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1. 发明专利

JP2000348370A EXPOSURE SYSTEM FOR MASTER DISK 失效
公开(公告)号：JP2000348370A
公开(公告)日：2000-12-15
申请号：JP15741899
申请日：1999-06-04
申请人： HITACHI LTD , HITACHI MAXELL
发明人： KIMURA NOBUO , YANAGI MASASHI , SUMIYA MASANORI , YAMANE TOMOYUKI , ITO SHO
IPC分类号： G11B7/09 , B23K26/06 , B23K26/073 , G11B7/125 , G11B7/126 , G11B7/135 , G11B7/1392 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To prevent the misalignment of focuses of a recording laser and a focusing laser by mounting a lens to give an incident angle on an elevating bed which is mounted on a mobile table moving in the radial direction with respect to the master disk plane, which moves in the direction perpendicular to the master disk plane and which holds a recording lens. SOLUTION: An optical system for focusing is mounted on a elevating bed 14. The laser light of a focusing laser 9 passes through a collimator lens 17, polarizing beam splitter 10 and λ/4 plate 11, then enters a convex lens 19 to generate a specified incident angle, is mixed with the recording laser light on a dichroic mirror 22, and enters a recording lens 7 fixed on the bed 14. The laser light of a recording laser 2 passes through the optical system on a fixed table 21 and enters the recording lens. Even when the thickness of the master disk 15 slightly changes and the recording lens 7 is vertically moved by vertically moving the elevating bed 14, the focusing laser 9 also vertically moves linked with the aforementioned movement so that the distance between the recording lens 7 and the focusing laser 9 is always controlled to be constant.

2. 发明专利

JPH10237692A SURFACE TREATMENT OF VACUUM CHAMBER MEMBER MADE OF ALUMINUM OR ALUMINUM ALLOY 失效
公开(公告)号：JPH10237692A
公开(公告)日：1998-09-08
申请号：JP4517697
申请日：1997-02-28
申请人： HITACHI LTD
发明人： YAMANE TOMOYUKI , YANO EIJI , OGAWA KEITARO , KAWAHARA HIRONORI , YAMAMOTO HIDEYUKI
IPC分类号： C25D11/08 , C23C14/24 , C23C16/44 , C25D11/04
摘要： PROBLEM TO BE SOLVED: To provide a surface treatment method for vacuum chamber members made of Al or Al alloy which is used for a dry etching system, CVD system, PVD system, etc., and is capable of executing vacuum chamber evacuation at a high speed in the chamber up to an arbitrary pressure. SOLUTION: At the time of subjecting the surfaces of the vacuum chamber members made of the Al or Al alloy to an anodic oxidation treatment, barrier type films are formed by using a soln. contg. boric acid. The soln. contg. other elements in the treating liquid may be used at the time of the anodic oxidation treatment. The anodic oxidation voltage may be kept constant in the arbitrary section of the entire stage or may be changed continuously or discontinuously. The control may be executed at an arbitrary temp. for an arbitrary time as well even for the treatment liquid temp. and time.

3. 发明专利

JPH084737A FASTENING PART HAVING FASTENING CONFIRMING DISPLAY 失效
公开(公告)号：JPH084737A
公开(公告)日：1996-01-09
申请号：JP13688994
申请日：1994-06-20
申请人： HITACHI LTD
发明人： YAMANE TOMOYUKI , SATO TETSUO
IPC分类号： F16B31/02
摘要： PURPOSE:To provide a highly reliable fastening part having a fastening confirming display by which a fastened condition of the fastening part can be reliably confirmed particularly in assembling work and forgetfulness of fastening of the fastening part and a human error can be reliably prevented. CONSTITUTION:Capsule paint 3 is applied to the whole head part surface of a hexagonal bolt 1, including a contact surface 2 with a fastening tool of the hexagonal bolt 1 and a contact surface of a part to be fastened, and when a transparent vinyl coating is arranged on the surface, since the capsule paint 3 contains a capsule 3a containing paint having a color different from it, it is fastened by a spanner, and when it reaches surface pressure not less than a constant value, the capsule 3a breaks, and inside paint appears, and marking is performed.

