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    • 1. 发明专利
    • Lead position recognition device
    • 引导位置识别装置
    • JPS5919337A
    • 1984-01-31
    • JP12766982
    • 1982-07-23
    • Hitachi LtdHitachi Tokyo Electronics Co Ltd
    • TAKASUGI NOBUHIROSUZUMURA YOSHIKAZUTAKASHIMA KAZUHISA
    • H01L21/60
    • H01L2224/78H01L2224/78801H01L2924/00014H01L2924/01039H01L2924/01082H01L2224/48H01L2924/00012
    • PURPOSE:To accurately and rapidly recognize the positions of leads by calculating the positions of the all leads after contraction with the all preset reference lead positions and two specific lead positions after the leads are contracted. CONSTITUTION:Lead position coordinates before a ceramic base 1 is baked are set as reference leads by a setter 2, and stored in a memory 3. The base 1 is placed on an X-Y table 4, and the position coordinates of two specific leads disposed at suitable distance formed on the base 1 are detected by the cooperation of the table and an ITV camera 5. The detected coordinates are inputted to the memory 3. An arithmetic unit 6 calculates the prescribe calculation on the basis of the data stored in the memory 3, and calculates the lead positions after the desired leads are contracted.
    • 目的:通过在引线收缩后,使用所有预设的参考引导位置和两个特定的引导位置计算收缩后所有引线的位置,准确快速地识别引线的位置。 构成:陶瓷基座1烘烤前的引线位置坐标由设定器2设定为基准引线,并存储在存储器3中。基座1被放置在XY工作台4上,两个特定引线的位置坐标位于 通过桌子和ITV照相机5的协作来检测形成在基座1上的合适距离。检测到的坐标被输入到存储器3.运算单元6基于存储在存储器3中的数据来计算规定计算 ,并计算所需引线收缩后的引导位置。
    • 2. 发明专利
    • Recognizer for lead
    • 领导认可者
    • JPS58200548A
    • 1983-11-22
    • JP8308782
    • 1982-05-19
    • Hitachi LtdHitachi Tokyo Electronics Co Ltd
    • TAKASUGI NOBUHIROKIYOUMASU RIYUUICHISUZUMURA YOSHIKAZU
    • G01B11/00G06T1/00H01L21/60
    • H01L2224/48091H01L2224/49171H01L2224/78301H01L2224/78313H01L2224/85H01L2924/01039H01L2924/01082H01L2924/14H01L2924/00014H01L2924/00012
    • PURPOSE:To recognize a plurality of leads rapidly with high accuracy by providing a line scanner recognizing the leads by scan and an ITV, which recognizes a pattern only to a specific lead and recognizes the positions of the leads. CONSTITUTION:A semiconductor structure 7 is set to a pre-recognizing section 14, a large number of the leads 9 are scanned by the line scanner 15, and central positions A1- are detected, recognized and memorized to a memory circuit 17. The leads 9A, etc. at four corner sections are pattern-recognized by an ITV camera 16 to obtain suitable positions, and the quantities of displacement of X and Y coordinates of the points B1- and A1- are counted, and memorized to the memory circuit 17. When the semiconductor structure 7 is set to a bonding stage 6, informations memorized are inputtd to a control circuit 13 and an XY table 2 is driven and controlled, a tool is moved and set at the suitable position, and wires can be bonded rapidly and accurately. The ITV camera 12 picks up each lead, and recognizes positions.
    • 目的:通过提供通过扫描识别引线的线扫描器和仅识别特定引线的图案并识别引线的位置的ITV,以高精度快速识别多个引线。 构成:将半导体结构7设置为预识别部14,通过行扫描器15扫描大量引线9,并且检测,识别中央位置A1-并将其存储到存储电路17中。引线 在四角部分的图9A等,由ITV摄像机16进行图案识别,以获得合适的位置,并对点B1-和A1-的X和Y坐标的位移量进行计数,并被存储到存储器电路17 当将半导体结构7设置到接合台6时,将存储的信息输入到控制电路13,并且XY台2被驱动和控制,工具被移动并设置在适当的位置,并且电线可以被快速接合 并准确地。 ITV摄像机12拾取每个引线,并识别位置。
    • 3. 发明专利
    • Recognizing device
    • 识别设备
    • JPS5919345A
    • 1984-01-31
    • JP12767082
    • 1982-07-23
    • Hitachi LtdHitachi Tokyo Electronics Co Ltd
    • TAKASHIMA KAZUHISASUZUMURA YOSHIKAZU
    • H01L21/66H01L21/60
    • PURPOSE:To enable to always recognize accurately in a recognizing device by automatically calculating the magnification which varies by the movement when the focusing of the image of an object to be recognized is performed by the movement of an optical system or an image pickup surface. CONSTITUTION:A spiral shaft 6 is rotated by driving a lens moving motor 5 by a lens movement command from an image processor 10 for focusing to move a lens 2. The moved distance of the lens 2 is detected by a stylus 7 and a lens position detector 8, fed to a magnification calculator 9, which calculates the magnification. This calculated result is fed to the processor 10. The processor 10 automatically focuses the image of the object 1 to be recognized to the image pickup surface of an image pickup device 4, the coincident point is automatically detected, and the magnification is automatically corrected on the basis of the calculated result.
