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1. 发明专利

JP2012006088A Work edge detection mechanism, and work transferring mechanism 审中-公开
标题翻译：工作边缘检测机制和工作转移机制
公开(公告)号：JP2012006088A
公开(公告)日：2012-01-12
申请号：JP2010141308
申请日：2010-06-22
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SHIRAISHI TOSHIMITSU , SHIZAWA NORITAKE , TARUMITSU TAKASHI , ISHII SHINJIRO , TAKAGO HISAMASA
IPC分类号： B25J19/04 , B25J15/06 , B65H3/08
CPC分类号： B25J15/0616
摘要： PROBLEM TO BE SOLVED: To provide a work edge detection mechanism that allows a user to clearly view the work edge by an alignment camera without adding an illumination device, and to provide a work transferring mechanism utilizing the same.SOLUTION: The work edge detection mechanism is composed of a tubular body having an opening at one end and a blocking member at the another end. The mechanism includes: a light-reflecting means provided on the lower-surface side of the blocking member in order to reflect light entering from the opening. The mechanism is configured such that the inner diameter (φ 2) on the side of the blocking member is larger than the inner diameter (φ 1) on the side of the opening of the tubular body. If an air suction port is bored inside the tubular body while a vacuum suction head is disposed at the upper part of the tubular body, it allows detection of the work edge while allowing work transfer by vacuum suction.
摘要翻译：要解决的问题：提供一种工作边缘检测机构，其允许用户通过对准摄像机清晰地观察工作边缘而不添加照明装置，并且提供利用其的工件传送机构。解决方案：工作边缘检测机构由在一端具有开口的管状体和另一端的阻挡构件组成。该机构包括：设置在阻挡构件的下表面侧上以反射从开口进入的光的光反射装置。该机构构造成使得阻挡构件侧的内径（φ2）大于管状体的开口侧的内径（φ1）。如果空气吸入口在管体内部钻孔，而真空吸头位于管状体的上部，则允许检测工作边缘，同时允许通过真空抽吸进行工作传送。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2011150780A Double-sided imprint apparatus 审中-公开
标题翻译：双面印刷装置
公开(公告)号：JP2011150780A
公开(公告)日：2011-08-04
申请号：JP2010287429
申请日：2010-12-24
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SHIZAWA NORITAKE , MORI KYOICHI , TARUMITSU TAKASHI , SHIRAISHI TOSHIMITSU
IPC分类号： G11B5/84 , B29C59/02 , B29L17/00 , H01L21/027
CPC分类号： G11B5/855
摘要： PROBLEM TO BE SOLVED: To provide a double-sided imprint apparatus capable of simultaneously imprinting both sides of a transfer receiving body such as a doughnut shaped disk substrate.
SOLUTION: The double-sided imprint apparatus has at least a pattern transfer mechanism including an upper surface side stamper device supported by an elevation mechanism, and a lower side stamper device and a transfer printing target separator, which are fixed on a transport table placed on a guide rail. The transport table can reciprocate on the guide rail by a transport drive mechanism, thereby the upper surface side stamper device defines a center position, and the lower side stamper device and the transfer printing target separator can be alternately moved to a location where the lower side stamper device and the transfer receiving body release device face the upper surface side stamper device.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供能够同时压印诸如环形盘基板的转印接收体的两侧的双面压印装置。解决方案：双面压印装置至少具有图案转印机构，其包括由升降机构支撑的上表面侧压模装置，以及下侧压模装置和转印打印对象分离器，其固定在运送装置桌子放在导轨上。传送台可以通过传送驱动机构在导轨上往复运动，由此上表面侧压模装置限定中心位置，并且下侧压模装置和转印打印目标分离器可以交替地移动到下侧压模装置和转印接收体释放装置面向上表面侧压模装置。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2014199686A ディスク検査装置及びその検査方法审中-公开
标题翻译：磁盘检查装置及其检查方法
公开(公告)号：JP2014199686A
公开(公告)日：2014-10-23
申请号：JP2013073901
申请日：2013-03-29
申请人：株式会社日立ハイテクノロジーズ , Hitachi High-Technologies Corp
发明人： FUKUDA MASAYA , SHIRAISHI TOSHIMITSU , SHIZAWA NORITAKE
IPC分类号： G11B5/84
摘要：【課題】本発明は、スループットの高いディスク検査装置及びその検査方法を提供することにある。【解決手段】本発明は、カセット内に、一定のピッチを有し、直立状態でその中心が一直線上に配置されている複数のディスクを検査するディスク検査方法において、先端に前記ピッチで設けられた前記ディスクを支持する複数のコマを有する昇降アームを上昇又は下降させ、複数の前記コマに前記ディスクを支持し、前記昇降アームをさらに上昇又は下降させて、該ディスクを検査位置まで移動させ、前記ディスクを検査する。【選択図】図1
摘要翻译：要解决的问题：提供具有高产量的盘检测装置及其检查方法。解决方案：在用于检查在盒中具有恒定间距并且其中心以直线对准的多个盘的盘检查方法中在竖直状态下，上升/下降臂具有用于支撑以尖端的间距设置的盘的多个片，上升/下降臂被上升或下降，使得多个片支撑盘，上升/下降使臂进一步上升或下降，并且将盘移动到检查位置，使得可以检查盘。

