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1. 发明专利

JP2011165884A Display device and manufacturing method thereof 审中-公开
标题翻译：显示装置及其制造方法
公开(公告)号：JP2011165884A
公开(公告)日：2011-08-25
申请号：JP2010026914
申请日：2010-02-09
申请人： Hitachi Displays Ltd , Panasonic Liquid Crystal Display Co Ltd , パナソニック液晶ディスプレイ株式会社 , 株式会社日立ディスプレイズ
发明人： YAMAKAWA ICHIRO , AKAMATSU NAOTOSHI , GOTO JUN , OUE EIJI , MUTO DAISUKE
IPC分类号： H01L29/786 , G02F1/1368 , H01L21/28 , H01L21/336 , H01L21/768 , H01L23/522 , H01L29/417
摘要： PROBLEM TO BE SOLVED: To provide a display device having a thin-film transistor, which prevents the deterioration of a transistor characteristic due to contamination elements diffused inside a gate insulating layer, and also to provide a manufacturing method of the display device. SOLUTION: The display device includes a semiconductor layer 104 laminated on the upper side of a substrate 101, a gate electrode 106 laminated on the upper side of the semiconductor layer 104, the gate insulating layer 105 laminated between the semiconductor layer 104 and the gate electrode 106, and the thin-film transistor including a source electrode 112 and a drain electrode 111. At least one of the source electrode 112 and the drain electrode 111 is formed on the upper side of the gate insulating layer 105 and connected to the semiconductor layer via a contact hole 109 formed in the gate insulating layer 105. A side wall film 110 containing a nitrogen compound is formed on the side wall of the contact hole 109. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决的问题：提供一种具有薄膜晶体管的显示装置，其防止由于在栅极绝缘层内扩散的污染元素引起的晶体管特性的劣化，并且还提供了显示装置的制造方法。解决方案：显示装置包括层叠在基板101的上侧的半导体层104，层叠在半导体层104的上侧的栅电极106，层叠在半导体层104和第二半导体层104之间的栅极绝缘层105 栅电极106和包括源电极112和漏电极111的薄膜晶体管。源电极112和漏电极111中的至少一个形成在栅极绝缘层105的上侧，并连接到通过形成在栅极绝缘层105中的接触孔109形成半导体层。在接触孔109的侧壁上形成含有氮化合物的侧壁膜110.版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2010072527A Liquid crystal display device 有权
标题翻译：液晶显示装置
公开(公告)号：JP2010072527A
公开(公告)日：2010-04-02
申请号：JP2008242357
申请日：2008-09-22
申请人： Hitachi Displays Ltd , 株式会社日立ディスプレイズ
发明人： ABE HIROYUKI , MUTO DAISUKE , KAMATA TAKAMITSU
IPC分类号： G02F1/1345 , G02F1/1368
CPC分类号： G02F1/133345 , G02F1/136227 , G02F2001/133357
摘要： PROBLEM TO BE SOLVED: To provide a liquid crystal display device which prevents the occurrence of cracking a capacitor insulating film due to laser marking.
