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    • 3. 发明专利
    • CALORIMETER
    • JPS5647774A
    • 1981-04-30
    • JP12380179
    • 1979-09-28
    • HITACHI LTD
    • ISOBE SHIYOUJI
    • G01T3/00G01T3/04H05H1/22
    • PURPOSE:To permit the whole heat-receiving surface of the calorimeter to uniformly receive heat even if the spreading of an ion beam varies by allowing the opening amount of the heat-receiving plates to be controllable. CONSTITUTION:The calorimeter 30 comprises two heat-receiving plates 20 having heat-receiving surfaces which open gradually as extending towards the top ends. The base end of each heat-receiving plate 20 is attached to a pivoting shaft 21, and threaded fixing members 26 are attached to the top end side to screw both ends of a threaded driving shaft 25. Thus, when a driving motor 22 rotates a worm 23, the driving shaft 25 rotates through a worm-gear 24, and each heat-receiving plate 20 pivots about the pivoting shaft 21, so that the opening amount is controlled at will. Consequently, controlling the speed of the driving motor 22 following the voltage applied to an accelerating electrode 39 permits an optimum opening amount of the heat-receiving plates 20 to be constantly obtained in response to the variation of the intensity and spreading of an ion beam resulting from the variation of the applied voltage.
    • 7. 发明专利
    • LEADDOUT ELECTRODE STRUCTURE OF ION SOURCE
    • JPS55122342A
    • 1980-09-20
    • JP2989179
    • 1979-03-16
    • HITACHI LTD
    • ISOBE SHIYOUJI
    • H01J37/08H01J27/02H05H1/22
    • PURPOSE:To enable easy adjustment of the curvature radius of an electrode surface with the adjusting member of the notched section by supporting a conical electrode with the bottom electrode surface into which ion pass holes are perforated using a support member on which the notched section is provided along with the conical diameter direction. CONSTITUTION:The acceleration electrode 9 for accelerating and converging generated ions, deceleration electrode 10, and the ground electrode 11 are arranged in parallel at oreset intervals concerning the center (converging point) of the common curvature radius. The notched sections 23, 24, and 25 are individually formed at the collected joint between each end of the electrodes 9, 10 and 11 and the respective electrode support sections 12, 13 and 14 and the adjusting screws 26-31 are provided at these notched sections. The joint is elastically changed by turning the screws and the radius of the electrodes is adjusted. This enables the electrode curvature to be externally and simply matched after the assembly of the electrode structure.