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1. 发明专利

JP2013088375A Electromagnetic wave imaging apparatus 有权
标题翻译：电磁波成像装置
公开(公告)号：JP2013088375A
公开(公告)日：2013-05-13
申请号：JP2011231430
申请日：2011-10-21
申请人： Fujitsu Ltd , 富士通株式会社
发明人： INOTANI NOBUHIKO , MARUYAMA KAZUNORI , HASEGAWA SHINYA
IPC分类号： G01N21/35 , G01N21/3586
摘要： PROBLEM TO BE SOLVED: To solve such a problem that it is difficult to extend time width in which a time waveform of a detecting electromagnetic wave can be observed.SOLUTION: A detecting electromagnetic wave and a probe wave are made incident on an electro-optic crystal by inclining a pulse surface of the pulse-like probe wave from a wave surface of the detecting electromagnetic wave. A beam cross-section of the probe wave is divided into a plurality of main scanning unit areas aligned in an intersection line direction between the wave surface of the detecting electromagnetic wave and the pulse surface of the probe wave. Arrival time of the pulse surface of the probe wave at the electro-optic crystal is made different in each main scanning unit area. A delay device changes the delay time of one of the probe wave and the detecting electromagnetic wave from the other. A plurality of waveforms of the detecting electromagnetic wave are acquired by making the delay time different by the delay device and waveform correction information is found out based on deviations in the time axis directions of the plurality of acquired waveforms. A corrected waveform is found out by correcting waveform data obtained by measuring an object to be measured on the basis of the waveform correction information.
摘要翻译：要解决的问题为了解决难以延长可以观察到检测电磁波的时间波形的时间宽度的问题。解决方案：通过从检测电磁波的波面倾斜脉冲状探测波的脉冲表面，使检测电磁波和探测波入射到电光晶体上。探测波的光束横截面被分成在检测电磁波的波面与探测波的脉冲表面之间的交线方向上排列的多个主扫描单位区域。在每个主扫描单位区域中，在电光晶体处的探测波的脉冲表面的到达时间不同。延迟装置将探针波和检测电磁波之一的延迟时间从另一个改变。通过使延迟装置不同的延迟时间来获取检测电磁波的多个波形，并且基于多个获取的波形的时间轴方向上的偏差，找出波形校正信息。通过根据波形校正信息校正通过测量被测量物体获得的波形数据，找出校正波形。版权所有（C）2013，JPO＆INPIT

2. 发明专利

JP2011202972A Imaging apparatus 审中-公开
标题翻译：成像设备
公开(公告)号：JP2011202972A
公开(公告)日：2011-10-13
申请号：JP2010067835
申请日：2010-03-24
申请人： Fujitsu Ltd , 富士通株式会社
发明人： MARUYAMA KAZUNORI , HASEGAWA SHINYA , MIYAMOTO AKINORI , INOTANI NOBUHIKO
IPC分类号： G01N21/35 , G01N21/3586 , G01N22/00
CPC分类号： G02B21/14 , G02B21/0004
摘要： PROBLEM TO BE SOLVED: To achieve an imaging apparatus, capable of acquiring both of the amplitude data and phase data of an object to be measured in a short time, and capable of being constructed at low cost.SOLUTION: The imaging apparatus includes an electromagnetic wave light source 1, an electromagnetic wave branch 2 for branching the continuous electromagnetic wave 10 from the electromagnetic wave light source into a first electromagnetic wave beam 10A and a second electromagnetic wave beam 10B, a probe light source 5, a probe light branching part 6 for branching the continuous probe light 11 from the probe light source into a first probe light beam 11A and a second probe light beam 11B, a first electrooptical crystal 3 irradiated with the first electromagnetic wave beam through the object to be measured 9 and receiving the incidence of the first probe light beam, a second electrooptical crystal 4 on which the second electromagnetic wave beam and the second probe light beam are incident, an interference part 7 for allowing the first probe light beam from the first electrooptical crystal and the second probe light beam from the second electrooptical crystal to interfere with each other and an imaging apparatus 8 for taking the interference image from the interference part.
摘要翻译：要解决的问题：为了实现能够在短时间内获取要测量的对象的振幅数据和相位数据两者并且能够以低成本构造的成像装置。解决方案：成像装置包括电磁波长光源1，用于将连续电磁波10从电磁波光源分支到第一电磁波束10A和第二电磁波束10B的电磁波分支2，探测光源5，探测光分支部分6 用于将连续探测光11从探测光源分支到第一探测光束11A和第二探测光束11B中，第一电光晶体3通过被测量物体9照射第一电磁波束并接收入射光的第一探针光束，第二电光晶体4，第二电磁波束和第二探测光束在其上用于允许来自第一电光晶体的第一探测光束和来自第二电光晶体的第二探测光束彼此干涉的干涉部分7和用于从干涉部分拍摄干涉图像的成像装置8。

