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1. 发明专利

JPS5619635A MANUFACTURING APPARATUS 失效
公开(公告)号：JPS5619635A
公开(公告)日：1981-02-24
申请号：JP9500479
申请日：1979-07-27
申请人： HITACHI LTD
发明人： NAGATOMO HIROTO , MAEJIMA HIROSHI , SUZUKI JIYUN , FUJIKAWA YOSHIYUKI
IPC分类号： B65G49/07 , H01L21/00 , H01L21/02 , H01L21/67 , H01L21/677 , H01L21/68
摘要： PURPOSE:To eliminate the pollution of a manufacturing apparatus and to improve the yield of the apparatus by executing all product management, process control, and treatment and conveyance control with a computer, organically controlling the respective control sections and smoothly automating the flow of works. CONSTITUTION:The treating types and the lots of works 39 are confirmed (product management) in an automatic storage machine 28 by a central control device 29, to examine the surplus, mechanism of the works in the respective sections 15, 17... 27 and to determine the priority sequency of the products. Vacant treatment units are detected, a work conveying machine 43 is driven according to the priority sequency to prepare the conveyance, the complete lots are detected in parallel, and the works are contained in a vacant container 28. After inspecting all treating units, the advancement of the works are always estimated to treat, convey and transfer the works. A central control device (computer) executes the work management, product control, treating condition control, information collection, and sequence control to automatically process all the works in an air conditioned and dust free chamber 31 to prevent contamination of wafers. This configuration can process the works of high quality in high efficiency.

2. 发明专利

JPS61123151A Production apparatus 失效
标题翻译：生产设备
公开(公告)号：JPS61123151A
公开(公告)日：1986-06-11
申请号：JP23512385
申请日：1985-10-23
申请人： Hitachi Ltd
发明人： NAGATOMO HIROTO , MAEJIMA HIROSHI , SUZUKI JUN , FUJIKAWA YOSHIYUKI
IPC分类号： B65G43/00 , B65G49/07 , H01L21/00 , H01L21/67 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67769 , H01L21/67724 , H01L21/67727 , H01L21/67736
摘要： PURPOSE:To shorten processes for products, to improve yield and to reduce the number of operators by forming a plurality of housing sections, disposing a stocker delivering materials to be treated between the stocker and a conveyor while being faced to a carrying path and controlling each treater, the conveyor, a shifter and the stocker by a controller. CONSTITUTION:A conveyor holding and carrying a plurality of works is arranged onto a carrying path, and controlled by a central controller and moved on the carrying path. The conveyor has wheels 36 in the lower section of a pedestal 35, and is controlled and shifted by radio. A work receiving arm 38 is mounted on the side from a machine body 37 on the pedestal 35, and works 39 carried out of a stocker 28 are placed on the arm 38 and the arm 38 supports the works. The stocker 28 consists of shelves 42 with a plurality of housing sections 41 housing works 39 and a transfer machine 43, which can freely be elevated or lowered and moved right and left, and the transfer machine 43 supplies the conveyor with works 39 by a command from the central controller or houses works in empty housing sections 41 in shelves 42.
摘要翻译：目的：缩短产品流程，通过形成多个壳体部分来提高产量并减少操作员的数量，在储存器和输送机之间设置一个储存器，该储存器在存放器和传送带之间传送待处理的材料，同时控制每个处理机，输送机，变速器和储料机。构成：将承载多个工件的传送带布置在承载路径上，由中央控制器控制并在承载路径上移动。输送机在基座35的下部具有轮36，并且被无线电控制和移位。工件接收臂38安装在基座35上的机体37的一侧，并且由储盘器28执行的工件39放置在臂38上，并且臂38支撑工件。储存器28由具有容纳工件39的多个壳体部分41和可以自由地升高或降低并左右移动的传送机43的搁架42组成，并且传送机43通过命令向输送机提供工件39 从中央控制器或在货架42中的空舱部分41中进行工作。

3. 发明专利

JPS61123150A Production apparatus 失效
标题翻译：生产设备
公开(公告)号：JPS61123150A
公开(公告)日：1986-06-11
申请号：JP23512285
申请日：1985-10-23
申请人： Hitachi Ltd
发明人： NAGATOMO HIROTO , MAEJIMA HIROSHI , SUZUKI JUN , FUJIKAWA YOSHIYUKI
IPC分类号： B65G43/00 , B65G49/07 , H01L21/00 , H01L21/67 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67769 , H01L21/67724 , H01L21/67727 , H01L21/67736
摘要： PURPOSE:To shorten processes for products, to improve yield and to reduce the number of operators by mounting a controller controlling each treater, a conveyor and a shifter and a central controller, organically controlling a series of work of processings and controlling the products of a multikind and a large number of works. CONSTITUTION:A plurality of treaters, such as a CVD treating section 15, a diffusion treating section 17, a photosensitive treating section 19, an etching treating section 12, and an ion implanting treating section 23 on one side of a carrying path 12 and an evaporating treating section 25, an inspecting treating section 27 and an automated stocker 28 on the other side are disposed severally on both sides of the carrying path 12, and a central controller 29 mounted to the back of the stocker 28 conducts process control and product control and even the sequence control group control of respective treater. Small-sized controllers are also incorporated into each treater, a conveyor, the stocker, etc., and several work, such as memorization, calculation, control, etc. may be shared among the small-sized controllers and the central controller 29.
摘要翻译：目的：缩短产品流程，通过安装控制每个处理器的控制器，输送机和变速器以及中央控制器来提高产量和减少操作员的数量，有机地控制一系列处理工作和控制产品的工作多种作品和大量作品。构成：在承载路径12的一侧上的多个处理剂，例如CVD处理部15，扩散处理部17，感光处理部19，蚀刻处理部12和离子注入处理部23，以及蒸发处理部25，另一侧的检查处理部27和自动储存器28分别布置在承载路径12的两侧，并且安装到储料器28的后部的中央控制器29进行过程控制和产品控制甚至是各个处理器的序列控制组控制。小型控制器也被并入每个处理器，输送机，储料机等中，并且可以在小型控制器和中央控制器29之间共享若干工作，诸如记忆，计算，控制等。

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