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    • 2. 发明专利
    • SEMICONDUCTOR RESISTANCE
    • JPS58122765A
    • 1983-07-21
    • JP347082
    • 1982-01-14
    • HITACHI LTDHITACHI HARAMACHI DENSHI KOGYO
    • URUNO TOSHIOMIYAGAWA NOBUAKIIKEDA TAKAHIDE
    • H01L27/04H01L21/822H01L21/8234H01L27/06
    • PURPOSE:To form a high accuracy poly Si resistance by a method wherein, in one LSI, the value of poly Si resistance having a gate is detected and compared with the previously set value, and thus the voltage impressed on the gate is controlled. CONSTITUTION:The binary signal of the resistance value correction command is inputted into terminals 17, thus switch elements 7-10 selectively open and close, and accordingly is CR-oscillated 14 by odd-numbered stage inverters 13, a resistance element 3, and a capacitor 11. After the output wave form is arranged by an inverter 15, the logical sum 19 is obtained with clock signal 22, and accordingly the output is counted 21. On the other hand, a desired value is set 26 and compared 24 with the counted value 21 resulting in the emission of coincidence signal. When the coincidence signal does not exist within a fixed time, a control circuit 28 successively switches the switch elements 31, then divides the source voltage by a resistance array 29 and impresses it on the gate 5 through an element 31N, and accordingly successively varies the resistance value of the element 3. The reset signals are inputted 23 into a count circuit 21 at every fixed time, and thus the detecting operation 19 is repeated. The corrected resistance 3 is connected to the fixed circuit of the LSI via terminals 18.