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    • 1. 发明专利
    • SIZE MEASURING INSTRUMENT
    • JPH01121704A
    • 1989-05-15
    • JP27926987
    • 1987-11-06
    • HITACHI ELECTRONICSHITACHI LTD
    • NISHIDA TAKEHIKOSHIMAZAKI KENICHIIMAI KEIJIKOBAYASHI MAMORU
    • G01B11/00
    • PURPOSE:To measure plural positions of a body even in a complicate shape with nearly continuous light by performing time-division control over respective detection parts and limiting light irradiation of only a detection part where there is no interference at any point of time during measurement. CONSTITUTION:A measuring instrument main body is equipped with a time- division switch which distributes a light irradiation and measurement indication signal 8 to respective measuring instruments on a time-division basis. Then the body 2 to be measured is mounted on an X-Y stage and moves right and left, or forward and backward. Measuring instrument detection parts 2, 3, and 4 measure the distance between the body surface and detection part. Here, when the body 1 to be measured shifts in a relative position with the detection parts 2, 3, and 4, the distances between the plane part of the object body 1 and detection parts 2, 3, and 4 are measured, so the height is found. The body 1 is moved forth and back while the measuring instrument detection parts 2, 3, and 4 are in operation so as to shorten the measurement time. During this measurement, the measurement indication signal 8 is switched by the time- division switch 9 to put one of the detection parts 2, 3, and 4 in operation at all times, so mutual light mixture is eliminated.
    • 2. 发明专利
    • SIZE MEASURING INSTRUMENT
    • JPH01121706A
    • 1989-05-15
    • JP27926887
    • 1987-11-06
    • HITACHI ELECTRONICSHITACHI LTD
    • NISHIDA TAKEHIKOSHIMAZAKI KENICHIIMAI KEIJIKOBAYASHI MAMORU
    • G01B11/24G01B11/02
    • PURPOSE:To preclude mismeasurement by regarding a maximum height value as the height at a measurement point in a period wherein a photodetection quantity exceeds a preset value when a measurement is taken while a single or plural points to be measured are scanned. CONSTITUTION:A specular curved surface 1 as a body to be measured is mounted on an X-Y stage which is not shown in a figure normally. Then the specular curved surface 1 moves in an X or Y direction to shift in relative position with a detection part 3, and while a beam 2 for measurement scans on the specular curved surface 1 in order, the height is measured according to a height measurement command signal 9. Namely, when the detection part 3 and body 1 to be measured shift in relative position, the beam 2 for measurement is projected on the surface of a substrate 11, the distance between the detection part 3 and substrate 1 is measured, and the height of the specular curved surface as the body to be measured is measured. Then only when the quantity of light incident on the detection part 3 decreases above a constant level, a controller 6 operates a switch 8 to obtain a height measured value 7.
    • 7. 发明专利
    • GRAPHIC DATA CONTROL SYSTEM
    • JPH02178696A
    • 1990-07-11
    • JP33404588
    • 1988-12-28
    • HITACHI LTDHITACHI PROCESS COMPUTER ENG
    • YUNO KAZUHARUNISHIDA TAKEHIKOISHIKAWA KAZUHISAAKATSU MASAMITSU
    • G09G5/36
    • PURPOSE:To shorten the saving and restoring processing time of attribute information and to improve the display processing performance for graphic data by saving and restoring only attribute information which is updated actually in graphic display attribute information which is provided for each graphic definition as an individual unit of graphic data. CONSTITUTION:When graphic data having hierarchic structure wherein while a display instruction group consisting of display instruction statements is executed, another display instruction group is called and executed is displayed, only graphic display attribute information to be updated is saved in a standby area 8 at the time of calling the called display instruction group and updating original graphic display attribute information. Then when the execution of the called display instruction group is completed and execution control returns to the calling origin display instruction group, graphic display attribute information on only the part updated by a saving the restoring processing control part 4 is taken out and the state of a display execution part 2 is restored to a state right before the calling origin display instruction group calls another display instruction group. Consequently, the amount of data of saved graphic display attribute information is reduced, the capacity of the standby area is decreased, and the saving the restoring processing time is shortened.