3. 发明专利

JP2010203989A Magnetism observation microscope and method of observing magnetic domain 审中-公开
标题翻译：磁场观测显微镜及观察磁畴的方法
公开(公告)号：JP2010203989A
公开(公告)日：2010-09-16
申请号：JP2009051547
申请日：2009-03-05
申请人： Fujitsu Ltd , 富士通株式会社
发明人： MARUYAMA KAZUNORI , WAKANA SHINICHI
IPC分类号： G01N21/21
摘要： PROBLEM TO BE SOLVED: To provide a magnetic domain observation microscope efficiently and visibly observing the direction of the magnetization vector of a magnetic domain formed in a magnetic material.
SOLUTION: The magnetic domain observation microscope 1 includes an XY stage 3 and a rotary stage 4 for placing an observation target W having a magnetic domain and an optical system 10 is arranged at an upper portion of the observation target W. The optical system 10 is configured to emit light of linearly polarized light, and includes an image capturing apparatus for taking in light to be generated when linearly polarized light is reflected by the observation target W. Furthermore, the magnetic domain observation microscope 1 includes, as a control system 12, a CPU 31, and a gray scale magnetic domain image generation section 33 for generating a gray scale magnetic domain image, and a color magnetic domain image generation section 34 for generating a color magnetic domain image from the gray scale magnetic domain image.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供磁畴观察显微镜有效且可视地观察形成在磁性材料中的磁畴的磁化矢量的方向。解决方案：磁畴观察显微镜1包括XY台3和用于放置具有磁畴的观察目标W的旋转台4，并且光学系统10布置在观察目标W的上部。光学系统10被配置为发射线偏振光，并且包括用于当线偏振光被观察目标W反射时产生的光的图像捕获装置。此外，磁畴观察显微镜1包括作为控制系统12，CPU 31，以及用于产生灰度磁畴图像的灰度磁畴图像生成部33，以及用于从灰度级磁畴图像生成彩色磁畴图像的彩色磁畴图像生成部34。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2008096129A Apparatus for measuring potential gradient, and electronic device process evaluating apparatus 审中-公开
标题翻译：用于测量潜在梯度的装置和电子装置过程评估装置
公开(公告)号：JP2008096129A
公开(公告)日：2008-04-24
申请号：JP2006274599
申请日：2006-10-06
申请人： Fujitsu Ltd , 富士通株式会社
发明人： OSHIMA YOSHITAKA , ENDO YASUHIRO , MARUYAMA KAZUNORI , WAKANA SHINICHI
IPC分类号： G01R29/12 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To improve reliability in evaluating the electric charge of electronic device processes, by setting the threshold of potential gradient, in consideration of the electrostatic resistance of devices themselves and their scale in a potential gradient measuring apparatus and an electronic device process evaluating apparatus.
SOLUTION: The apparatus for measuring potential gradient is provided with a potential measuring means 2 for measuring the potential of a plurality of locations in an object to be measured 1; a potential distribution detection means for determining a potential distribution, on the basis of detection signals of the potential measuring means 2; and a potential gradient computing means 4 for computing potential gradient, on the basis of detection signals of the potential measuring means 2.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提高电子设备处理的电荷的评估的可靠性，通过设置电位梯度的阈值，考虑到装置本身的静电电阻及其在电位梯度测量装置和电子装置中的尺度装置过程评估装置。解决方案：用于测量电位梯度的装置设置有用于测量被测量物体1中的多个位置的电位的电位测量装置2; 电位分布检测装置，用于根据电位测量装置2的检测信号确定电位分布; 以及用于根据电位测量装置2的检测信号计算电位梯度的电位梯度计算装置4.（C）2008，JPO＆INPIT

