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1. 发明专利

JPS59176594A Heat transfer wall of boiling type and manufacture thereof 失效
标题翻译：锅炉类型及其制造热交换器
公开(公告)号：JPS59176594A
公开(公告)日：1984-10-05
申请号：JP4955083
申请日：1983-03-24
申请人： Hitachi Cable Ltd , Hitachi Ltd
发明人： YOSHIDA HIROMICHI , SASAKI SATOSHI , FUKUDA SHIGEO , KAKIZAKI KIMIO , NAKAYAMA HISASHI , OOGURO TAKAHIRO , NAKAJIMA TADAKATSU , NAKAYAMA YOSHIHIKO
IPC分类号： F28F13/02 , F28F1/12 , F28F13/18
CPC分类号： F28F13/187
摘要： PURPOSE:To increase the heat exchanging rate of a heat transfer wall of boiling type in the wide range of thermal loading, by providing multi-ply layers of tunnel to the surface of a heat transfer wall so that boiling action can be performed effectively. CONSTITUTION:A number of fine tunnels 3 are formed, crossing with channels 2, underneath the surfaces between the channels 2 which are spirally provided on the outer periphery of a heat transfer tube body 1 at large pitches, while on the surface of a tube a number of fine fins 4 are formed at small pitches, crossing with the channels 2. In addition the outer periphery of a heat transfer tube body 1 is wound and coated by thin tapes 5 continuously at intervals 6, and a number of fine tunnels 7 are formed underneath the tapes 5. When liquid cooling medium, which is to be boiled, is flowed along the outer surface of a tube, while a fluid in comparatively high temperature is passed through the inside of a tube, each tunnel 3 and 7 on the heat transfer wall, being formed as mentioned above, function as part of vapor bubbles generated and grown from liquid. The tunnels 3 in the lower layer are effectively acted when thermal loading is especially low, while the tunnels 7 on the upper layer are also effectively acted when the thermal loading is large, so that the heat transfer wall can show high heat transferring performance in wide range of thermal loadings.
摘要翻译：目的：通过在传热壁的表面提供多层隧道，以便有效地进行沸腾作用，从而在广泛的热负荷范围内提高沸腾传热壁的热交换率。构成：在传导管体1的外周部以大间距螺旋地设置的通道2之间的表面下方形成有许多细沟3与通道2交叉，而管a的表面细小翅片4的数量形成为与通道2交叉的小间距。此外，传送管主体1的外周以间隔6连续地被薄带5卷绕并且被涂覆，并且多个细管7 形成在带5下面。当要煮沸的液体冷却介质沿着管的外表面流动时，当较高温度的流体通过管的内部时，每个通道3和7在管如上所述形成的传热壁用作从液体生成和生长的蒸汽气泡的一部分。当热负载特别低时，下层的隧道3有效地起作用，而当热载荷大时，上层的隧道7也有效地起作用，使得传热壁可以在宽的范围内显示出高的传热性能热负荷范围。