4. 发明专利

JP2014035315A Disc conveyance unit and inspection device 审中-公开
标题翻译： DISC输送单元和检查装置
公开(公告)号：JP2014035315A
公开(公告)日：2014-02-24
申请号：JP2012177830
申请日：2012-08-10
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： NAKAMURA KAZUFUMI , SHIRAISHI TOSHIMITSU , YAMASHITA HISAAKI , KUROIWA MUTSUO , NAKADAI TSUTOMU
IPC分类号： G01N21/84 , G01N21/95 , G11B5/84
CPC分类号： G06Q10/08 , G11B5/84 , H01L21/67742 , H01L21/67745 , H01L21/67754 , H01L21/67781
摘要： PROBLEM TO BE SOLVED: To provide a disc conveyance unit that can convey a plurality of discs and can improve throughput, and to provide an inspection device.SOLUTION: The disc conveyance unit of the present invention includes: a supply/ejection conveyance section that extracts a disc from a disc supply section and ejects the inspected disc to a predetermined place; an inspection unit conveyance section for conveying the disc in an inspection unit; and a delivery conveyance section for conveying the disc between the supply/ejection conveyance section and the inspection unit conveyance section. The delivery conveyance section includes: a base that has a rotation center, is disposed in a circular arc shape centering the rotation center, and has even-numbered disc mounting sections on which the disc is mounted; and a drive section for rotating the base vertically and about the rotation center. The disc is conveyed between the supply/ejection conveyance section and the inspection unit conveyance section.
摘要翻译：要解决的问题：提供一种能够传送多个盘并且可以提高生产量并提供检查装置的盘传送单元。解决方案：本发明的盘传送单元包括：提取/排出传送部，其提取从盘供应部分的盘，并将检查的光盘弹出到预定的位置; 检查单元传送部，用于在检查单元中传送盘; 以及用于在供给/排出传送部分和检查单元传送部分之间传送盘的传送传送部分。输送传送部包括：具有旋转中心的基座，以旋转中心为中心的圆弧状配置，并且具有安装有盘的偶数盘安装部; 以及驱动部，其用于使所述基座垂直旋转并绕所述旋转中心旋转。盘在供给/排出传送部和检查单元传送部之间传送。