4. 发明专利

JP2002251796A ORIGINAL DISK EXPOSING METHOD AND ITS DEVICE 失效
公开(公告)号：JP2002251796A
公开(公告)日：2002-09-06
申请号：JP2001052452
申请日：2001-02-27
申请人： HITACHI LTD
发明人： YAMANE TOMOYUKI , KIMURA NOBUO , YANAGI MASASHI , IMUDA YOSHIO , NAKAMOTO HIDEKAZU
IPC分类号： G03F7/20 , G11B7/0045 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To provide an original disk exposing method and its device to make target optimal optical disk, magnetic optical disk or magnetic disk possible to be manufactured without inspection of post-processes. SOLUTION: The original disk exposing method forms an exposure trace by irradiating and exposing a photosensitive agent formed on an original disk with a laser light for exposure through an objective lens and is characterized by detecting accuracy of the exposure trace based on difference of reflectance of the exposure trace by irradiating the exposure trace with a laser light for inspection and adjusting power or dose of the laser light for exposure based on the detected accuracy of the exposure trace.

5. 发明专利

JP2001014764A TURNTABLE 失效
公开(公告)号：JP2001014764A
公开(公告)日：2001-01-19
申请号：JP18477799
申请日：1999-06-30
申请人： HITACHI LTD
发明人： YAMANE TOMOYUKI , KIMURA NOBUO , YANAGI MASASHI , SUMIYA MASANORI
IPC分类号： G11B17/028 , G11B7/26 , G11B19/20 , G11B25/04
摘要： PROBLEM TO BE SOLVED: To perform various processing operations for a master disk with one device by adsorbing in vacume and desorbing the master disk on a turntable irrespective of the size/shape of the master disk. SOLUTION: A turntable head 2 includes a groove 7 for evacuation and gas purging and a hole 1 independently provided for each radius of a circumference, evacuation and gas purging are controlled independently for each groove 7, the holes 1 are collected inside a turntable, and a shaft is provided to close the holes independently. Depending on the size or shape of a master disk, the hole 1 is closed by the shaft or opened. Thus, vacuum adsorption/desorption is controlled for each size or shape of the master disk, flexibility for the master disk is increased, and various processing operations are carried out for the master disk with one device.

6. 发明专利

JP2001014740A MASTER PLATE EXPOSURE DEVICE AND ITS METHOD 失效
公开(公告)号：JP2001014740A
公开(公告)日：2001-01-19
申请号：JP18477899
申请日：1999-06-30
申请人： HITACHI LTD
发明人： YAMANE TOMOYUKI , KIMURA NOBUO , YANAGI MASASHI , SUMIYA MASANORI
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To raise the cleanliness of a required part to a desired level by setting the inside of the container, which encloses a master plate and a prescribed transporting path or the exposure device itself, at the external pressure or below. SOLUTION: With the purpose of setting the pressure lower than the external pressure in the area enclosed with a wall 10, an evacuation valve 13 is opened, operating a rotary pump 15 for evacuation, running a turbo-molecular pump 16, and adjusting the pressure with a pressure regulating valve 14. After the reduction in the pressure to an arbitrary level, master plate exposure is performed; with the completion of the exposure, the evacuation valve 13 and the pressure regulating valve 14 are closed; and then, a gas purging valve 18 in a gas source 19 is opened, purging the gas into a vacuum container. After the pressure is equalized to the external pressure level, the master plate is taken out. As a result, the area enclosed with the wall 10 in the periphery including the master plate 6 is evacuated and put under the low pressure; hence, the generation and entry of foreign matters as dust are suppressed, bringing an area with little foreign matters and enhancing the cleanliness.

7. 发明专利

JP2001014739A MASTER PLATE EXPOSURE DEVICE 失效
公开(公告)号：JP2001014739A
公开(公告)日：2001-01-19
申请号：JP18477699
申请日：1999-06-30
申请人： HITACHI LTD
发明人： YANAGI MASASHI , KIMURA NOBUO , SUMIYA MASANORI , YAMANE TOMOYUKI
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To prevent sticking of dust due to manual operation by locally cleaning only the part that deals with a master plate inside the device and using a hermetically sealing type cassette case for the master plate when it is moved inside a clean room. SOLUTION: A master plate 11 is transported from a master plate cassette 12 to a turntable 7 by means of a master plate transporting robot 9. In this case, the opening/closing part of the device enclosure 5 is open, but the container of the master plate cassette case 13 is hermetically sealed, leaving no openings as a whole, with cleanliness maintained by the down flow of air of No.2 cleanliness level. The master plate 11 after exposure is transported from the turntable 7 to the cassette 12 by the robot 9 and, after the completion of the transportation, is returned to the cassette case 13 by a cassette case opening/closing mechanism 8; the cassette case 13 is closed linked with its opening/closing part 14 and the opening/closing part 15 of the device enclosure 5, and is again put to the hermetically sealed state.

