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1. 发明专利

JP2008091845A Semiconductor sensor device and its manufacturing method 有权
标题翻译：半导体传感器器件及其制造方法
公开(公告)号：JP2008091845A
公开(公告)日：2008-04-17
申请号：JP2006317972
申请日：2006-11-27
申请人： Hitachi Metals Ltd , 日立金属株式会社
发明人： AONO TAKANORI , OKADA RYOJI , KAZAMA ATSUSHI , TAKADA YOSHIAKI
IPC分类号： H01L23/28 , B81B3/00 , B81C3/00 , G01P15/08 , G01P15/12 , G01P15/18 , H01L21/56 , H01L23/02
CPC分类号： H01L2224/48091 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To solve such a problem that there are possibilities of damaging a cap chip in a process of separating a cap substrate for hermetic seal by grinding and dicing in a semiconductor sensor device for hermetically sealing an MEMS substrate. SOLUTION: By a method of thinning and separating the cap substrate by wet etching after joining a cap substrate to the upper and lower surfaces of an MEMS substrate, the breakage of a cap chip can be prevented. Moreover, cracks formed in a mold resin material can be reduced by forming the side face of the cap chip into two or more faces and forming the side corner parts at an obtuse angle. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：为了解决在用于气密密封MEMS基板的半导体传感器装置中通过研磨和切割分离用于气密密封的盖基板的过程中存在损坏盖芯片的可能性的问题。解决方案：通过在将盖衬底接合到MEMS衬底的上表面和下表面之后通过湿法蚀刻来稀释和分离盖衬底的方法，可以防止帽芯片的断裂。此外，通过将盖片的侧面形成为两个以上的面并且以钝角形成侧角部，可以减小在模制树脂材料中形成的裂纹。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2008190892A Acceleration sensor and electronic device using it 审中-公开
标题翻译：加速传感器和使用它的电子设备
公开(公告)号：JP2008190892A
公开(公告)日：2008-08-21
申请号：JP2007022888
申请日：2007-02-01
申请人： Hitachi Metals Ltd , 日立金属株式会社
发明人： OKADA RYOJI , TAKADA YOSHIAKI
IPC分类号： G01P15/12 , G01P15/125 , G01P15/18 , H01L29/84 , H01L41/08
摘要： PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of detecting even acceleration having a greatly different level, and having a small size and high versatility.
SOLUTION: This acceleration sensor has a support frame, the first weight part held by the support frame through the first beam part having flexibility, and the second weight part held by the first weight part through the second beam part having flexibility. The acceleration sensor has characteristics wherein the first weight part is arranged inside the support frame, and the second weight part is arranged inside the first weight part, and the first acceleration sensor part and the second acceleration sensor part are provided respectively on the first beam part and the second beam part.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够检测均匀加速度的加速度传感器，具有很小的尺寸和高的通用性。解决方案：该加速度传感器具有支撑框架，第一重量部分由支撑框架通过具有柔性的第一梁部分保持，并且第二重量部分通过具有柔性的第二梁部分由第一重量部分保持。加速度传感器的特征在于，第一重量部配置在支撑框架的内部，第二重量部配置在第一重量部内，第一加速度传感器部和第二加速度传感器部分别分别设置在第一梁部和第二梁部分。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2007040933A Acceleration sensor 审中-公开
标题翻译：加速传感器
公开(公告)号：JP2007040933A
公开(公告)日：2007-02-15
申请号：JP2005228025
申请日：2005-08-05
申请人： Hitachi Metals Ltd , 日立金属株式会社
发明人： HATANO HIROYUKI , TAKADA YOSHIAKI , SAITO MASAKATSU
IPC分类号： G01P15/08 , G01P15/12 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide an acceleration sensor which uses a protection case made of ceramic, glass, and silicon, prevents chipping off of the corner portions and edge portions on the underside surface side of the weight portion of its acceleration sensor element, and has high shock resistance and realizes high performance. SOLUTION: Metallic or plastic shock absorbing materials are attached to the underside surface side of of the weight portion made of silicon or the inside bottom of the protection case made of ceramic, glass, and silicon by a thickness of 1.0 μm or more, between the underside surface side of the weight portion and the inside bottom of the protection case, and the corner parts and edge parts on the underside surface side of the weight portion are prevented from directly touching the inside bottom of the protection case. