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JP2013210419A Diffraction grating and manufacturing method thereof 有权
$Diffraction grating and manufacturing method thereof$
标题翻译：衍射光栅及其制造方法
公开(公告)号：JP2013210419A
公开(公告)日：2013-10-10
申请号：JP2012078806
申请日：2012-03-30
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KAWASAKI KENJI , OGINO MASAHIKO , MIYAUCHI AKIHIRO
IPC分类号： G02B5/18
CPC分类号： G02B5/18 , B29C43/021 , B29C43/18 , B29D11/00769 , B29K2995/0018 , B29L2011/00 , G02B5/1847 , G02B5/1852
摘要： PROBLEM TO BE SOLVED: To provide a diffraction grating which is superior in profile irregularity and can be made small-sized and light-weight, and a manufacturing method thereof.SOLUTION: The diffraction grating includes a glass substrate 20 having a thickness of 0.5 to 8 mm, a microstructure 10 made of resin which is formed on one surface of the glass substrate 20 and has a rugged pattern, and a flat resin layer 30 formed on the other surface of the glass substrate 20. Even when the glass substrate 20 has profile irregularity of more than λ/2, the microstructure 10 is not affected by profile irregularity of the glass substrate 20 because of flatness of the resin layer 30, and a replica of the diffraction grating superior in profile irregularity can be manufactured. Further, since the glass substrate can be made thin, the size and weight of the diffraction grating can be reduced..
摘要翻译：要解决的问题：提供一种轮廓不规则性优异并且可以制成小型轻量化的衍射光栅及其制造方法。解决方案：衍射光栅包括厚度为0.5至 8mm，由玻璃基板20的一个表面形成且具有凹凸图案的树脂制微观结构10，以及形成在玻璃基板20的另一个面上的平坦的树脂层30.即使玻璃基板20具有轮廓不均匀度大于λ/ 2，由于树脂层30的平坦度，微结构10不受玻璃基板20的轮廓不规则影响，并且可以制造出轮廓不规则性优异的衍射光栅的复制品。此外，由于可以使玻璃基板变薄，因此可以减小衍射光栅的尺寸和重量。

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