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1. 发明专利

JPS61290397A LOW RADIOACTIVE NUCLEAR POWER PLANT 失效
公开(公告)号：JPS61290397A
公开(公告)日：1986-12-20
申请号：JP13191385
申请日：1985-06-19
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： HONDA TAKU , KASHIMURA EIJI , FURUYA YASUMASA , OHASHI TAKEYA , MINATO AKIRA , AIZAWA MOTOHIRO , OSUMI KATSUMI
IPC分类号： G21D1/00 , G21D3/00

2. 发明专利

JPS5851977A REGENERATION OF CHEMICAL DECONTAMINATING LIQUID 失效
公开(公告)号：JPS5851977A
公开(公告)日：1983-03-26
申请号：JP15062781
申请日：1981-09-25
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： FURUYA YASUMASA , HIRA YASUO , HASEGAWA TAKASHI , MINATO AKIRA , SUMIDA NOBUO , ITOU HISAO
IPC分类号： C02F1/461 , C23G1/36 , G21F9/06
摘要： PURPOSE:To remove metallic ions from chelating agent-contg. chemical decontaminating liquid, by introducing the metal oxide-contg. decontaminating liquid obtained from a decontaminating process into an electrolytic cell provided with a cathode and an anode, and applying DC between the two electrodes. CONSTITUTION:Deteriorated chemical decontaminating liquid obtained from a decontaminating process 1 is introduced into an electrolytic cell 9 provided with a cathode 4 and an anode 5, and DC is applied between the cathode 4 and the anode 5 by a DC power source 7. The chemical decontaminating liquid is regenerated by depositing metallic ions contained in it as metals on the cathode 4, withdrawn from the cathodic chamber 2 by a pump 8 and circulated for reuse in the decontaminating process. The quantity of electricity to be applied between the two electrodes in the electrolytic cell 9 is easily determined by obtaining the proper potential of the cathode from the kinds, concentrations, etc. of the metallic ions to be deposited and a chemical agent as the chemical decontaminating liquid by experimentation or calculation.

3. 发明专利

JPS59232279A REMOVING METHOD OF OXIDE ON METALLIC SURFACE 失效
公开(公告)号：JPS59232279A
公开(公告)日：1984-12-27
申请号：JP10544683
申请日：1983-06-13
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： FURUYA YASUMASA , HIRA YASUO , HASEGAWA TAKASHI , MINATO AKIRA , SHIYOUJI SABUROU , SUMIDA NOBUO
IPC分类号： C23G1/24 , C25F1/00 , C25F1/04
摘要： PURPOSE:To accelerate the dissolving and removing reaction of the oxide on a metallic surface in the stage of dissolving and removing the oxide with a neutral washing liquid having weak corrosiveness by incorporating hydrogen in the washing liquid and bringing the metal to be treated into electrical contact with the other specific metal. CONSTITUTION:Electric current is conducted between an anode 8 and a cathode 7 of an electrolytic cell 1 segmented by a cation exchange membrane 6 to an anode chamber 4 and a cathode chamber 5 from a DC power source 9 to electrolyze the neutral washing liquid circulated in the cell 1 to a dissolving cell 2 by a pump 3. H2 is generated by the cathode 7 and the washing liquid 10 contg. H2 is circulated to the inside of the cell 2. A metal 11 requiring dissolution and removal of the oxide on the surface is dipped in the cell 2 and at the same time a Pt, Pd, Ni, steel, stainless steel or carbon piece 12 is dipped therein and is electrically connected to the metall 11 by a lead wire 13. Electron is injected by H2 into the oxide film of the metal 11, by which only the oxide film is dissolved and removed at a high speed without corroding the base metal by the neutral washing soln. having weak corrosiveness.