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供使用由陶瓷，玻璃和硅制成的保护壳的加速度传感器，防止其加速度传感器的重量部分的下表面侧上的角部和边缘部分的脱落元件，具有高抗冲击性，实现高性能。解决方案：将金属或塑料减震材料连接到由硅制成的重物部分或由陶瓷，玻璃和硅制成的保护壳体的内部底部的下表面侧，厚度为1.0μm或更大在重量部分的下表面侧和保护壳体的内底之间，并且防止重物部分的下表面侧上的拐角部分和边缘部分直接接触保护壳体的内部底部。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2007078641A Displacement detector 审中-公开
标题翻译：位移检测器
公开(公告)号：JP2007078641A
公开(公告)日：2007-03-29
申请号：JP2005270434
申请日：2005-09-16
申请人： Hitachi Metals Ltd , 日立金属株式会社
发明人： TAKADA YOSHIAKI , OCHIAI HIDEYUKI , NISHINO KEIICHI , SAITO MASAKATSU
IPC分类号： G01P15/08 , H01L29/84
CPC分类号： G01P1/023 , B81B2201/025 , B81C1/0023 , G01P15/0802 , H01L2224/05554 , H01L2224/48091 , H01L2224/49175 , H01L2924/10253 , H01L2924/00014 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To provide an IC chip having no incomplete crack in a displacement detector employing the IC chip as a regulation plate because a silicon stripe drops out of the incomplete crack section during assembling work or using to adversely affect the performance of the displacement detector. SOLUTION: Angle θ between the rear face grinding direction of an IC wafer and the normal from the direction of the perpendicular line from an IC chip ridge line is set smaller than 45°, more preferably between 10° and 45°. By specifying θ, cracks including the incomplete crack occurring in the ridge section of the IC chip can be reduced. The IC chip having the incomplete crack in its ridge section is not used as the regulation plate, and the displacement detector of high reliability can be provided. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了在采用IC芯片作为调节板的位移检测器中提供没有不完全裂纹的IC芯片，因为在组装作业期间硅条从不完全裂纹部分掉出或者不利地影响性能的位移检测器。解决方案：IC晶片的背面研磨方向与来自IC芯片脊线的垂直线方向的法线之间的角度θ被设定为小于45°，更优选在10°至45°之间。通过指定θ，可以减少包括在IC芯片的脊部中发生的不完全裂纹的裂纹。在其脊部具有不完全裂纹的IC芯片不用作调节板，并且可以提供高可靠性的位移检测器。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2008177481A Semiconductor sensor device and manufacturing method therefor 有权
标题翻译：半导体传感器器件及其制造方法
公开(公告)号：JP2008177481A
公开(公告)日：2008-07-31
申请号：JP2007011473
申请日：2007-01-22
申请人： Hitachi Metals Ltd , 日立金属株式会社
发明人： AONO TAKANORI , OKADA RYOJI , KAZAMA ATSUSHI , TAKADA YOSHIAKI
IPC分类号： H01L23/02 , B81C3/00 , H01L21/56 , H01L29/84
CPC分类号： H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To resolve problems, wherein when a MEMS assembly in which a MEMS chip and a silicon-made cap chip are jointed is resin-casted, wires move and contact with a side of the silicon-made cap chip, thereby generating noises and line short circuiting. SOLUTION: The side of the silicon-made cap chip is formed by wet etching, and an insulation protecting film is formed on the wet-etched surface, thereby forming the insulation protecting film having a high adhesion force; whereby even if wires moves and come into contact with a cap chip side at resin-molding, generation of noises and line short circuiting can be prevented. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了解决问题，其中当MEMS芯片和硅制帽芯片接合的MEMS组件被树脂铸造时，导线移动并与硅制帽盖的一侧接触，从而产生噪声和线路短路。解决方案：通过湿式蚀刻形成硅制帽盖的一侧，并且在湿蚀刻表面上形成绝缘保护膜，从而形成具有高粘合力的绝缘保护膜; 由此即使电线在树脂成型时移动并与盖芯片侧接触，也可以防止产生噪声和线路短路。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2514976B2 失效
公开(公告)号：JP2514976B2
公开(公告)日：1996-07-10
申请号：JP18115187
申请日：1987-07-22
申请人： HITACHI METALS LTD
发明人： TAKADA YOSHIAKI , FURUICHI SHINJI , KURYAMA YASUO
IPC分类号： G11B5/60 , G11B21/21