5. 发明专利

JP2012099197A Optical imprint method 审中-公开
标题翻译：光学印刷法
公开(公告)号：JP2012099197A
公开(公告)日：2012-05-24
申请号：JP2010248350
申请日：2010-11-05
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SHIZAWA NORITAKE , MORI KYOICHI , SHIRAISHI TOSHIMITSU , YAMASHITA HISAAKI
IPC分类号： G11B7/26 , B29C59/02 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide an optical imprint method capable of selectively removing a disk in a double-sided imprint apparatus.SOLUTION: The method can selectively remove a transferred disk from a bottom surface side stamper device in the double-sided imprint apparatus by irradiating ultraviolet from a UV light source of the bottom surface side stamper device and a UV light source of a top surface side stamper device to a resist of a body to be transferred to cure the resist while pressing the top surface side stamper device onto the body to be transferred with the resist applied to both sides, mounted on the bottom surface side stamper device after making the bottom surface side stamper device face the top surface side stamper device, and making irradiation time of the UV light source provided in the bottom surface side stamper device shorter than irradiation time of the UV light source provided in the top surface side stamper device when transferring a pattern of the stamper to the cured resist.
摘要翻译：要解决的问题：提供能够选择性地去除双面压印装置中的盘的光学压印方法。解决方案：该方法可以通过从底表面侧压模装置的UV光源和顶部的UV光源照射紫外线来选择性地从双面压印装置中从底表面侧压模装置移除转印盘表面侧压模装置连接到被转印的主体的抗蚀剂上以使抗蚀剂固化，同时在施加到两侧的抗蚀剂的同时将顶表面侧压模装置压在要被转印的主体上，安装在底表面侧压模装置上底面侧压模装置面向上表面侧压模装置，并且使得设置在底面侧压模装置中的UV光源的照射时间比设置在顶表面侧压模装置中的UV光源的照射时间短压模对固化的抗蚀剂的图案。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2008310947A Disk chucking mechanism and disk handling robot 有权
标题翻译：碟盘机械和盘子处理机器人
公开(公告)号：JP2008310947A
公开(公告)日：2008-12-25
申请号：JP2008125615
申请日：2008-05-13
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SHIRAISHI TOSHIMITSU , YAMAZAKI FUJIO , TOKUMURA YOSHINORI
IPC分类号： G11B5/84 , B25J15/08
CPC分类号： G11B17/22 , Y10S414/141
摘要： PROBLEM TO BE SOLVED: To provide a disk chucking mechanism with which the damage of magnetic disks or substrates thereof is reduced and high speed chucking and/or opening of the disks can be realized when the magnetic disks or the substrates are taken out or stored in cassettes and the like, and to provide a disk handling robot.
SOLUTION: A link mechanism constructed with first, second and third link members forms a slider crank mechanism and the third link member is rotated by a drive of a forward/rearward actuator such as an air cylinder and chucking nails provided in them are protruded perpendicularly to a longitudinal direction of the first or second link member. A rotation of the chucking nail protruded perpendicularly is stopped by engaging with a disk and a spring member is bent by further forward or rearward movement of the second link member to energize the first chucking nail in a direction for maintaining an engagement with the disk.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供当磁盘或基板被取出时磁盘或其基板的损坏减小的磁盘夹紧机构，并且可以实现磁盘的高速夹紧和/或打开。或存储在盒式体等中，并且提供盘处理机器人。解决方案：由第一，第二和第三连杆构件构成的连杆机构形成滑块曲柄机构，并且第三连杆构件通过诸如气缸的前/后致动器的驱动而旋转，并且在其中设置有夹紧钉垂直于第一或第二连杆构件的纵向突出。通过与盘接合来停止垂直突出的卡盘的旋转，并且弹簧构件通过第二连杆构件的进一步向前或向后运动而弯曲，以沿着保持与盘的接合的方向对第一夹盘施力。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2013022807A Microstructure transfer device and stamper transport method 审中-公开
标题翻译：微结构传输装置和冲压器运输方法
公开(公告)号：JP2013022807A
公开(公告)日：2013-02-04
申请号：JP2011158768
申请日：2011-07-20
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： OGINO MASAHIKO , SHIRAISHI TOSHIMITSU , MORI KYOICHI , SHIZAWA NORITAKE , YAMASHITA HISAAKI
IPC分类号： B29C33/00 , B29C59/02 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a microstructure transfer device which contracts a time required for replacing a stamper and prevents attachment of foreign matter on a transfer surface of the stamper as compared with a conventional microstructure transfer device.SOLUTION: The microstructure transfer device 1 transfers a micro uneven pattern formed on the stamper 2 to a surface of a transferred body 5 by pressing the stamper 2 mounted on a stamper head 23 to the transferred body 5. The microstructure transfer device 1 includes a moving stage 31 which can proximately move with respect to the stamper head 23, and a stamper holding part 32 arranged on the moving stage 31. The stamper holding part 32 includes an adhesive layer 35 which is adhesive to hold a forming surface of the uneven pattern of the stamper 2.
摘要翻译：要解决的问题：与传统的微结构转印装置相比，提供一种微结构转印装置，其收缩更换压模所需的时间并防止异物附着在压模的转印表面上。解决方案：微结构转印装置1通过将安装在压模头23上的压模2按压到转印体5上而将形成在压模2上的微细凹凸图案转印到转印体5的表面。微结构转印装置1 包括能够相对于压模头23近似移动的移动台31和布置在移动台31上的压模保持部32。压模保持部32包括粘合剂层35，粘合剂层35粘合以保持成形表面压模2的不均匀图案。版权所有（C）2013，JPO＆INPIT