4. 发明专利

JPS59170300A Removing method of surface metallic oxide 失效
标题翻译：表面金属氧化物的去除方法
公开(公告)号：JPS59170300A
公开(公告)日：1984-09-26
申请号：JP4567583
申请日：1983-03-18
申请人： Hitachi Eng Co Ltd , Hitachi Ltd , Tokyo Genshiryoku Sangyo Kenkyusho
发明人： FURUYA YASUMASA , HIRA YASUO , HASEGAWA TAKASHI , MINATO AKIRA , SAWA TOSHIO , USUI HARUO , SUMIDA NOBUO
IPC分类号： G21F9/28 , C25F1/04 , G21F9/00
摘要： PURPOSE: To remove surface metallic oxide from a material to be washed without dissolving said material by bringing a washing liquid of which the reducing power is strengthened by an electrolytic reduction into contact with said material, and impressing a DC voltage on the material as cathode thereby causing cathode polarization.
CONSTITUTION: A material to be washed (piping) 1 from which the metallic oxide on the inside surface is to be removed is connected via a connecting pipe 4 to electrolytic cells 2, 3. An anode 7 and a cathode 8 are disposed via an ion exchange membrane 9 to the cell 2 and a washing liquid 6 contg. a complexing agent or reducing agent is circulated by a pump 5, then electric current is conducted to the anode 7 and the cathode 8 from a DC power source 10 to reduce electrolytically the liquid 6 and to increase the reducing power thereof. On the other hand, only the anode 11 is provided via an ion exchange member 12 in the cell 3 and electric current is conducted from a DC power source 13 to the material 1 as cathode so that the material 1 is brought into cathode polarization. The dissolution of the metallic oxide on the inside surface of the material 1 is thus accelerated by the approximately neutral washing liquid having weak corrosiveness.
COPYRIGHT: (C)1984,JPO&Japio
摘要翻译：目的：为了通过将电解还原作用使还原能力强化的洗涤液与所述材料接触而将所述材料中的表面金属氧化物除去而不溶解所述材料，并将作为阴极的直流电压施加在材料上引起阴极极化。构成：要从其中去除内表面上的金属氧化物的要洗涤的材料（管道）1经由连接管4连接到电解池2,3，阳极7和阴极8经由离子交换膜9到电池2和洗涤液6，络合剂或还原剂通过泵5循环，然后从直流电源10向阳极7和阴极8传导电流，以电解电解液体6并增加其还原能力。另一方面，仅通过电池单元3中的离子交换构件12设置阳极11，并且从直流电源13将电流作为阴极传导到材料1，使得材料1成为阴极极化。金属氧化物在材料1的内表面的溶解因此被具有弱腐蚀性的近似中性的洗涤液加速。

5. 发明专利

JPH0335385B2 失效
公开(公告)号：JPH0335385B2
公开(公告)日：1991-05-28
申请号：JP25175986
申请日：1986-10-24
申请人： HITACHI LTD
发明人： HONDA TAKU , MINATO AKIRA , IZUMITANI MASAKYO , KASHIMURA EIJI , OOSUMI KATSUMI
IPC分类号： G21D1/00 , C23F14/00 , C23F15/00 , F28F19/00 , G21D3/00

6. 发明专利

JPH0130553B2 失效
公开(公告)号：JPH0130553B2
公开(公告)日：1989-06-20
申请号：JP8513780
申请日：1980-06-25
申请人： HITACHI LTD
发明人： SUZUKI MAMORU , SUZUKI KATSUMI , ITO KAZUTOSHI , MINATO AKIRA , KANBAYASHI TAKESHI , HOSHINO YOSHUKI
IPC分类号： C02F1/48

7. 发明专利

JPS6348944B2 失效
公开(公告)号：JPS6348944B2
公开(公告)日：1988-10-03
申请号：JP10586579
申请日：1979-08-22
申请人： HITACHI LTD
发明人： ITO MASAHIKO , MIDORIKAWA HEIHACHIRO , MINATO AKIRA , KUBO MITSURU
IPC分类号： C23C2/02

8. 发明专利

JPS63313B2 失效
公开(公告)号：JPS63313B2
公开(公告)日：1988-01-06
申请号：JP4267082
申请日：1982-03-19
申请人： HITACHI LTD
发明人： ITO KAZUTOSHI , SUZUKI KATSUMI , SUZUKI MAMORU , MINATO AKIRA , UKAJI HIDEO
IPC分类号： B65D90/22 , C23F13/00 , G21D1/00

9. 发明专利

JPS6250531B2 失效
公开(公告)号：JPS6250531B2
公开(公告)日：1987-10-26
申请号：JP14253684
申请日：1984-07-09
申请人： HITACHI LTD
发明人： SASADA YASUHIRO , MINATO AKIRA
IPC分类号： C21D9/50

10. 发明专利

JPS62123737A DICING EQUIPMENT 失效
公开(公告)号：JPS62123737A
公开(公告)日：1987-06-05
申请号：JP26245585
申请日：1985-11-25
申请人： HITACHI LTD , HITACHI TOKYO ELECTRONICS
发明人： MIMATA TSUTOMU , KAWANOBE TORU , MINATO AKIRA
IPC分类号： B24B55/02 , B28D5/00 , H01L21/301 , H01L21/304 , H01L21/78
摘要： PURPOSE:To effectively prevent the charge of a high-pressure water flow by using pure water itself for cooling a blade and required concentration carbonic acid water for washing. CONSTITUTION:Pure water is supplied from the same water tank 19 to both the nozzle 12 for cooling a blade 11 and the high-pressure injection nozzle 13 for washing. The pure water is directly supplied to the nozzle 12 for cooling from the water tank 19. On the other hand, the pure water from the water tank 19 is introduced in a mixing tank 20 where carbon dioxide is introduced from a cylinder 21 and is mixed with the pure water and required concentration carbonic acid water is made for the high-pressure injection nozzle. By pressurizing the carbonic acid water with a pump 22, a so called high-pressure jet water flow can be injected on a wafer 16 from the nozzle 13. In this way, charging due to the friction of the washing water with the nozzle or with air, etc. can sufficiently be prevented.

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