5. 发明专利

JP2008053451A Overcurrent detection element 有权
标题翻译：过流检测元件
公开(公告)号：JP2008053451A
公开(公告)日：2008-03-06
申请号：JP2006228056
申请日：2006-08-24
申请人： Fujitsu Ltd , 富士通株式会社
发明人： MARUYAMA KAZUNORI , ENDO YASUHIRO , OSHIMA YOSHITAKA , WAKANA SHINICHI
IPC分类号： H01L21/66 , G01R19/00 , G01R29/24
摘要： PROBLEM TO BE SOLVED: To provide a technology for highly sensitively detecting an overcurrent in a micoscopic spatial position for highly sensitively detecting and evaluating an occurrence of an electrostatic amount, in a step for manufacturing an electronic device, especially in the step of manufacturing a magnetic disc head element or the like.
SOLUTION: The overcurrent detecting element comprising electrode pads on both ends; an electric wiring part for connecting the electrode pads; and a temperature sensitive pellet on the surface of the electric wiring on a board having at least insulating surface measures an appearance shape of the temperature-sensitive pellet, after the current passes through the electric wiring to detect an amount of the current passing through the electric wiring part on the basis of a change in shape of the temperature-sensitive pellet.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种高灵敏度地检测用于高灵敏度地检测和评估静电量的发生的微透视空间位置中的过电流的技术，特别是在用于制造电子装置的步骤中，特别是在制造磁盘头元件等。
解决方案：过电流检测元件包括两端的电极焊盘; 用于连接电极焊盘的电线部分; 并且在电流通过电线之后，具有至少绝缘面的板上的电布线的表面上的温度敏感性颗粒测量感温片的外观形状，以检测通过电气的电流量基于温敏丸的形状变化的布线部分。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2015011007A イメージング装置有权
标题翻译：成像设备
公开(公告)号：JP2015011007A
公开(公告)日：2015-01-19
申请号：JP2013138770
申请日：2013-07-02
申请人：富士通株式会社 , Fujitsu Ltd
发明人： INOTANI NOBUHIKO , MARUYAMA KAZUNORI , SAKAI SATORU , HOKARI MAMORU , ABE TAKAYUKI , OKADA HIDEO , NISHIYAMA YOJI
IPC分类号： G01N21/3586
摘要：【課題】イメージング装置においてテラヘルツ波の時間波形を簡単に取得すること。【解決手段】プローブ光L1が通る複数本の光ファイバ21と、電気光学結晶26と、複数の光ファイバ21に対応する画素37を備えた撮像装置28と、テラヘルツ波THを発生するテラヘルツ波発生部30と、観察対象Fを通ったテラヘルツ波THを電気光学結晶26に導く光学系25、32と、画素37の出力値からテラヘルツ波THの時間波形40を取得する演算部35とを有し、複数本の光ファイバ21は複数の組20aに分けられ、一つの組20a内における複数の光ファイバ21の各々は長さが異なり、演算部35が、一つの組20aに属する複数本の光ファイバ21の長さの順に、光ファイバ21に対応する画素37の出力値を並べることにより、テラヘルツ波THの時間波形40を取得するイメージング装置による。【選択図】図2
摘要翻译：要解决的问题：通过成像装置容易地获取太赫兹波的时间波形。解决方案：一种成像装置包括：多个光纤21，探针光通过该光纤21; 电光晶体26; 成像装置28，其包括与多根光纤21对应的像素37; 产生太赫兹波TH的太赫兹波发生器30; 光学系统25和32引导通过观察目标F的太赫兹波TH到电光晶体26; 以及算术单元35，从像素37的输出值获取太赫兹波TH的时间波形40.光纤21被分成多个组20a，一组20a中的光纤21的长度不同，算术单元35按照属于一组20a的光纤21的长度的顺序对准来自与光纤21相对应的像素37的输出值，从而获取太赫兹波TH的时间波形40。

