTION: According to the diluting method, with the use of a measuring tube 5 connected to a measuring piping 1, a dilution water piping 2 and an air pump 3 and equipped with a sealing lid body 4, and a dilution water- measuring tube 6 connected to the measuring tube 5 via the dilution water piping 2, a predetermined amount of dilution water R2 introduced from a dilution water tank 7 to the dilution water-measuring tube 6 is totally introduced to the measuring tube 5 by sucking by the air pump 3, so that, a sample water S stored beforehand in the measuring tube 5 is diluted. While the dilution water R2 is totally introduced from the dilution water-measuring tube 6 opened to the air to the measuring tube 5 and continuously sucked by the air pump 3, the measuring piping 1 is opened to the air.

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