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1. 发明专利

JPS6481243A INSPECTION DEVICE 失效
公开(公告)号：JPS6481243A
公开(公告)日：1989-03-27
申请号：JP23716187
申请日：1987-09-24
申请人： HITACHI LTD
发明人： HIDA KENJI , AKIBA YUTAKA
IPC分类号： H01L21/66 , G01R1/073 , G01R31/26 , G01R31/28
摘要： PURPOSE:To enable characteristic impedance of signal path connected to be maintained stably by connecting an external lead wire whose one edge is connected to one part of probe supporting member which supports a plurality of probes and whose other edge is connected to a tester with a probe through a coaxial cable. CONSTITUTION:Operation characteristics of semiconductor elements can be judged by supplying operating power to the semiconductor elements formed on an object to be inspected 3 such as a semiconductor wafer from an external tester through a power line 10, a power line 14, a probe 6, and an input/output terminal 3a and by applying an operation signal of specified waveform and frequency through a plurality of signal lines 8, coaxial cables 12, and probes 6. Since the probes 6 are connected to the signal lines 8 which are connected to a probe supporting member 4 with a large pitch and plural input/output terminals 3a which were formed on an object to be inspected 3 with a fine pitch by fine coaxial cables 12 with uniform characteristic impedance which are provided within the probe supporting member 4. Thus, a transmission path of operation signal with improved frequency characteristics can be constituted at a low cost.

2. 发明专利

JPS63208237A DEVICE OF MEASURING SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPS63208237A
公开(公告)日：1988-08-29
申请号：JP4027987
申请日：1987-02-25
申请人： HITACHI LTD
发明人： HIDA KENJI , OTSUKA KANJI , TAKAGI RYUICHI , KASUKABE SUSUMU
IPC分类号： H01L21/66 , G01R1/073 , G01R31/26
摘要： PURPOSE:To improve the contacting property of a probe and a bump electrode and to improve the reliability of probe inspection, by providing the probe so as to penetrate through a supporting substrate, which supports the probe, providing an elastic material between the probe and the supporting substrate, and absorbing the dispersion in heights of the probe and the bump electrode. CONSTITUTION:Probes 2 are provided so as to penetrate a supporting substrate comprising an insulating material such as ceramics and glass. An elastic material 3 comprising neoprene rubber, silicone rubber, urethane rubber and the like is provided in a hole, in which each probe 2 is provided. Thus the probes 2 are attached to the supporting substrate 1 with elasticity. When the probes 2 are contacted with bump electrodes 7A and 7B, the elastic materials 3 are deformed in the vertical direction, and pressure applied on the bump electrodes 7A and 7B is buffered. Dispersion in heights of the bump electrodes 7A and 7B or dispersion in lengths of parts of the probes 2, which are protruding out of the supporting substrate 1, can be absorbed by the movement of the probes. At this time, a flexible substrate 5 is deformed, and the movement of the probes 2 is not suppressed. Thus the reliability of the probe inspection can be enhanced.

3. 发明专利

JPS6317784A DETECTOR FOR DOOR OPEN-ZONE OF ELEVATOR 失效
公开(公告)号：JPS6317784A
公开(公告)日：1988-01-25
申请号：JP16185286
申请日：1986-07-11
申请人： HITACHI LTD
发明人： HIDA KENJI , YAHIRO SEINOSUKE , MITSUI NOBUO , SAKATA KAZUHIRO
IPC分类号： B66B1/50 , B66B1/48 , B66B13/14

4. 发明专利

JPS62218382A STEP SAFETY DEVICE FOR ELEVATOR 失效
公开(公告)号：JPS62218382A
公开(公告)日：1987-09-25
申请号：JP5919286
申请日：1986-03-19
申请人： HITACHI LTD
发明人： HIDA KENJI , YAHIRO SEINOSUKE , MITSUI TSUNEO
IPC分类号： B66B5/06 , B66B1/48 , B66B1/50 , B66B5/00 , H02P3/06

5. 发明专利

JPS62150621A POSITION DETECTOR OF ELEVATOR 失效
公开(公告)号：JPS62150621A
公开(公告)日：1987-07-04
申请号：JP29062285
申请日：1985-12-25
申请人： HITACHI LTD
发明人： HIDA KENJI , YAHIRO SEINOSUKE , MITSUI NOBUO
IPC分类号： B66B1/50 , B66B1/48 , H01H36/00