    • 目的:通过自动计算当通过光学系统或图像拾取表面的移动来执行要识别的对象的图像的聚焦时由于移动而变化的倍率,使得能够在识别装置中始终精确地识别识别装置。 构成:通过用于聚焦的图像处理器10的透镜移动指令来驱动透镜移动电动机5来旋转螺旋轴6,以移动透镜2.透镜2的移动距离由触针7和透镜位置 检测器8,被馈送到放大率计算器9,其计算放大率。 该计算结果被馈送到处理器10.处理器10将要识别的对象1的图像自动聚焦到图像拾取装置4的图像拾取表面,自动检测重合点,并且自动校正放大率 计算结果的基础。
    • 4. 发明专利
    • Assembling device for semiconductor
    • 半导体装配装置
    • JPS58200552A
    • 1983-11-22
    • JP8308882
    • 1982-05-19
    • Hitachi LtdHitachi Tokyo Electronics Co Ltd
    • TAKASUGI NOBUHIROSHIGIYOU SEIJISUZUMURA YOSHIKAZU
    • H01L21/50H01L21/00H01L21/60H01L21/68
    • H01L21/68H01L21/67138H01L21/67259H01L2224/78H01L2224/78301H01L2224/7865H01L2224/85H01L2224/85001H01L2924/00014H01L2224/48H01L2924/00012
    • PURPOSE:To assemble bases of various size while a feed-pitch mechanism on the assembling device side is left as it is by constituting a base-feed jig at the same pitch regardless of base size and forming an empty-feed movement display section at a pitch-position where the jig cannot be disposed. CONSTITUTION:When the feed jig 11 on which the bases 22 are loaded is moved intermittently and a through-hole 21 is moved to a base detecting section 15, beams from a light-emitting source 16 reaches a photodetector 17, the absence of the base is detected by the photodetector 17 and a circuit connected to the detector 17, and a rotating column 14 and a wire bonder are not operated even when the next pitch-feed operation is executed and the through-hole 21 is moved to the position of the rotating column. When a hole 20 for mounting is moved to the base detecting section 15, an operating signal is outputted in a circuit section, and the rotating column 14 and the wire bonder 18 are operated at a time when the hole 20 for mounting is moved to the position of the rotating column by feeding of one pitch. Operation is not wastefully performed because the operation of wire bonding is stopped at a position where there exists no base.
    • 目的:为了组装各种尺寸的基座,通过以与基座尺寸无关地以相同的间距构成基准进给夹具,在组装装置侧的进给间距机构保持原样的状态,并且形成空置运动显示部 俯仰位置,夹具不能放置。 构成:当装载有基座22的进给夹具11间歇地移动并且通孔21移动到基座检测部分15时,来自发光源16的光束到达光电检测器17,没有基座 由光电检测器17和连接到检测器17的电路检测到,即使在执行下一个加工操作并且通孔21移动到位置处时,转动柱14和引线接合器也不会运行 旋转柱。 当用于安装的孔20移动到基座检测部分15时,在电路部分中输出操作信号,并且当安装孔20移动到旋转柱14和引线接合器18时操作旋转柱14和引线接合器18 旋转柱的位置通过馈送一个间距。 由于引线接合的操作停止在不存在基底的位置,所以不会浪费操作。
    • 5. 发明专利
    • RECOGNIZING METHOD FOR PATTERN
    • JPS62249003A
    • 1987-10-30
    • JP9204186
    • 1986-04-23
    • HITACHI LTD
    • SUZUMURA YOSHIKAZUTANIMOTO MICHIO
    • H01L21/66G01B11/24
    • PURPOSE:To easily execute a recognition with high accuracy by bringing the whole pattern to an image pickup in a necessary picture element size by using one optical equipment, enlarging this picture element size by an electric method, and executing a recognition of a partial pattern. CONSTITUTION:First of all, as shown in a figure (a), the whole of an element pattern 1a of a semiconductor chip is brought to an image pickup by one set of optical machine. In this case, an image pickup surface is brought to an image pickup in advance in a picture element size which becomes, for instance, 500 lines. In this state, information which has been obtained by this image pickup is processed electrically, and in case of recognizing the whole of the pattern by a device which can recognize a pattern of, for instance, 250 lines, sampling is executed on an average from in picture element information of said 500 lines, picture element information of 250 lines is extracted from the whole, and by using it, a pattern recognition is executed. In case of executing a recognition of a part, information of 250 lines containing a necessary part is selected as shown in a figure (b), and by enlarging it, a pattern recognition is executed.
    • 7. 发明专利
    • RECOGNIZING DEVICE OF OBJECT
    • JPS5870380A
    • 1983-04-26
    • JP16722381
    • 1981-10-21
    • HITACHI LTD
    • SUZUMURA YOSHIKAZUTAKASUGI NOBUHIROKIYOUMASU RIYUUICHI
    • G06T1/00G06K9/38
    • PURPOSE:To exactly execute recognition, by varying in order a threshold level in case of electrically processing a photographic image of an object to be recognized, to a value decided in advance, also statistically processing a signal quantity of the object to be recognized, and varying a reference value of said threshold level. CONSTITUTION:When recognition has become impossible due to variation of brightness of a photographic image of an object to be recognized 1, an NG signal is outputted to a threshold value control part 8. The threshold level control part 8 selects a threshold level in order as theta+DELTAtheta, theta-DELTAtheta, theta+DELTA2theta, and theta-DELTA2theta from theta. Also, a level of a signal recognized in case of repeated recognition is processed statistically in a reference control part 9, its distributing state is detected, a center value of its distribution is compared with the threshold level theta which is used at present, a definite value of the threshold level theta is made to conform with said center value, and a range which can be covered by each threshold level can always be held in an effective state. As a result, the recognition is executed exactly, and also the work efficiency is improved.