2. 发明专利

JPS59145494A Boiling type heat transfer wall 失效
标题翻译：锅炉式热交换器
公开(公告)号：JPS59145494A
公开(公告)日：1984-08-20
申请号：JP1905483
申请日：1983-02-08
申请人： Hitachi Cable Ltd , Hitachi Ltd
发明人： YOSHIDA HIROMICHI , SASAKI SATOSHI , FUKUDA SHIGEO , KAKIZAKI KIMIO , NAKAYAMA HISASHI , OOGURO TAKAHIRO , NAKAYAMA YOSHIHIKO
IPC分类号： F28F13/02 , F28F1/12 , F28F13/18
CPC分类号： F28F13/187
摘要： PURPOSE:To obtain a heat transfer wall whose production is easy, quality is stable and property is excellent, by winding, on a fin tip section on a surface having fins whose pitches are different, a tape having a width wider than said pitches so that a plurality of tunnels whose widths are different to each other are formed under the tape to be in communication with the outside via an open section. CONSTITUTION:Two copper tapes 3 having a thickness of 0.05-0.3mm. and a width on the order of 2-8mm. are wound helically on the outer circumference of the finned pipe 1 with a gap between the turns of the tapes being on the order of 0.2-1.5mm., and are secured partially to the pipe material 1. By this winding of the tapes, a plurality of the tunnels 41, 42 defined by the fins 2 are formed under the tapes 3. The widths W1 and W2 of the adjacent tunnels are different, and the open section 5 is formed between the turns of the tapes 3 so that the open section 5 allows the tunnels 41, 42 to be in communication with the outside. Steam bubbles of a liquid generated in the tunnels 41, 42 would not be released immediately outside but remain inside. The tunnels 41, 42 accumulate the resulting heat to increase the inside temperature intensively and allow the bubbles to grow efficiently. On the other hand, the open section 5 serves as an inflow port of the liquid into the tunnels 41, 42 and makes the boiling active to increase the heat transfer property.
摘要翻译：目的：为了获得生产容易的传热壁，通过在具有不同间距的翅片的表面上的翅片尖部上缠绕具有宽度大于所述间距的宽度的带，其质量稳定且性能优异，使得宽度彼此不同的多个隧道形成在带的下方，以经由开口部与外部连通。构成：两根铜带3，厚度为0.05-0.3mm。宽度为2-8mm。螺旋形地缠绕在翅片管1的外圆周上，带之间的间隙大约为0.2-1.5mm，并且部分地固定在管材1上。通过这种带子的卷绕，多个由翅片2限定的隧道41,42形成在带3下面。相邻隧道的宽度W1和W2是不同的，并且开口部分5形成在带3的匝之间，使得开口部分 5允许隧道41,42与外部通信。在隧道41,42中产生的液体的蒸汽气泡将不会立即在外部释放，而是保持在内部。隧道41,42积聚所产生的热量以集中地增加内部温度并允许气泡有效地生长。另一方面，开口部5作为液体进入通道41,42的流入口，并且使沸腾活性增加传热性能。

3. 发明专利

JPS59145493A Heat transfer wall 失效
标题翻译：传热墙
公开(公告)号：JPS59145493A
公开(公告)日：1984-08-20
申请号：JP1905383
申请日：1983-02-08
申请人： Hitachi Cable Ltd , Hitachi Ltd
发明人： SASAKI SATOSHI , YOSHIDA HIROMICHI , FUKUDA SHIGEO , KAKIZAKI KIMIO , NAKAYAMA HISASHI , OOGURO TAKAHIRO , NAKAYAMA YOSHIHIKO
IPC分类号： F28F13/02 , F28F1/12 , F28F13/18
CPC分类号： F28F13/187
摘要： PURPOSE:To obtain a heat transfer wall wherein boiling can be performed effectively, the heat exchange efficiency is high, the production is easy and the quality is stable, by winding on the fin tip section on the finned surface a tape having a width wider than the pitch of the fins with the gap between the turns of the tape being narrower than the width of the tape. CONSTITUTION:The surface of a pipe material 1 is cut helically to form the fins 2 whose tips are sharply tapered, and the tape is wound around the circumference of thereof helically with a gap between the turns of the tape. Thus, a plurality of tunnels 4 defined by the fins 2 are formed under the tape 3 and an opening section 5 is formed between the turns of the tape 3 and is in communication with the outside. When a high temperature fluid is passed in the pipe 1 with the pipe 1 immersed in a liquid, each tunnel 4 keeps steam bubbles of the liquid generated therein not to be released immediately and allows the bubbles to grow. Further the tunnels 4 accumulate the heat transferred from the pipe wall to elevate the inside temperatue intensively and allow the steam bubbles to be generated and to grow efficiently. The opening section 5 serves as a releasing section for allowing part of the steam bubbles spread in the tunnels 4 to be released outside of the heat transfer pipe and also as an inlet of the liquid into the tunnels 4, so that boiling thereof is made active and the heat transfer efficiency can be increased.
摘要翻译：目的：为了获得能够有效进行沸腾的传热壁，热交换效率高，生产容易，质量稳定，通过在翅片表面上卷绕宽度大于带子之间的间隙的翼片的间距比带的宽度窄。构成：将管材1的表面螺旋状切割以形成尖端尖锐的翅片2，并且带以带状的匝之间的间隙螺旋地缠绕在其圆周上。因此，由带状物3限定的多个隧道4形成在带3下面，并且在带3的匝之间形成开口部5并与外部连通。当管1浸入液体中时，高温流体通过，每个通道4保持其中产生的液体的蒸汽气体不被立即释放并允许气泡生长。此外，隧道4积聚从管壁传递的热量，以集中地升高内部温度，并允许产生蒸汽气泡并有效地生长。开口部5用作使扩散在隧道4中的一部分蒸汽泡被释放到传热管外部并且作为液体进入隧道4的释放部分，使得其沸腾被激活并且可以提高传热效率。