SOLUTION: The liquid crystal display device includes pixels disposed in a matrix in a display region on a substrate; a writing film formed in a margin region excluding the display region; and a transparent insulating film, extending from the display region to the margin region and formed as an overlay on the writing film, wherein the transparent insulating film includes at least: an organic insulating film comprising an organic compound and planarizing the substrate surface; an inorganic insulating film which is a thin film, comprising an inorganic compound formed as an overlay on the organic insulating film and has an aperture formed in an upper region of the writing film and reaching the organic insulating film; and a transparent electrode layer formed in the aperture of the inorganic insulating film and covering the organic insulating film exposed through the aperture of the inorganic insulating film.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种防止由于激光标记而导致电容器绝缘膜破裂的发生的液晶显示装置。解决方案：液晶显示装置包括在基板上的显示区域中以矩阵形式设置的像素; 形成在除了显示区域之外的边缘区域中的写入膜; 以及透明绝缘膜，从所述显示区域延伸到所述边缘区域并且形成为所述书写膜上的覆盖层，其中所述透明绝缘膜至少包括：包含有机化合物的有机绝缘膜和使所述基板表面平坦化; 作为薄膜的无机绝缘膜，包括在有机绝缘膜上形成为覆盖层的无机化合物，并且具有形成在书写膜的上部区域中并到达有机绝缘膜的孔; 以及透明电极层，形成在无机绝缘膜的孔中，并覆盖通过无机绝缘膜的孔露出的有机绝缘膜。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2005277007A Polycrystalline semiconductor film manufacturing method, apparatus therefor, and image display panel 审中-公开
标题翻译：多晶硅半导体膜制造方法，其设备及图像显示面板
公开(公告)号：JP2005277007A
公开(公告)日：2005-10-06
申请号：JP2004086641
申请日：2004-03-24
申请人： Hitachi Displays Ltd , Hitachi Ltd , 株式会社日立ディスプレイズ , 株式会社日立製作所
发明人： TAKEDA KAZUO , SATO TAKESHI , GOTO JUN , SAITO MASAKAZU , MUTO DAISUKE
IPC分类号： G02F1/1368 , G02F1/133 , G09F9/30 , G09G3/36 , G09G3/38 , H01L21/00 , H01L21/20 , H01L21/26 , H01L21/263 , H01L21/268 , H01L21/336 , H01L21/42 , H01L21/77 , H01L27/32 , H01L29/786
CPC分类号： H01L27/1285 , H01L27/1296 , H01L27/3244 , H01L29/66757 , H01L29/78675
摘要： PROBLEM TO BE SOLVED: To efficiently enlarge the minor axis width of a laser ray, by 25% at a maximum, and bring the energy loss close to zero, thus improving a throughput by 25% at a maximum. SOLUTION: A dog ear removing filter 15 for removing diffraction lights 17, 18, which occur from a lens boundary to cause a dog ear 16, is disposed to optical systems 5 to 8 for uniformizing the light intensity distribution within a laser beam 13 to be irradiated. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了有效地将激光的短轴宽度最大化地增大25％，并且使能量损失接近于零，从而最大限度地提高25％的生产量。解决方案：用于去除从透镜边界发生的引起狗耳16的衍射光17,18的狗耳去除滤光器15设置在光学系统5至8上，以使激光束内的光强度分布均匀化 13被照射。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2010072528A Liquid crystal display device 审中-公开
标题翻译：液晶显示装置
公开(公告)号：JP2010072528A
公开(公告)日：2010-04-02
申请号：JP2008242361
申请日：2008-09-22
申请人： Hitachi Displays Ltd , 株式会社日立ディスプレイズ
发明人： ABE HIROYUKI , MUTO DAISUKE , KAMATA TAKAMITSU
IPC分类号： G02F1/1337 , G02F1/1368
摘要： PROBLEM TO BE SOLVED: To provide a liquid crystal display device which prevents electrical contact among adjoining pixel electrodes due to waste of ITO collected by a rubbing roller.
SOLUTION: The liquid crystal display device comprises a first substrate having a plurality of drain lines and a plurality of gate lines intersecting the drain lines, and using a region enclosed by the drain lines and the gate lines as a pixel region; a second substrate disposed opposing to the first substrate; and a liquid crystal layer interposed between the first substrate and the second substrate, wherein on at least one side outside a display region that is an aggregate of pixels, at least one step-like feature, extending in a direction along the side is formed on the liquid crystal face side of the first substrate.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种液晶显示装置，其防止由于由摩擦辊收集的ITO的浪费而在相邻的像素电极之间的电接触。解决方案：液晶显示装置包括具有多条排水线的多个第一基板和与该排水线相交的多条栅极线，并且使用由该漏极线和该栅极线包围的区域作为像素区域; 与第一基板相对设置的第二基板; 以及插入在第一基板和第二基板之间的液晶层，其中在作为像素聚集体的显示区域的至少一侧以外的至少一个侧面上形成有沿着沿该方向的方向延伸的至少一个阶梯状特征，第一基板的液晶面侧。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2010002594A Liquid crystal display device and method for manufacturing the same 审中-公开
标题翻译：液晶显示装置及其制造方法
公开(公告)号：JP2010002594A
公开(公告)日：2010-01-07
申请号：JP2008160506
申请日：2008-06-19
申请人： Hitachi Displays Ltd , 株式会社日立ディスプレイズ
发明人： YAMAMOTO TAKASHI , SEKI HIDENORI , MUTO DAISUKE
IPC分类号： G02F1/1368
摘要： PROBLEM TO BE SOLVED: To prevent such a phenomenon that the contrast of an image decreases because of insufficient rubbing between an interdigital electrode and an interdigital electrode in an IPS (In-Plane Switching) liquid crystal display device having a comb-teeth-shaped pixel electrode.
