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JP2003273417A (100)-oriented copper oxide high temperature superconducting thin film and method of manufacturing the same 有权
标题翻译：（100） - 氧化铜氧化物高温超导薄膜及其制造方法
公开(公告)号：JP2003273417A
公开(公告)日：2003-09-26
申请号：JP2002073126
申请日：2002-03-15
申请人： Hamamatsu Photonics Kk , Japan Science & Technology Corp , 浜松ホトニクス株式会社 , 科学技術振興事業団
发明人： TANAKA KAZUNORI , SO JUSEI , TERAJIMA TAKAHITO , SUGA HIROBUMI , TAKANO MIKIO
IPC分类号： C01G1/00 , C01G3/00 , C23C14/08 , C30B29/22 , H01L39/24
摘要： PROBLEM TO BE SOLVED: To provide a (100)-oriented copper oxide superconductor thin film having superior superconductivity in a direction perpendicular to a substrate surface, and also to provide a method of manufacturing the same.
SOLUTION: The (100)-oriented copper oxide superconductor thin film comprises a (100)-oriented LaSrAlO
4 monocrystalline substrate 3 and a (100)-oriented La
2-x Sr
x CuO
4 superconducting thin film 4 epitaxially grown on the monocrystalline substrate 3, and has a flat surface. The (100)-oriented copper oxide superconductor thin film is formed by a laser ablation method. CuO
2 faces of the (100)-oriented La
2-x Sr
x CuO
4 superconducting thin film 4 are arranged in parallel to each other in a direction perpendicular to the substrate surface, thereby increasing a superconducting coherence length in a direction perpendicular to the substrate surface, which enables the (100)-oriented copper oxide superconductor thin film to be used in a superconducting device which uses superconductivity in a direction perpendicular to the substrate surface.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供在垂直于基板表面的方向上具有优异的超导性的（100）取向的氧化铜超导体薄膜，并且还提供其制造方法。（100）取向的氧化铜超导体薄膜包括（100）取向的LaSrAlO 4 SBB单晶衬底3和（100）取向的La SB 2-x < / SB>超导薄膜4，其外延生长在单晶衬底3上，并且具有平坦表面。（100）取向氧化铜超导体薄膜是通过激光烧蚀法形成的。（100）取向的La 2 S x S x S x S x O x S 4超导薄膜4的CuO 2 面在垂直于衬底表面的方向上彼此平行地布置，从而在垂直于衬底表面的方向上增加超导相干长度，这使得（100）取向的氧化铜超导体薄膜能够用于超导在垂直于衬底表面的方向上使用超导性的器件。版权所有（C）2003，JPO

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