4. 发明专利

JPS59176592A Heat transfer wall and manufacture thereof 失效
标题翻译：热交换器及其制造
公开(公告)号：JPS59176592A
公开(公告)日：1984-10-05
申请号：JP4954983
申请日：1983-03-24
申请人： Hitachi Cable Ltd , Hitachi Ltd
发明人： YOSHIDA HIROMICHI , SASAKI SATOSHI , FUKUDA SHIGEO , KAKIZAKI KIMIO , NAKAYAMA HISASHI , OOGURO TAKAHIRO , NAKAJIMA TADAKATSU , NAKAYAMA YOSHIHIKO
IPC分类号： F28F1/08 , F28F1/12
CPC分类号： F28F13/187 , F28F1/12
摘要： PURPOSE:To provide a heat transfer wall for a heat exchanger which is surpassing in both boiling and condensing performances, by making the shape of fins provided to the heat transfer wall in a special design. CONSTITUTION:One or several stripes of channel 2 is (are) spirally provided to the outer surface of a heat transfer tube 1 at comparatively large pitches, and a number of fine tunnels 3, extending to the crossing direction with the channels 2, with their both ends being connected to the channels 2, are formed on the underside of the surfaces between these channels 2. On the other hand, a number of fine fins 4 having sharp tips 41, extending to the crossing direction with the channels 2 are formed on the surfaces between the channels 2 at small pitches. In regard to the heat transfer wall being formed in such a manner, when liquid cooling medium which is to be boiled is passed through the outer surface of each of tunnel 3, while a fluid of which temperature is comparatively high is passed through the inside of the tube, the wall acts as part of bubbles generated and grown from liquid, and the fins 4 raises ultra-large heat flux, as the outer surface area of a heat transfer wall is enlarged. In case that condensing cooling medium is circulated through the outside of a tube and cooling water is circulated through the inside of the tube, the liquid condensed by the fins 4 are sucked by the capillarity of tunnels 3 to make the liquid film on the wall surfaces of fins 4 thin, consequently, condensing action can be activated.
摘要翻译：目的：为了提供一种超过沸腾和冷凝性能的换热器的传热壁，通过将特殊设计的散热片形状设置在传热壁上。构成：通道2的一条或多条条以比较大的间距螺旋地设置在传热管1的外表面上，以及多个与通道2相交的方向延伸的细管3 两端连接到通道2上，形成在这些通道2之间的表面的下侧上。另一方面，在与通道2交叉的方向上延伸的尖锐的尖端41的多个细的散热片4形成在通道2之间的表面以小间距。关于以这种方式形成的传热壁，当要煮沸的液体冷却介质通过隧道3的外表面时，其中温度相对较高的流体通过管，壁作为从液体产生和生长的气泡的一部分，随着传热壁的外表面积增大，散热片4引起超大热通量。在冷凝冷却介质通过管的外部循环并且冷却水通过管的内部循环的情况下，由翅片4冷凝的液体被通道3的毛细管吸引，以使液膜在壁表面上的翅片4薄，因此，可以激活凝结作用。