7. 发明专利

JPH02281485A FLOATING TYPE MAGNETIC HEAD AND PRODUCTION THEREOF 失效
公开(公告)号：JPH02281485A
公开(公告)日：1990-11-19
申请号：JP10207889
申请日：1989-04-21
申请人： HITACHI METALS LTD
发明人： TAKADA YOSHIAKI , FURUICHI SHINJI , AO MASAHIRO , TAGUCHI AKIRA
IPC分类号： G11B21/21
摘要： PURPOSE:To relieve sticking and to prolong the life of CSS (contact start-stop) by specifying the roughness of the surface facing a magnetic recording medium and undulating the parts where the height between the peaks and valleys changes sharply so as to extend along the grain boundaries of crystal. CONSTITUTION:The magnetic head 1 consists of a slider 2 made of a polycrystalline magnetic material and a chip 3 made of a polycrystalline or single crystal magnetic material. The chip 3 is fixed into a slit 6 formed on one surface 4 of the two bearing surfaces 4, 5 of the slider 2. The surfaces of the bearing surfaces 4, 5 are so treated as to have the specific surface roughness. Namely, the surfaces are undulated in the following manner: The difference in the depth between the peaks and the valleys is 50 to 200Angstrom in average; the repeating pitch of the peaks and the valleys is 5 to 50mum in average; and the parts where the height between the peaks and the valleys changes sharply extend along the grain boundaries of the crystals. The sticking of the head 1 and the disk is relieved and the CSS damage of the head is prevented.

8. 发明专利

JPS63144472A SUSPENSION FOR FLOATING MAGNETIC HEAD DEVICE 失效
公开(公告)号：JPS63144472A
公开(公告)日：1988-06-16
申请号：JP29044386
申请日：1986-12-08
申请人： HITACHI METALS LTD
发明人： TONERI YAMINE , FURUICHI SHINJI , TAKADA YOSHIAKI
IPC分类号： G11B21/21
摘要： PURPOSE:To obtain stable electromagnetic transducing characteristics by drilling a hole of proper size and shape to a part of a flat face of a load arm to change a resonance point and attenuating the displacement at the resonance point. CONSTITUTION:A gimbal 3 mounted with an electromagnetic transducing element is fixed to the tip of the load arm 1 and a spacer 4a is provided to the base of the load arm 1 fixed to the head arm, and in a suspension for the floating magnetic head device provided with the spacer 4a, a long hole 1e with proper size and shape is drilled to a part of the flat face 1d inbetween the side of the load arm 1 opposed to the disk for the manufacture of the suspension. Thus, the resonance point is changed and the resonance level is attenuated to obtain a stable electromagnetic transducing.

9. 发明专利

JPH01169789A MAGNETIC HEAD 失效
公开(公告)号：JPH01169789A
公开(公告)日：1989-07-05
申请号：JP32812587
申请日：1987-12-24
申请人： HITACHI METALS LTD
发明人： KURIYAMA YASUO , FURUICHI SHINJI , TAKADA YOSHIAKI
IPC分类号： G11B21/21
摘要： PURPOSE:To suppress a slip/stick phenomenon on the starting and the stopping of the rotation of a disk and oscillation generating by providing a fixed angle range inclination to a reference face on a magnetic head slider face. CONSTITUTION:When a direction, for which an air inflow side on the disk rotation of a magnetic head slider is separated by making a magnetic disk contact face as a reference face, is made to be a minus direction in a condition where a magnetic head slider is made to be reference height not through a disk circuit 5, either of a ginbal 3 or a load arm 4, which is a member of the supporting body of the magnetic head slider, is twisted, and the inclining angle thetabetween the sliding face and the reference face of the magnetic head slider is allowed to have the inclination of the range of +30min--90min. Thus, the slip/stick phenomenon on the starting and the stopping of the rotation of the magnetic disk is suppressed without changing the floating attitude on the floating of the magnetic head slider.

10. 发明专利

JP2530617B2 失效
公开(公告)号：JP2530617B2
公开(公告)日：1996-09-04
申请号：JP14023186
申请日：1986-06-18
申请人： HITACHI METALS LTD
发明人： FURUICHI SHINJI , TAKADA YOSHIAKI , TONERI HACHIMINE
IPC分类号： G11B5/17 , G11B5/127 , G11B5/60

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