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    • 3. 发明专利
    • Method of manufacturing semiconductor device and semiconductor module
    • 制造半导体器件和半导体器件的方法
    • JP2003007913A
    • 2003-01-10
    • JP2001193042
    • 2001-06-26
    • Hitachi LtdHitachi Ulsi Systems Co Ltd株式会社日立製作所株式会社日立超エル・エス・アイ・システムズ
    • SHIBAMOTO MASAKUNISUZUKI KAZUNARIMIYAKI YOSHINORI
    • H01L23/12
    • H01L24/97
    • PROBLEM TO BE SOLVED: To prevent degradation in the reliability of a semiconductor device or a semiconductor module due to the warpage of a wiring board (carrier material), and to reduce an assembly failure due to the warpage of the wiring board (carrier material). SOLUTION: The wiring board (carrier material) is bonded onto a supporting plane by bonding whose adhesive power is strong and whose peeling is easy. A plurality of semiconductor elements or semiconductor modules (chips) are loaded in prescribed positions on the upper face of the wiring board. The outer terminal (pad) of the semiconductor element and a wiring terminal are electrically connected by an electric connection material. The semiconductor element, the electric connection material and a connection part where the outer terminal and the wiring terminal are electrically connected are mold-sealed by resin and the like. The wiring board is peeled from the supporting plane and a terminal for outer device connection is formed in the outer terminal of the semiconductor module at the back of the peeled wiring board. The device including the respective semiconductor elements or the semiconductor module elements is separated.
    • 要解决的问题:为了防止由于布线板(载体材料)的翘曲导致的半导体器件或半导体模块的可靠性的劣化,并且为了减少由于布线板(载体材料)的翘曲引起的组装故障, 。 解决方案:接线板(载体材料)通过粘合力粘合在支撑平面上,粘合力强,剥离容易。 多个半导体元件或半导体模块(芯片)被装载在布线板的上表面上的规定位置。 半导体元件的外部端子(焊盘)和布线端子通过电连接材料电连接。 半导体元件,电连接材料和外部端子和布线端子电连接的连接部分通过树脂等进行模制密封。 接线板从支撑面剥离,并且在剥离的布线板的背面的半导体模块的外部端子中形成用于外部设备连接的端子。 包括各个半导体元件或半导体模块元件的器件被分离。