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    • 4. 发明专利
    • SEMICONDUCTOR DEVICE AND WIRE BONDING THEREFOR
    • JPH02186650A
    • 1990-07-20
    • JP582889
    • 1989-01-12
    • HITACHI LTD
    • WATANABE HIROSHIOKIKAWA SUSUMUMIKINO HIROSHI
    • H01L21/60
    • PURPOSE:To reduce the size of a semiconductor device by a method wherein pad electrodes are formed in such a way that the pad electrodes are alternately arranged in a zigzag configuration at a prescribed pitch on the outer peripheral line along the respective peripheral edges of a semiconductor chip and at a prescribed pitch on the inner peripheral line of the chip and at the same time, the pitches between the respective pad electrodes become larger as they approach to the corner parts of the chip. CONSTITUTION:A semiconductor chip 6 has a square chip main surface and pad electrodes 7 are arranged on the outer peripheral line OL of the chip 6. These electrodes are arranged in such a way that the centers of two pieces of the adjacent electrodes 7 arranged on this line OL and the center of one piece of a pad electrode 7 arranged on an inner peripheral line IL, which is positioned more nearer to the direction of the center of the chip 6 than this line OL, form a triangle. In this case, in case an equilateral triangle is formed and the electrodes 7 are arranged in a regular zigzag configuration, the highest arrangement density can be realized. Accordingly, the electrodes 7 are arranged so that such each triangle as the inner angle, which is positioned on the side near some corner part of the chip, of the triangle is set as theta and the inner angle (alpha), which is constituted of the direction of a covered wire 8 and the base of the triangle, is always larger than the theta is specified and the center of the electrode 7 is positioned at the vertex of this triangle. Thereby, while the contact of a bonding tool with the already-disposed-in-tension wire is prevented, the number of the acquired pad electrodes can be secured.
    • 5. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPH01235363A
    • 1989-09-20
    • JP6390788
    • 1988-03-16
    • HITACHI LTD
    • ANJO ICHIRONISHI KUNIHIKOOKIKAWA SUSUMUIIJIMA HAJIME
    • H01L25/18H01L25/065H01L25/07
    • PURPOSE:To increase the mounting density per package by a method wherein one or more semiconductor chips are piled up on a semiconductor chip and these are pellet-bonded by using a nonconducting adhesive. CONSTITUTION:A lower-part semiconductor chip 1B is pellet-bonded to a tab 2 by using an adhesive 3 for pellet bonding use. An upper-part semiconductor chip 1A is pellet-bonded to the lower-part semiconductor chip 1B by using a nonconducting adhesive 4 for pellet bonding use. The upper-part and lower- part semiconductor chips 1A and 1B are connected individually to lead frames 6 by using bonding wires 5A, 5B, and sealed by using a resin 7 for mold sealing use such as a resin or the like. Individual pads on the upper-part and lower-part semiconductor chips 1A and 1B and the bonding wires 5A, 5B are connected by a wedge ball bonding method. The lead frames 6 and the bonding wires 5A, 5B are connected by a thermal pressure bonding method used together with an ultrasonic oscillation. By this setup, the mounting density per package can be increased by a portion where a semiconductor chip is piled up at the upper-part.
    • 6. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS63250828A
    • 1988-10-18
    • JP8475887
    • 1987-04-08
    • HITACHI LTD
    • ONUKI HITOSHIKOIZUMI MASAHIROSUZUKI HITOSHIARAKI ISAOOKIKAWA SUSUMU
    • H01L21/60
    • PURPOSE:To make it possible to bond a Cu ball to a reliable IC or LSI by a method wherein the copper ball is deformed in such a way that one of crystal grains on the peripheral part of the copper ball right over the interface of a joint part makes an angle of 30 degrees or less with a semiconductor integrated circuit chip and is bonded to the IC or LSI. CONSTITUTION:In the joint part between a Cu ball and an Al electrode on an Si chip, the Cu ball is deformed in such a way that at least one of crystal grains 2 on the peripheral part of the Cu ball 1 right over the interface of the joint part makes an angle theta of 30 degrees or less with the Si chip and is bonded. After the texture of the Cu ball on the bonding interface of the Cu ball is polished in parallel to the chip, the crystal grains are contrived in such a way that their average crystal grain diameter becomes 15 mum or less. In such a way, when the ball is formed by short-circuit discharge using a Cu wire of a high purity of 99.999 % or more in the mixed inert gas of Ar and H2 gases, the rate of solidification is controlled. Thereby, the texture is controlled and the ball is softened to prevent a failure of bonding.
    • 7. 发明专利
    • BONDING METHOD AND DEVICE THEREFOR
    • JPS63182828A
    • 1988-07-28
    • JP1403587
    • 1987-01-26
    • HITACHI LTD
    • OKIKAWA SUSUMUTANIMOTO MICHIO
    • H01L21/60
    • PURPOSE:To reduce the generation of defective bonding by a method wherein the surface of a metal wire is exposed by removing the insulating material on the bonding part of a covered wire using the flame of burning mixed gas, and the insulating material of the covered wire is removed completely. CONSTITUTION:The covered wire 2, consisting of a metal wire which is covered by an insulating material, is connected to a bonding part. At that time, the mixed gas of combustion gas and temperature controlling gas to be used to lower the burning temperature of the combustion gas is formed. The insulating material on the bonding part of the wire 2 is removed by jetting out the burning flame generated by burning the combustion gas from an insulating material removing torch 15, and the surface of the metal wire at the bonding part of the wire 2 is exposed. The metal wire of the exposed wire 2 is connected to the bonding part. As a result, the burning flame giving no damage or breakage can be engulfed substantially on the whole area of the bonding part of the wire 2. Consequently, the insulating material of the wire 2 can be removed completely, and the generation of unsatisfactory bonding can be reduced.