SOLUTION: A common electrode 110 is formed on a flattening film 109; a second interlayer dielectric 111 is formed on the common electrode 110; a recess 121 is formed in the second interlayer dielectric 111; and a pixel electrode 112 made of ITO is formed in the recess 121. The recess 121 in the second interlayer dielectric 111 is formed by using halftone exposure and dry etching. An unnecessary ITO is simultaneously removed upon removing a resist 120 remaining after the dry etching. The surface of the pixel electrode 112 and of the second interlayer dielectric 111 is therefore made almost flat, which prevents a phenomenon of insufficient rubbing between the interdigital electrode and the interdigital electrode constituting the pixel electrode 112.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题为了防止由于具有梳齿的IPS（平面切换）液晶显示装置中的叉指电极和叉指电极之间的摩擦不足而导致图像的对比度降低的现象形像素电极。解决方案：在平坦化膜109上形成公共电极110; 在公共电极110上形成第二层间电介质111; 在第二层间电介质111中形成凹部121; 并且在凹部121中形成由ITO制成的像素电极112.第二层间电介质111中的凹部121通过使用半色调曝光和干蚀刻形成。在去除在干蚀刻之后残留的抗蚀剂120时，同时去除不需要的ITO。因此，像素电极112和第二层间电介质111的表面几乎是平的，这防止了构成像素电极112的叉指电极和叉指电极之间的摩擦不充分现象。（C）2010 ，JPO＆INPIT

6. 发明专利

JP2006300811A Method of measuring film thickness of thin film, method of forming polycrystal semiconductor thin film, manufacturing method for semiconductor device, manufacturing apparatus for the same, and manufacture method for image display 审中-公开
标题翻译：测量薄膜薄膜厚度的方法，形成多晶半导体薄膜的方法，半导体器件的制造方法及其制造装置及其制造方法
公开(公告)号：JP2006300811A
公开(公告)日：2006-11-02
申请号：JP2005124830
申请日：2005-04-22
申请人： Hitachi Displays Ltd , 株式会社日立ディスプレイズ
发明人： TAKEDA KAZUO , GOTO JUN , MUTO DAISUKE
IPC分类号： G01B11/06 , H01L21/20 , H01L21/268 , H01L21/336 , H01L29/786
CPC分类号： G01B11/0683 , G01B11/0633
摘要： PROBLEM TO BE SOLVED: To inspect film thicknesses of a thin film in ten-thousand or more of measurement points per minute ranging over the whole face of a substrate.
SOLUTION: A laser beam is emitted toward the thin film 3 formed on the transparent substrate 2, transmission intensities are measured in a large number of same points within the substrate over the whole measuring area of the substrate, by a transmission beam intensity monitor 4, and reflected beam intensities are measured therein by a reflected beam intensity monitor 5. The film thickness is measured and evaluated from a relation between an A value and the film thickness, based on the value A=1-(R+T), where R is a reflectance and T is a transmittance.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：在基板的整个面上检查每分钟万分之一或更多的测量点的薄膜的膜厚度。解决方案：将激光束朝向形成在透明基板2上的薄膜3发射，在基板的整个测量区域上以大量相同的点测量透射强度，通过透射光束强度监视器4，并且通过反射光束强度监视器5在其中测量反射光束强度。基于值A = 1-（R + T），从A值和膜厚度之间的关系测量和评估膜厚度，，其中R是反射率，T是透射率。版权所有（C）2007，JPO＆INPIT

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