8. 发明专利

JP2012234603A Method for inspecting film thickness of transferred object, method for producing transferred object, apparatus for producing transferred object, and stamper for transfer 审中-公开
标题翻译：用于检查转印对象的薄膜厚度的方法，用于生产转印对象的方法，用于生成转印对象的装置和用于传送的印刷机
公开(公告)号：JP2012234603A
公开(公告)日：2012-11-29
申请号：JP2011104259
申请日：2011-05-09
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： AOKI MASASHI , YAMASHITA HISAAKI , SHIRAISHI TOSHIMITSU , SHIZAWA NORITAKE
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： PROBLEM TO BE SOLVED: To easily measure the film thickness of a resist film with an inexpensive apparatus.SOLUTION: A method for inspecting the film thickness of a transferred object is provided for the process of producing a substrate for the transferred object, the process including, while pressing a stamper having a predetermined pattern to a photosetting resin agent applied on the substrate for the transferred object, irradiating the photosetting resin agent with UV rays and releasing the stamper after curing the resin to obtain the substrate for a transfer object having the predetermined pattern transferred from the stamper. The inspection method comprises, during producing the above substrate, observing a predetermined portion of the pattern transferred onto the photosetting resin agent and determining whether the film thickness of the photosetting resin agent is appropriate or not. Otherwise, the inspection method includes transferring patterns having mutually different widths or depths and used for measuring film thickness onto a portion where the predetermined pattern is not formed, by using a stamper having the patterns, and measuring the film thickness of the photosetting resin agent applied on the substrate for the transferred object by observing which pattern among the patterns for measuring film thickness is filled or not filled with the photosetting resin.
摘要翻译：要解决的问题：为了容易地用廉价的装置测量抗蚀剂膜的膜厚度。解决方案：提供了一种用于检查被转移物体的膜厚度的方法，用于生产用于转移物体的基底的方法，该方法包括在将具有预定图案的压模压在施加到用于转印物体的基底，用紫外线照射光固化树脂剂并在固化树脂之后释放压模以获得具有从压模传送的预定图案的转印体的基底。该检查方法包括在制造上述基板期间，观察转印到光固化树脂试剂上的图案的预定部分，并确定光固化树脂剂的膜厚是否合适。否则，检查方法包括通过使用具有图案的压模来转印具有相互不同的宽度或深度的图案并将其用于测量膜厚度到未形成预定图案的部分，并测量施加的光固化树脂剂的膜厚度通过观察用于测量膜厚度的图案中的哪个图案被填充或未填充有光固化树脂，在被转印物体的基板上。版权所有（C）2013，JPO＆INPIT