6. 发明专利

JPS6231681A METHOD OF INSPECTING TAIL CORD FOR ELEVATOR 失效
公开(公告)号：JPS6231681A
公开(公告)日：1987-02-10
申请号：JP17105985
申请日：1985-08-05
申请人： HITACHI LTD
发明人： YAHIRO SEINOSUKE , KOMATSU TSUTOMU , HIDA KENJI
IPC分类号： B66B5/00 , B66B3/00

7. 发明专利

JPS5822281A DETECTOR FOR POSITION OF ELEVATOR 失效
公开(公告)号：JPS5822281A
公开(公告)日：1983-02-09
申请号：JP11768881
申请日：1981-07-29
申请人： HITACHI LTD
发明人： HIDA KENJI , YAHIRO SEINOSUKE , YUMINAKA TAKEO
IPC分类号： B66B1/52 , B66B3/02

8. 发明专利

JPS5738281A Detector for trouble of elevator 失效
标题翻译：电梯故障检测器
公开(公告)号：JPS5738281A
公开(公告)日：1982-03-02
申请号：JP11348380
申请日：1980-08-20
申请人： Hitachi Ltd
发明人： HIDA KENJI , KATAOKA HIROYUKI
IPC分类号： H02P29/00 , B66B3/00 , B66B5/00 , B66B5/02

9. 发明专利

JPH09208169A HAND RAIL FOR PASSENGER CONVEYOR 失效
公开(公告)号：JPH09208169A
公开(公告)日：1997-08-12
申请号：JP1734596
申请日：1996-02-02
申请人： HITACHI LTD
发明人： SAITO CHUICHI , HIDA KENJI , TAKAHASHI TATSUHIKO
IPC分类号： B66B23/24
摘要： PROBLEM TO BE SOLVED: To suppress deterioration of the surface of a hand rail, in which an antibacterial agent is mixed and kneaded, even in the hand rail using a clamping driving system by constructed at least both side circumference parts in the outer circumference part of a synthetic rubber body in which an antibacterial agent is mixed and knead. SOLUTION: A hand rail, which is formed into a shape provided with a C-shaped cross section, is formed into an integrated composite body in which an outer circumference 2A is covered by means of a synthetic rubber body 2a while a fabric body 2b is arranged in the inside and in an inner circumference part 2B. An outer circumference flat part 2Aa is formed of a conventional synthetic rubber composition or of a rubber material in which a small quantity of antibacterial agent is mixed, while in a synthetic rubber 2Ab, an antibacterial agent 2C is mixed and kneaded in a quantity sufficient to kill Escherichia coli and the like. For the antibacterial agent 2C, a metal group one such as a silver single substance, a copper single substance, and varied kinds of metal oxides, an organic silicon group one, a phenylamide group one, an animal group one, and a phenol group one are available. As to the antibacterial agent 2C mixed in the synthetic rubber body 2a in the outer circumference flat part 2Aa, its mixing ratio is decided on the basis of a degree of an antibacterial action to both side circumference part 2Ab.

10. 发明专利

JPH02152131A POSITION DETECTOR 失效
公开(公告)号：JPH02152131A
公开(公告)日：1990-06-12
申请号：JP30412688
申请日：1988-12-02
申请人： HITACHI LTD
发明人： HIDA KENJI , YAHIRO SEINOSUKE , KURAHARA YUKIAKI
IPC分类号： B66B1/46 , B66B3/02 , H01H36/00
摘要： PURPOSE:To ensure the ideal contact position of a reed switch to the magnetic circuit of an auxiliary magnet, by unifying the reed switch with the auxiliary magnet via a simple connecting member, and always keeping both a size required for opposing the reed switch and the auxiliary magnet to each other and a size for engaging them with each other at their relevant constant levels. CONSTITUTION:A connecting member 7 is formed out of an elastic body made of a non-magnetic material having a hole for securing and guiding a reed switch 2 and also having a hole for securing and guiding an auxiliary magnet 3, both of which are preset to make the mutual unified securing of the reed switch 2 and the auxiliary magnet 3. A notch guide groove is formed in part of the hole of this connecting member 7 for securing and guiding the reed switch 2, while an I-shaped projection is formed ON part of the glass tube surface of the reed switch 2 along the longitudinal direction of the tube surface and then it is engaged into the notch guide groove of the connecting member 7 so that the resultant assembly is unifiedly received and arranged in an accommodation case 1.

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