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    • 1. 发明专利
    • Clean room
    • 整理房间
    • JPS6191433A
    • 1986-05-09
    • JP21137584
    • 1984-10-11
    • Hitachi LtdHitachi Plant Eng & Constr Co Ltd
    • SAIKI ATSUSHISUZUKI MICHIOSUNAMI HIDEOASAI SHOJIROMAKI MICHIYOSHIASAMI KINICHIRO
    • F24F7/06F24F3/16F24F7/10
    • F24F3/161F24F7/10
    • PURPOSE:To make it possible to make a super clean space where the diffusion of dusts and dirts is small by setting a small opening degree of floor plates close to an under-floor return port, and setting a large opening degree of floor plates farther from the return port. CONSTITUTION:The opening degree of floor plates 6 are made larger from the position of an air return port 8 successively in the order of a region (a), a region (b) and a region (c). As a result, in the air flow the concentration of an air current to parts close to the air return port 8 is reduced as shown by arrow 11, and the horizontal air flow is substantially eliminated. Thus, the air flow becomes substantially a vertical air flow, and a down flow is realized. As a result, diffusion of dusts and dirts can be prevented, and improvements in the yield of the product and reliability therefor are realized.
    • 目的:通过将地板板的小开度设置在靠近底板返回口的地方,可以使粉尘和污垢扩散的超洁净空间变小,并将较大的开口度设置在更低的地板上 返回端口。 构成:按照区域(a),区域(b)和区域(c)的顺序,从空气返回口8的位置开始使地板6的开度更大。 结果,在空气流动中,如箭头11所示,气流对接近空气返回口8的部分的浓度降低,并且基本上消除了水平空气流。 因此,空气流变成基本上垂直的空气流,实现向下流动。 结果,可以防止粉尘和污垢的扩散,从而实现产品的产量提高和可靠性的提高。
    • 2. 发明专利
    • Clean room
    • 整理房间
    • JPS6191434A
    • 1986-05-09
    • JP21137684
    • 1984-10-11
    • Hitachi LtdHitachi Plant Eng & Constr Co Ltd
    • SAIKI ATSUSHISUZUKI MICHIOSUNAMI HIDEOASAI SHOJIROMAKI MICHIYOSHIASAMI KINICHIRO
    • F24F7/06F24F3/16F24F7/10
    • F24F7/10F24F3/161
    • PURPOSE:To prevent dust from diffusing from a region where dust is liable to be generated to a region where cleanness should be maintained by providing a difference in the air flow speeds depending on the character of the region so that the blow-off speed of the air flow in a passing region becomes greater than that in a working region. CONSTITUTION:When as a blow-off air flow from a filter 4, the blow-off speed in a working region 6a is made larger than a blow-off air flow speed in a passing region 6b, air on the low air flow side is induced to the high air flow side. Thus, dust is diffused by offsetting to the high air flow speed side, and air on the low speed side has a low dust concentration. Hence, diffusion of dust to the low air flow side cannot almost be observed. As a result, the yield of the product and reliability therefor can be improved.
    • 目的:为了防止灰尘从易于产生灰尘的区域扩散到通过根据该区域的特性提供空气流速的差异来保持清洁度的区域,使得吹扫速度 通过区域中的空气流量变得大于工作区域中的空气流量。 构成:作为来自过滤器4的吹出空气流,工作区域6a中的吹出速度大于通过区域6b中的吹出空气流速,低气流侧的空气为 诱导到高气流侧。 因此,灰尘通过偏移到高空气流速侧而扩散,低速侧的空气的灰尘浓度低。 因此,几乎不能观察到灰尘向低空气流侧的扩散。 结果,可以提高产品的产量和可靠性。
    • 3. 发明专利
    • Filter unit
    • 过滤器单元
    • JPS6174620A
    • 1986-04-16
    • JP19543984
    • 1984-09-18
    • Hitachi Plant Eng & Constr Co LtdKondo Kogyo Kk
    • ASAMI KINICHIROWATANABE SHIGEMITAKIZAWA SEIICHITAKAHASHI MINORUKURIBAYASHI TAKUHIRATA YASUTOSHINAKAJIMA NOBORU
    • B01D46/52
    • PURPOSE: To increase the sound consuming effect in a filter unit by inter posing the air path holding materials between the gaps of filter medium, holding these with a rectangular frame and providing the gaps of the filter medium slantingly for the air current direction.