9. 发明专利

JP2012028685A Imprint device and imprint transfer method 有权
标题翻译： IMPRINT DEVICE和IMPRINT TRANSFER方法
公开(公告)号：JP2012028685A
公开(公告)日：2012-02-09
申请号：JP2010168314
申请日：2010-07-27
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SHIRAISHI TOSHIMITSU , YAMASHITA HISAAKI , AOKI MASASHI
IPC分类号： H01L21/027 , B29C59/02
CPC分类号： G03F7/0002 , B29C43/021 , B29C43/10 , B82Y10/00 , B82Y40/00
摘要： PROBLEM TO BE SOLVED: To provide an imprint device or an imprint transfer method in which uniform coating thickness of UV-curable resin can be obtained by maintaining uniformity in curing quality by UV light even when dust or dirt is adhering to the glass or there is a flaw in the glass.SOLUTION: An uneven shape on the surface of a stamper is transferred to a body to be transferred by irradiating the body to be transferred with energy, and then the stamper is detached from the body to be transferred in the imprint device or the imprint transfer method. The transfer is performed by pressing at least one first rear surface of the stamper or the body to be transferred by a plane pressing body 21 having a planar shape, subsequently pressing at least one second rear surface of the stamper or the body to be transferred by fluid, and controlling the timing of pressing by the plane pressing body and pressing by the fluid.
摘要翻译：要解决的问题：提供一种压印装置或压印转印方法，其中即使灰尘或污垢附着在玻璃上，也可以通过UV维持固化质量的均匀性来获得UV固化树脂的均匀涂层厚度或玻璃中有缺陷。解决方案：压模表面上的不均匀形状通过用能量照射要转移的主体而被转印到要被转印的主体上，然后将印模从主体上分离以转印到压印装置或印记转移方式。通过按压具有平面形状的平面按压体21的压模或被转印体的至少一个第一后表面进行转印，随后按压压模或待转印体的至少一个第二后表面流体，并且控制由平面按压体按压的时间和流体的按压。版权所有（C）2012，JPO＆INPIT

10. 发明专利

JP2011211157A Method and apparatus for transcripting fine pattern 有权
标题翻译：用于代码精细图案的方法和装置
公开(公告)号：JP2011211157A
公开(公告)日：2011-10-20
申请号：JP2010262320
申请日：2010-11-25
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YAMASHITA HISAAKI , SHIRAISHI TOSHIMITSU , TSUSHIMA TAKESHI , AOKI MASASHI
IPC分类号： H01L21/027 , B29C59/02
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： PROBLEM TO BE SOLVED: To provide a method and an apparatus for transcripting fine patterns capable of transcripting patterns by a relatively compact apparatus with a high throughput while preventing the ingress of bubbles.SOLUTION: In the method for transcripting fine patterns, a back surface of a stamper is vacuum sucked and the stamper is brought into close contact with a target of transcription with its surfaces coated with resist and a pressure is applied thereto. At this time, the stamper is deformed into a spherical shape or bent to expand the close contact face from a central area to a peripheral area to prevent the ingress of air bubbles into between the target of transcription and the stamper.
摘要翻译：要解决的问题：提供一种方法和装置，用于通过相对紧凑的装置以高产量转录能够转录图案的精细图案，同时防止气泡的进入。解决方案：在用于转录精细图案的方法中，真空抽吸压模，并且使压模与其表面涂覆有抗蚀剂的转录目标紧密接触并施加压力。此时，压模变形为球状或弯曲以将紧密接触面从中心区域扩展到周边区域，以防止气泡进入转录目标与压模之间。

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