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    • 2. 发明专利
    • Method for producing spherical particle
    • 生产球形颗粒的方法
    • JP2003290644A
    • 2003-10-14
    • JP2002094959
    • 2002-03-29
    • Hitachi Metals Ltd日立金属株式会社
    • UEDA TAKUSHIITO MOTOMICHISATO KOJIHIRABAYASHI TAKESHIKUBOI TAKESHI
    • B01J2/02B22F9/08G06T1/00
    • PROBLEM TO BE SOLVED: To provide a spherical particle production method for stably and reliably producing a spherical particle with a prescribed even particle size by spherically granulating a melted material. SOLUTION: In a method for producing a spherical particle by discharging a melted material from a fine hole of a container, before practical production, a sample is produced and the particle diameter and the distance of particles are measured and based on the data, the standard intergranular distance with the a prescribed particle diameter is obtained is calculated. During the practical production, the intergranular distance at dropwise discharge is measured in-line and compared with the standard intergranular distance to monitor the particle diameter during the production. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种通过对熔融材料进行球形粒化来稳定可靠地制造具有规定的均匀粒径的球形颗粒的球形颗粒制造方法。 解决方案:在实际生产之前,通过从容器的细孔中排出熔融材料来制造球形颗粒的方法中,产生样品并测量颗粒的粒径和距离,并基于数据 计算得到规定粒径的标准晶间距离。 在实际生产中,逐滴测量晶间距离并与标准晶间距离进行比较,以监测生产过程中的粒径。 版权所有(C)2004,JPO
    • 3. 发明专利
    • Method for producing spherical particle
    • 生产球形颗粒的方法
    • JP2007330968A
    • 2007-12-27
    • JP2007232879
    • 2007-09-07
    • Hitachi Metals Ltd日立金属株式会社
    • UEDA TAKUSHIITO MOTOMICHISATO KOJIHIRABAYASHI TAKESHIKUBOI TAKESHI
    • B01J2/02B22F9/06B23K35/40
    • PROBLEM TO BE SOLVED: To stably produce spherical particles having a uniform specified diameter with high reliability.
      SOLUTION: The method for producing the spherical particles by injecting a melt through a pore in a vessel comprises a step of practically producing particles having a specified diameter and a step of producing samples before the step of practically producing particles, wherein the step of producing samples is characterized in that the diameter of particles dripped down from an orifice and the distance between the particles are measured and introduced to a predetermined equation representing a correlation between the particle diameter and the distance between the particles to specify the constants in the equation and to obtain operating conditions under which to obtain particles having a diameter close to a target diameter from the measured particle diameter as initial operating conditions for apparatuses to be operated in the step of practically producing particles, and wherein the step of practically producing particles is characterized in that the apparatuses start under the above initial operating conditions and then controlled based on the diameter of dripping particles calculated by introducing the distance between dripping particles measured inline to the above predetermined equation the constants of which are specified.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了稳定地制造具有高可靠性的具有均匀的规定直径的球形颗粒。 解决方案:通过在容器中通过孔注入熔体来制造球形颗粒的方法包括实际生产具有特定直径的颗粒的步骤和在实际生产颗粒的步骤之前制备样品的步骤,其中步骤 其特征在于,从孔口滴下的颗粒的直径和颗粒之间的距离被测量并引入到表示颗粒直径和颗粒之间的距离之间的相关性的预定方程式,以指定方程式中的常数 并获得作为实际生产粒子的步骤中要操作的装置的初始操作条件获得具有从测量粒径接近目标直径的颗粒的操作条件,并且其中实际生产颗粒的步骤被表征 因为这些装置从上述开始 初始操作条件,然后基于通过将在线测量的滴落粒子之间的距离引入上述规定的常数来规定的滴下粒子的直径来控制。 版权所有(C)2008,JPO&INPIT
    • 4. 发明专利
    • Method of measuring shape of spherical body
    • 测量球体形状的方法
    • JP2006292775A
    • 2006-10-26
    • JP2006213385
    • 2006-08-04
    • Hitachi Metals Ltd日立金属株式会社
    • UEDA TAKUSHIYOSHIMURA KOJIITO MOTOMICHIKURATA NAOTO
    • G01B11/24
    • PROBLEM TO BE SOLVED: To provide a method of efficiently and accurately measuring the shapes of many balls, especially in order to manage the manufacturing condition or quality of mass produced micro balls with a diameter of several hundred micrometers or less such as solder balls.
      SOLUTION: In this method, a spherical body is held at a predetermined position on a measuring plate, the spherical body is imaged with the light transmitted through the measuring plate via a telecentric lens, and the shape of the spherical body is calculated by image processing. The spherical body may be sucked, positioned and held in a recessed section provided in the measuring plate. This method has a mounting process of positioning the spherical body to the measuring plate via a sizing agent of the extent remaining in a projection plane, and a measuring process of imaging the spherical body with the parallel light transmitted through the measuring plate via the telecentric lens and calculating the shape of the spherical body by image processing.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种有效且准确地测量许多球的形状的方法,特别是为了管理质量达到几百微米或更小直径的生产微球的制造条件或质量,例如焊料 球。 解决方案:在该方法中,将球体保持在测量板上的预定位置,球体通过远心透镜通过测量板透射的光成像,并且计算球体的形状 通过图像处理。 球体可以被吸引,定位并保持在设置在测量板中的凹部中。 该方法具有将球体定位在测量板上的安装过程,该测量板通过在投影平面上剩余的程度的定型剂,以及通过远心透镜透射通过测量板的平行光成像球体的测量过程 并通过图像处理来计算球体的形状。 版权所有(C)2007,JPO&INPIT
    • 10. 发明专利
    • POSITION GRASPING METHOD OF WAFER, AND EXPOSING METHOD AND EXPOSING DEVICE THEREOF
    • JPH11264718A
    • 1999-09-28
    • JP9736798
    • 1998-04-09
    • HITACHI METALS LTD
    • UEDA TAKUSHIHASHIZUME SHIGENAOYAMASHITA SHINSUKEMIKURIYA TETSUOBABA TOSHIYUKI
    • G01B11/00G03F9/00H01L21/027
    • PROBLEM TO BE SOLVED: To satisfactorily process the unclear circumferential edge image of a low wafer by taking images of a plurality of edges, determining the approximate expression of the edge within the image or the coordinate in a prescribed point on the approximate expression by image processing, and expressing the wafer circumferential part by a numerical expression. SOLUTION: An image processing means 106 has a binarized level setting means, a profile tracking means or the like. The average luminance within a threshold determining area is calculated by the binarized level setting means. The value obtained by multiplying the average luminance by a constant is taken as the initial threshold. In the profile tracking means, the edge detecting area is scanned from the upper right to the left by use of the initial threshold. When a continuation of black picture elements is present after the continuation of a regulated number or more of while picture elements, the boundary between the initial white picture element and black picture element is taken as one point on the edge. In a straight line calculating means, linear expression calculation and abnormal data removing processing are performed. The processing is repeated until conversion is attained. Since the binarized level is regulated to determine the final approximate expression while judging the quality of the approximate expression calculated by the picture element recognized as the edge, the edge can be satisfactorily enciphered.