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1. 发明专利

JP2014132277A Angular velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：JP2014132277A
公开(公告)日：2014-07-17
申请号：JP2014083620
申请日：2014-04-15
申请人： Hokuriku Electric Ind Co Ltd , 北陸電気工業株式会社
发明人： TAMURA MASAHIDE , KAWASAKI OSAMU , NAKANO TAKAYUKI , SHINKAWA SHOHEI , YANO HIDEKAZU , IMAMURA TETSUJI
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5733 , G01P15/12 , G01P15/18 , H01L41/047 , H01L41/0475 , H01L41/0805 , H01L41/0973 , H01L41/1132
摘要： PROBLEM TO BE SOLVED: To provide a vibration-type angular velocity sensor whose detection sensitivity accuracy generated around an axis in a Z-axis direction is increased and whose detection sensitivity accuracy generated around axes in the X-axis direction and a Y-axis direction is not deteriorated.SOLUTION: A weight 3 has a columnar shape or a conical shape. The contour shape of the outer peripheral part of a diagram 1 has a shape having a straight portion ST at the four corners of a rectangle. Four vibrational excitation electrodes 11 are respectively formed within four regions partitioned by first and second virtual lines L1, L2. Four angular velocity detection electrodes 13 are respectively formed in four regions partitioned by a first virtual diagonal line CL1 and a second virtual diagonal line CL2. The corner parts of the contour shape of the four vibrational excitation electrodes 11 are each curved, and the corner parts of the contour shape of the four angular velocity detection electrodes 13 are each curved.
摘要翻译：要解决的问题：提供一种振动型角速度传感器，其在Z轴方向上沿轴线产生的检测灵敏度精度提高，并且在X轴方向和Y轴方向上围绕轴产生检测灵敏度精度不劣化。解决方案：重物3具有圆柱形或圆锥形。图1的外周部分的轮廓形状具有在矩形的四个角上具有直线部分ST的形状。四个振动激励电极11分别形成在由第一和第二虚拟线L1，L2划分的四个区域内。四个角速度检测电极13分别形成在由第一虚拟对角线CL1和第二虚拟对角线CL2分割的四个区域中。四个振动激励电极11的轮廓形状的角部分各自弯曲，并且四个角速度检测电极13的轮廓形状的角部分各自弯曲。

2. 发明专利

JP2014066708A Angular velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：JP2014066708A
公开(公告)日：2014-04-17
申请号：JP2013229770
申请日：2013-11-05
申请人： Hokuriku Electric Ind Co Ltd , 北陸電気工業株式会社
发明人： TAMURA MASAHIDE , KAWASAKI OSAMU , NAKANO TAKAYUKI , SHINKAWA SHOHEI , YANO HIDEKAZU , IMAMURA TETSUJI
IPC分类号： G01C19/56 , H01L41/047 , H01L41/113
CPC分类号： G01C19/56 , G01C19/5733 , G01P15/12 , G01P15/18 , H01L41/047 , H01L41/0475 , H01L41/0805 , H01L41/0973 , H01L41/1132
摘要： PROBLEM TO BE SOLVED: To provide a vibration type angular velocity sensor that improves accuracy in detection sensitivity which arises around axis in Z axis direction and prevents deterioration in accuracies in detection sensitivities which arise around axes in X axis direction and Y axis direction.SOLUTION: A weight 3 has a cylindrical or conical shape. The contour shape of the periphery of a diaphragm has straight lines SL at the four corners of an approximate square. A small rounded portion is formed at the intersection of the sides S1 to S4 of the square and the straight lines SL. Four vibration excitation electrodes 11 are respectively formed in four areas separated by first and second imaginary lines L1 and L2. Four angular velocity detection electrodes 13 are respectively formed in four areas separated by a first imaginary diagonal CL1 and a second imaginary diagonal CL2. Vibrations in the X axis direction and in the Y axis direction, required for detecting angular velocity around the Z axis, are made clear. Additionally, deterioration of vibration in the Z axis direction, required for detecting angular velocities around X axis and around Y axis, is prevented.
摘要翻译：要解决的问题：提供一种振动型角速度传感器，其提高在Z轴方向上围绕轴线产生的检测灵敏度的精度，并且防止在X轴方向和Y轴方向上围绕轴线产生的检测灵敏度的精度降低。解决方案：重物3具有圆柱形或圆锥形。隔膜周边的轮廓形状在近似正方形的四个角处具有直线SL。在正方形的边S1至S4的交叉点和直线SL之间形成小的圆形部分。四个振动激励电极11分别形成在由第一和第二虚线L1和L2分开的四个区域中。四个角速度检测电极13分别形成在由第一虚拟对角线CL1和第二虚拟对角线CL2分开的四个区域中。清楚了绕Z轴的角速度检测所需的X轴方向和Y轴方向的振动。此外，防止了围绕X轴和围绕Y轴检测角速度所需的Z轴方向的振动劣化。

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