5. 发明专利

JPS59119196A Boiling heat transfer wall 失效
标题翻译：锅炉换热器
公开(公告)号：JPS59119196A
公开(公告)日：1984-07-10
申请号：JP22936482
申请日：1982-12-27
申请人： Hitachi Cable Ltd , Hitachi Ltd
发明人： YOSHIDA HIROMICHI , SASAKI SATOSHI , FUKUDA SHIGEO , KAKIZAKI KIMIO , NAKAYAMA HISASHI , OOGURO TAKAHIRO , NAKAYAMA YOSHIHIKO
IPC分类号： F28F13/02 , F28F1/10 , F28F13/18
CPC分类号： F28F13/187
摘要： PURPOSE:To provide a heat transfer wall whose quality is stable and that is excellent in heat transfer property, by arranging, on the tips of fins of a finned surface, tapes whose width is wider than the pitch of the fins, and forming notches at the tips of the fins with a prescribed interval between them. CONSTITUTION:The tapes 4 are wound, and a plurality of tunnels 5 are formed under the tapes 4 and are separated by the fins 2. The upper parts of the tunnels 5 are in communication with each other via the notches 3 formed at the tips of the fins 2. Opening sections 6 are formed between the turns of the tapes 4 for allowing the tunnels 5 to be in communication with the outside. When a high temperature fluid is passed into the pipe 1 with the pipe 1 immersed in Fron liquid, since the tunnels 5 are communicated with the outside through the opening sections 6, the bubbles of vapour generated in the tunnels 5 would not immediately goes outside but remain there. Further since the involved heat is accumulated in the tunnels 5, and the internal temperature is raised concentrically, the bubbles of vapor are generated and grown efficiently in the tunnels 5, and the notches 3 that make the tunnels 5 in communication with each other assist the movement, association and growth of the bubbles of the vapor.
摘要翻译：目的：为了提供质量稳定且传热性优异的传热壁，通过在翅片表面的翅片的末端布置宽度大于翅片间距的带状物，并形成凹口翅片的尖端之间以规定的间隔。构成：带4被卷绕，并且多个通道5形成在带4的下方并被翅片2分开。隧道5的上部通过形成在尖端2处的凹口3彼此连通翅片2.开口部分6形成在带子4的匝之间，以允许隧道5与外部连通。当管道1浸入Fron液体中时，当高温流体进入管道1时，由于隧道5通过开口部分6与外部连通，所以在隧道5中产生的蒸汽气泡不会立即流出，但是留在那里此外，由于所涉及的热积聚在隧道5中，并且内部温度同心地升高，所以在隧道5中产生并有效地生长蒸气气泡，并且使隧道5彼此连通的凹口3有助于气泡的运动，结合和生长。

6. 发明专利

JPS59176593A Boiling type heat transfer tube and manufacture thereof 失效
标题翻译：锅炉式换热管及其制造
公开(公告)号：JPS59176593A
公开(公告)日：1984-10-05
申请号：JP4954883
申请日：1983-03-24
申请人： Hitachi Cable Ltd , Hitachi Ltd
发明人： YOSHIDA HIROMICHI , SASAKI SATOSHI , FUKUDA SHIGEO , NAKAYAMA HISASHI , OOGURO TAKAHIRO , NAKAYAMA YOSHIHIKO
IPC分类号： F28F13/02 , F28F1/12 , F28F1/42 , F28F13/18
CPC分类号： F28F13/187
摘要： PURPOSE:To contrive to increase the overall heat transferring efficiency of a boiling type heat transfer tube, by forming channels which function as openings for tunnels provided on the outer surface of a heat transfer tube, as well as to form projections in the tube by a corrugation work in order to increase the heat transferring rate. CONSTITUTION:A heat transfer tube of out of tube boiling type for a heat exchanger is manufactured by treating a corrugation work and forming spiral projections 4 on the inside wall of a heat transfer tube 1, as well as to form spiral channels 3 on the outer surface of a tube, and in addition, by forming a number of fine tunnels 7 of which both ends are opened to the vicinity of the spiral channels 3, which are formed on the outer surface between the above-mentioned channels 3. The tunnels 7 being formed in such a manner function as part of bubbles generated and grown from liquid, when a liquid medium which is to be boiled is passed through the outer side of a tube, while a liquid in comparatively high temperature, which is not accompanied with a phase change in the tube, is passed through the inside of a tube. On the other hand, the projectins 4 being formed on the inside of a tube by corrugation work act so as to increase the heat transferring rate in the tube.
摘要翻译：目的：为了提高沸腾型传热管的整体传热效率，通过形成用作设置在传热管的外表面上的隧道开口的通道，以及在管中形成突起波纹工作，以提高传热速率。构成：通过处理波纹工件并在传热管1的内壁上形成螺旋突起4并且在外部形成螺旋形通道3来制造用于热交换器的管沸腾型换热器的传热管并且另外，通过在上述通道3之间的外表面上形成有多个形成在螺旋通道3附近的两端开口的细孔7。隧道7 以这样的方式形成作为从液体产生和生长的气泡的一部分的功能，当待沸腾的液体介质通过管的外侧时，同时不伴随着液体的相对高温的液体管中的相变通过管的内部。另一方面，通过波纹工作形成在管的内部的突起4起作用，以增加管中的传热速率。