8. 发明专利

JP2002092975A DEVICE AND METHOD FOR EXPOSING MASTER DISK 失效
公开(公告)号：JP2002092975A
公开(公告)日：2002-03-29
申请号：JP2000276671
申请日：2000-09-12
申请人： HITACHI LTD
发明人： YAMANE TOMOYUKI , KIMURA NOBUO , YANAGI MASASHI , NAKAMOTO HIDEKAZU , IMUDA YOSHIO
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To solve such a problem that the temperature in conventional device for exposing master disk is influenced by the temperature of a room in which the device for exposing master disk is disposed because the conventional device has no temperature controlling mechanism, therefore, characteristics of a laser for exposure, respective optical holders, respective optical elements and respective controlling instruments, etc., are varied by the temperature change and the proper exposure processing is made unable. SOLUTION: This device and method for exposing original plate has a mechanism which controls the temperature of the laser for exposure, the respective optical holders, the respective optical elements and the respective controlling instruments, etc., or the whole of device for exposing master disk. The temperature controlling is performed by purging the temperature-controlled gas, by the temperature controlling means, and, therein, single gas such as N2 and argon or mixed gas containing one or more of the single gases is used as the purged gas. Otherwise, the temperature controlling means is preferably such a type one that the temperature controlling is performed by flowing the temperature-controlled liquid to respective places to be temperature- controlled. In such a manner, failure due to temperature variation is removed and making the effect possible the proper exposure processing is obtained.

9. 发明专利

JP2002092974A DEVICE AND METHOD FOR EXPOSING MASTER DISK 失效
公开(公告)号：JP2002092974A
公开(公告)日：2002-03-29
申请号：JP2000276670
申请日：2000-09-12
申请人： HITACHI LTD
发明人： YAMANE TOMOYUKI , KIMURA NOBUO , YANAGI MASASHI , NAKAMOTO HIDEKAZU , IMUDA YOSHIO
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To solve the problem that exposure has to be performed by a master disk exposure device in which an exposing laser having an effective wavelength for a disk to be produced and optical equipment effective for the laser wavelength are arranged when an optical disk, a magneto-optical disk or a magnetic disk which has different properties is manufactured. SOLUTION: The exposing laser having different wavelengths, and an objective lens, an automatic focusing mechanism and other optical equipment which are related to the laser are mounted on a single device, and the manner of using the exposing laser, and the objective lens, the automatic focusing mechanism and the other optical equipment related to the laser which are effective to the optical disk, the magneto-optical disk or the magnetic disk to be manufactured is changed.

10. 发明专利

JP2001195790A DEVICE AND METHOD FOR MASTER DISK EXPOSURE 失效
公开(公告)号：JP2001195790A
公开(公告)日：2001-07-19
申请号：JP2000000736
申请日：2000-01-06
申请人： HITACHI LTD , HITACHI MAXELL
发明人： SUMIYA MASANORI , YANAGI MASASHI , YAMANE TOMOYUKI , KIMURA NOBUO , SUGIYAMA TOSHINORI
IPC分类号： G11B7/26 , G03F7/20
摘要： PROBLEM TO BE SOLVED: To solve the problem that normal exposure is made impossible due to the damage of a dielectric film, caused by ozone generated by the ozonization of oxygen in the air remaining in a narrow space such as a gap part on a surface, on which the dielectric film of a cubic air gap type beam splitter, for example, is arranged, with laser beam for recording. SOLUTION: Oxygen is the air of a raw material for ozone, which is one of the causes of the damage, is expelled from the upper side of the dielectric film by blowing a rare gas to the narrow space such as the gap part 210 on the surface, where the dielectric films 203, 205 of the cubic air gap type beam splitter 200 are arranged, to expel the remaining air. Thereby the damage of the dielectric film is reduced to enable high precision exposure.

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