      CONSTITUTION: A filter unit 46 is constituted of a rectangular frame 48 and filter mediums 50,52 folded in 99 times are set together with the zigzag space holding materials 53 which are interposed between the gaps thereof in the inside of the fame and the gaps are slanted in 30 for the air current direction shown by an arrow A. The air current is flowed along the flow path in chevron between the filter mediums 50, 52 and the essential component of sound wave is passed through the same passage as air current and therefore the noise is consumed by the flex of the filter mediums.
      COPYRIGHT: (C)1986,JPO&Japio
    • 目的:通过将过滤介质的间隙之间的空气路径保持材料相互混合来增加过滤器单元中的消声效果,将其保持为矩形框架并且为空气流方向倾斜地提供过滤介质的间隙。 构成:过滤器单元46由矩形框架48构成,并且99次折叠的过滤介质50,52与位于名誉内部的间隙之间的之字形空间保持材料53一起设置,间隙为 在箭头A所示的气流方向上倾斜30°。气流沿着过滤介质50,52之间的人字形流动路径流动,并且声波的主要分量通过与气流相同的通道,因此 噪声被过滤介质的弯曲所消耗。
    • 4. 发明专利
    • Quake-free and vibro-isolating structure
    • 无自由和振动隔离结构
    • JPS61116142A
    • 1986-06-03
    • JP23607184
    • 1984-11-09
    • Takashi FujitaHitachi Kensetsu Sekkei:KkHitachi Plant Eng & Constr Co Ltd
    • FUJITA TAKASHITSURUTA AKIRAASAMI KINICHIROHIRAMOTO MICHIAKITAKESHITA AKIJIKURAKATA SHOJI
    • E04F15/18E04H9/02F16F1/40F16F15/04
    • F16F1/40
    • PURPOSE:To make a three-dimensional quake-free and vibro-isolating effect securable, by disposing laminated rubber in space between the side of a frame and a longitudinal wall of a framework supporting this frame, thereby letting it support load in a horizontal direction. CONSTITUTION:A framework 32 is supported on a base plate 10 via laminated rubber devices 26 and 26. In addition, this laminated rubber 26 is disposed in space between the side of a frame 24 and a longitudinal wall 34 of the framework 32 in a state of being compressed with preload imposed in advance. Therefore, the load in a vertical direction is supported by the laminated rubber 26 to be disposed between the base plate 10 and the framework 32, while the load in a horizontal direction is supported by another laminated rubber 26 to be disposed between the frame 24 and the longitudinal wall 34, so that these rubber devices come to have a quake-free/vibro-isolating effect against vibrations in three-dimensional directions in consequence.
    • 目的:为了使三维无震动和振动隔离效果可靠,通过在框架的侧面和支撑该框架的框架的纵向壁之间的空间中布置层压橡胶,从而使其在水平方向上支撑负载 。 构成:框架32通过层压橡胶装置26和26支撑在基板10上。此外,该层压橡胶26以状态布置在框架24的侧面和框架32的纵向壁34之间的空间中 被预先施加的预压被压缩。 因此,垂直方向的载荷由叠置橡胶26支撑,以被布置在基板10和框架32之间,而水平方向上的负载由另一层压橡胶26支撑,以布置在框架24和框架32之间 纵向壁34,使得这些橡胶装置在三维方向上具有抵抗三维方向的振动的无震动/振动隔离效果。