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    • 4. 发明专利
    • CHIP RECOGNITION USING TRANSPARENT CHIP TRAY
    • JPS61187342A
    • 1986-08-21
    • JP2627885
    • 1985-02-15
    • HITACHI LTD
    • OKUDA KENICHISHIRATO TAKESHINEMOTO SHIGERUWATANABE AKITOMO
    • H01L21/673H01L21/00H01L21/67H01L21/68
    • PURPOSE:To contrive to shorten the time to mount semiconductor chips on a transparent tray in the normal direction by a method wherein the chips are housed in the pockets of the tray and the images of the chips are directly taken in from the lower direction of the tray. CONSTITUTION:When the images of semiconductor chips 11 are taken in, the pockets 12, wherein the semiconductor chips 11 are housed, of a transparent chip tray 10 are fed one by one by controlling the X-Y stand. At this time, the center of the point of an attracting head 5 is made to coincide with the center of each pocket 12, the chips only having images turning to a direction different from the normal direction among the images of the chips 11, which are taken in from the lower direction of the tray 10, are mounted on the tray 10 in the normal direction by making the head 5 revolve to the direction of theta deg., and at the same time, the correction of the positions of the chips 11 is performed. The images of the chips are directly taken in by an image pickup camera 20 from the lower direction of the tray 10. The tray 10 is made of transparent resin having a volume resistivity of 1X10 -1X10 , the pockets 12 are arrayed on the tray 10 in a lattice type, the wall thickness of the tray is uniformly formed to eliminate the tray's own lens action, and moreover, the tray is formed in a double bottom to prevent the bottom surface thereof from being damaged. According to this way, the chips can be recognized in a state intact being housed in the pockets of the tray and the time to mount the chips on the tray in the normal direction can be shortened.