7. 发明专利

JPS59145496A Boiling type heat transfer wall and forming method thereof 失效
标题翻译：锅炉式热交换器及其形成方法
公开(公告)号：JPS59145496A
公开(公告)日：1984-08-20
申请号：JP1905683
申请日：1983-02-08
申请人： Hitachi Cable Ltd , Hitachi Ltd
发明人： YOSHIDA HIROMICHI , SASAKI SATOSHI , FUKUDA SHIGEO , KAKIZAKI KIMIO , NAKAYAMA HISASHI , OOGURO TAKAHIRO , NAKAJIMA TADAKATSU , NAKAYAMA YOSHIHIKO
IPC分类号： F28F13/02 , F28F1/10 , F28F1/12 , F28F13/18
CPC分类号： F28F13/187
摘要： PURPOSE:To obtain a heat transfer wall whose boiling heat transfer property is improved through tunnels, by forming two layers of a plurality of fine tunnels that are located under each surface between grooves with a large pitch, are extended crossing with the grooves, and are formed integrally with a heat transfer wall and whose both ends are in communication with the grooves. CONSTITUTION:A heat transfer pipe includes a heat transfer main pipe 1 having the helical grooves with a large pitch, and two rows of the plurality of fine tunnels 3, 4 are extended under each suface between the grooves 2 normally to the grooves 2 and are integrated with the main body 1. The inclinations of the rows of the tunnels 3, 4 may or may not the same to the grooves 2. The numbers of the tunnels in the rows may or may not the same. The opposite ends of the tunnels 3, 4 are open adjacent to the grooves 2, and are in communication with the outside via each of gaps 5. The inside of the pipe main body 1 may be smooth, but in this aembodiment, the parts corresponding to the grooves are projected helically. Accordingly, if the fluid in the pipe flows slowly, turbulence effect occurs, and the heat transfer efficiency in the pipe can be improved.
摘要翻译：目的：为了获得通过隧道提高沸腾传热性能的传热壁，通过形成两层位于各槽之间的大间距下方的多个细小的隧道，与槽相交，并且与传热壁一体形成，并且其两端与凹槽连通。构成：传热管包括具有大间距的螺旋槽的传热主管1，并且多个细沟3和4中的两排在槽2之间的每个表面正常延伸到槽2，并且分别是与主体1集成。隧道3,4的行的倾斜度可以与凹槽2相同或相同。行中的隧道数可以相同也可以不相同。隧道3,4的相对端部与沟槽2相邻地开口，并且经由每个间隙5与外部连通。管主体1的内部可以是平滑的，但是在该实施例中，对应的部件凹槽被螺旋地投影。因此，如果管道中的流体缓慢地流动，则发生湍流效应，并且可以提高管道中的传热效率。

8. 发明专利

JPS59145495A Boiling type heat transfer wall 失效
标题翻译：锅炉式热交换器
公开(公告)号：JPS59145495A
公开(公告)日：1984-08-20
申请号：JP1905583
申请日：1983-02-08
申请人： Hitachi Cable Ltd , Hitachi Ltd
发明人： YOSHIDA HIROMICHI , SASAKI SATOSHI , FUKUDA SHIGEO , KAKIZAKI KIMIO , NAKAYAMA HISASHI , OOGURO TAKAHIRO , NAKAYAMA YOSHIHIKO
IPC分类号： F28F13/02 , F28F1/12 , F28F13/18
CPC分类号： F28F13/187
摘要： PURPOSE:To obtain a heat transfer wall whose production is easy, quality is stable and property is excellent, by winding, on a fin tip section on a finned surface, a tape whose width is wider than the pitch of the fins and that has a plurality of grooves extending laterally in the one surface. CONSTITUTION:The surface of a pipe material 1 is cut helically to form fins 2 whose tips are sharply tapered, and the copper tape 3 having corrugations with a pitch of 0.4-1.0mm., the thickness of the tape 3 being 0.05-0.3mm. and the width of the tape 3 being 2-10mm., is wound helically on the fins with a gap of the turns of the tape being 0.2-1.5mm. and is secured partially to the pipe material 1. Thus, a plurality of tunnels 5 are formed under the tape 3, the lower parts of the tunnels 5 being defined by the fins 2 and the upper parts of the tunnels 5 being in communication with each other via the grooves 4. An open part 6 is formed between the turns of the tape 3, the open part 6 being in communication with the outside. Steam bubbles generated in the tunnels 5 would not be released immediately outside but remain there, so that steam bubbles would be produced efficiently in the tunnels 5. The open part 6 serves as a releasing section for allowing part of the steam bubbles spread in the tunnels 4 and also as an inlet of the liquid into the tunnels 5, so that boiling thereof is made active and the heat transfer efficiency can be increased.
摘要翻译：目的：为了获得容易生产的传热壁，质量稳定，性能优良，通过在翅片表面上的翅片末端部分卷绕宽度大于翅片间距的带材，并具有多个槽在一个表面中横向延伸。构成：将管材1的表面螺旋状切割，形成尖端尖锐的翅片2，铜带3的间距为0.4〜1.0mm的波纹，带3的厚度为0.05〜0.3mm 。并且带3的宽度为2-10mm，螺旋地缠绕在翅片上，带的匝间隙为0.2-1.5mm。并且部分地固定在管材1上。因此，在带3的下方形成有多个通道5，隧道5的下部由翅片2限定，并且隧道5的上部与每个另一个通过凹槽4.开口部分6形成在带3的匝之间，开放部分6与外部连通。在隧道5中产生的蒸汽气泡不会立即在外面释放，而是留在那里，从而在隧道5中有效地产生蒸汽气泡。开放部分6用作释放部分，用于允许在隧道中扩散的一部分蒸气泡并且还作为液体进入隧道5的入口，使得其沸腾被激活并且可以提高传热效率。

