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1. 发明专利

JP2012242157A Device for inspecting semiconductor sample 有权
标题翻译：用于检查半导体样品的器件
公开(公告)号：JP2012242157A
公开(公告)日：2012-12-10
申请号：JP2011110329
申请日：2011-05-17
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： NAKAJIMA YUJI , IWAKI YOSHITAKE
IPC分类号： G01R31/302
摘要： PROBLEM TO BE SOLVED: To provide a device for inspecting a semiconductor sample capable of surely suppressing generation of noise due to fluctuation in a potential difference between ground of the semiconductor sample and ground of an electrical characteristics measuring means even when the fluctuation in the potential difference occurs.SOLUTION: A device IE1 for inspecting a semiconductor sample includes: a constant voltage source 9 which applies a constant voltage to the semiconductor sample S; an electrical characteristic measurement part 11 which measures electrical characteristics of the semiconductor sample S; and a reverse phase adder 33 in which a signal inputted into the electrical characteristic measurement part 11 is added to a reversed potential difference between ground of the semiconductor sample S (sample ground G1) connected to an external power supply device 41 and ground of the constant voltage source 9 (detection circuit ground G2).
摘要翻译：要解决的问题：提供一种用于检查半导体样品的装置，其能够确保抑制由于半导体样品的接地与电特性测量装置的接地之间的电位差的波动而产生的噪声，即使当波动电位差发生。解决方案：用于检查半导体样品的器件IE1包括：向半导体样品S施加恒定电压的恒压源9; 测量半导体样品S的电特性的电特性测量部11; 反相相位加法器33将输入到电特性测量部11的信号与连接到外部电源装置41的半导体样品S（取样接地G1）的接地之间的反向电位差加上恒定的接地电压源9（检测电路接地G2）。版权所有（C）2013，JPO＆INPIT

2. 发明专利

JP2012008261A Image generation apparatus 审中-公开
标题翻译：图像生成装置
公开(公告)号：JP2012008261A
公开(公告)日：2012-01-12
申请号：JP2010142882
申请日：2010-06-23
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： TERADA HIROTOSHI , IWAKI YOSHITAKE , NAKAMURA TOMONORI , TAKAHASHI TERUO
IPC分类号： G02B21/00
CPC分类号： G01B11/022 , G02B5/001 , G02B21/0016 , G02B21/002
摘要： PROBLEM TO BE SOLVED: To provide a pattern image of a sample with improved resolution with a simple device configuration.SOLUTION: The image generation apparatus 1 includes: a laser light source 3 that emits a laser beam; a laser output control unit 11 that modulates the intensity of the laser beam; a laser scanner 5 that scans a position on an object A to be measured irradiated with the laser beam; a modulation pattern control unit 15 that performs control to irradiate the object A with light beams of a plurality of spatial modulation patterns; an electric signal detector 7 that detects an electric signal generated from the object A in accordance with irradiation of the light beams of the plurality of spatial modulation patterns; an electric signal image forming unit 17 that generates a two-dimensional feature image including feature distribution information formed by associating illumination position information on the irradiation position of the light beams and feature information on the feature of the detected signal; and an image data calculation unit 19 that generates a pattern image of the object A on the basis of the feature images generated in accordance with the plurality of spatial modulation patterns.
摘要翻译：要解决的问题：以简单的设备配置提供具有改进的分辨率的样品的图案图像。解决方案：图像生成装置1包括：发射激光束的激光光源3; 激光输出控制单元11，其调制激光束的强度; 激光扫描器5，其用激光束扫描被测量物体A上的位置; 调制图案控制单元15，其执行用多个空间调制图案的光束照射对象A的控制; 电信号检测器7，其根据多个空间调制图案的光束的照射来检测从对象A产生的电信号; 电信号图像形成单元17，其生成包括通过将关于光束的照射位置的照明位置信息和关于检测信号的特征的特征信息相关联而形成的特征分布信息的二维特征图像; 以及图像数据计算单元19，其基于根据多个空间调制模式生成的特征图像来生成对象A的图案图像。版权所有（C）2012，JPO＆INPIT

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