9. 发明专利

JPS61109627A Method for formation of evaporation heat transmission wall 失效
标题翻译：形成蒸发传热墙的方法
公开(公告)号：JPS61109627A
公开(公告)日：1986-05-28
申请号：JP22872384
申请日：1984-10-30
申请人： Hitachi Cable Ltd
发明人： NAKAYAMA YOSHIHIKO , SASAKI SATOSHI , YOSHIDA HIROMICHI , FUKUDA SHIGEO
IPC分类号： B21D53/06 , B23P15/26 , F28F1/10 , F28F13/18
CPC分类号： F28F13/18
摘要： PURPOSE:To easily obtain a heat transmission wall of high heat transmission characteristics by forming slots and fins on the surface of a heat transmission wall, making appearance of projections inside holes when the fins are transformed. CONSTITUTION:First of all, a plurality of shallow slots 7 are formed on the surface of base metal for heat transmission wall 1. Thereafter, across these shallow slots 7, and on the surface of the base metal of heat transmission wall 1, formed a plurality of fins 11 which have regular notches 12 in the tip side and projections at the slant portion or around troughs by raising up the surface cutting it through a cutting-off process like spading. Moreover, each projection 4 which projects into the direction across the hole is formed inside the hole 5 by putting down the tip of this fin 11 to a close adherence to the adjacent fin. Now, the projection 4 in the hole acts as a traffic controller in the hole 5 for the liquid passing through it, and exchanges vapor in the cavity hole with liquid outside simultaneously.
摘要翻译：目的：通过在传热壁的表面形成狭槽和翅片，轻松获得高传热特性的传热壁，当翅片变形时，使孔内的突起出现。构成：首先，在用于传热壁1的贱金属的表面上形成多个浅槽7.此后，在这些浅槽7之间，并且在传热壁1的基体金属的表面上形成在顶端侧具有规则凹口12的多个翅片11，并且通过提升通过诸如尖峰的切断处理将其切割的表面的倾斜部分或周围的波谷的突起。此外，通过将该翅片11的前端放下，使其相对于相邻的翅片紧密地附着，从而在孔5的内部形成贯穿孔的突起4的突起4。现在，孔中的凸起4用作通孔5中的流量控制器，用于通过其中的液体，并且同时在液体孔中与液体交换蒸气。

10. 发明专利

JP2001083087A IMAGE OBSERVATION APPARATUS AND METHOD 失效
公开(公告)号：JP2001083087A
公开(公告)日：2001-03-30
申请号：JP25766099
申请日：1999-09-10
申请人： HITACHI LTD , HITACHI SCIENCE SYSTEMS LTD
发明人： ORAKU HIDEAKI , NAKAYAMA YOSHIHIKO , OIKAWA TAKATOSHI , TANAKA RYUICHI
IPC分类号： H01J37/22 , G01N21/62 , G01N21/63 , G01N23/22
摘要： PROBLEM TO BE SOLVED: To reduce sample damages due to electron beams and at the same time, efficiently read a CL(cathode luminescence) image signal. SOLUTION: The wavelength dispersion of CL is made by a diffraction grating 24, and a multi-channel photomultiplier 23 is arranged on the Rowland circle of the diffraction grating for receiving CL which is subjected to wavelength dispersion A. secondary electron image by a secondary electron detector 4 is composited with a wavelength dispersed CL image, according to a detector array as the multi-channel photomultiplier 23, using an image compositing means 35.

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