7. 发明专利

JP2012122981A Electromagnetic wave imaging apparatus 有权
标题翻译：电磁波成像装置
公开(公告)号：JP2012122981A
公开(公告)日：2012-06-28
申请号：JP2011028349
申请日：2011-02-14
申请人： Fujitsu Ltd , 富士通株式会社
发明人： INOTANI NOBUHIKO , MARUYAMA KAZUNORI , HASEGAWA SHINYA
IPC分类号： G01N21/35 , G01N21/3586
CPC分类号： H04N5/30 , G01N21/3581 , G01S7/4811 , G01S17/89 , G02F1/03 , G02F2203/13
摘要： PROBLEM TO BE SOLVED: To provide a technology for simultaneously performing imaging of a plurality of parts in a direction perpendicular to a linear area in an object for measurement.SOLUTION: A first optical system irradiates an object for measurement with a pulse-like electromagnetic wave for detection, and makes the transmitted or reflected electromagnetic wave for detection incident on electro-optical crystal. A second optical system irradiates the electro-optical crystal with a probe wave by inclining a pulse surface of the probe wave to the pulse surface of the electromagnetic wave for detection. The probe wave which has transmitted through the electro-optical crystal is detected with a camera. The first optical system or the second optical system includes a compensation optical member for dividing a beam cross section of the electromagnetic wave for detection or the probe wave into a plurality of unit areas, and mutually differentiating light path length of beams passing through the unit areas in a virtual plane perpendicular to the pulse surface of the electromagnetic wave for detection and the pulse surface of the probe wave. The compensation optical member compensates phase shift between the pulse surface of the electromagnetic wave for detection and the pulse surface of the probe wave at a plurality of parts in the intersection direction between the surface of the electro-optical crystal and the virtual plane.
摘要翻译：要解决的问题：提供一种用于在与测量对象中的线性区域垂直的方向上同时执行多个部分的成像的技术。解决方案：第一光学系统用用于检测的脉冲状电磁波照射测量对象，并将用于检测的透射或反射电磁波入射到电光晶体上。第二光学系统通过将探测波的脉冲表面倾斜到电磁波的脉冲表面来探测电光晶体，以进行探测。用摄像机检测透过电光晶体的探测波。第一光学系统或第二光学系统包括用于将用于检测的电磁波的波束截面或探测波分割成多个单位区域的补偿光学构件，并且相互区分通过单位面积的光束的光路长度在垂直于电磁波的脉冲表面的虚拟平面中进行检测和探测波的脉冲表面。补偿光学部件补偿用于检测的电磁波的脉冲表面与电光晶体的表面与虚拟平面之间的交叉方向上的多个部分处的探测波的脉冲表面之间的相移。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2012058073A Terahertz wave measuring apparatus and terahertz wave measuring method 审中-公开
标题翻译： TERAHERTZ波测量装置和TERAHERTZ波测量方法
公开(公告)号：JP2012058073A
公开(公告)日：2012-03-22
申请号：JP2010201496
申请日：2010-09-09
申请人： Fujitsu Ltd , 富士通株式会社
发明人： MARUYAMA KAZUNORI , HASEGAWA SHINYA , INOTANI NOBUHIKO
IPC分类号： G01N21/35 , G01N21/3563 , G01N21/3586
摘要： PROBLEM TO BE SOLVED: To provide a terahertz wave measuring apparatus and a terahertz wave measuring method for measuring the physical property by using terahertz waves.SOLUTION: The terahertz wave measuring apparatus includes: a beam splitter for splitting a pulse laser into pump light and probe light; a terahertz wave generator for generating a terahertz wave by incidence of the pump light; a pulse train generation part for generating a plurality of pulses from the incident probe light; and a terahertz wave measurement part for making the pulse train incident to the terahertz wave detector and measuring a temporal change of an electric field of the terahertz wave incident to the terahertz detector on the basis of the plurality of the pulses.
摘要翻译：要解决的问题：提供一种使用太赫兹波测量物理特性的太赫兹波测量装置和太赫兹波测量方法。解决方案：太赫兹波测量装置包括：分束器，用于将脉冲激光分为泵浦光和探测光; 太赫兹波发生器，用于通过泵浦光的入射产生太赫兹波; 脉冲串生成部，用于从所述入射探测光产生多个脉冲; 以及用于使脉冲串入射到太赫兹波检测器并且基于多个脉冲测量入射到太赫兹检测器的太赫波的电场的时间变化的太赫兹波测量部分。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2011169876A Time delay unit and terahertz time domain spectral apparatus using the same 审中-公开
标题翻译：时间延迟单元和TERAHERTZ使用时间域频谱设备
公开(公告)号：JP2011169876A
公开(公告)日：2011-09-01
申请号：JP2010036694
申请日：2010-02-22
申请人： Fujitsu Ltd , 富士通株式会社
发明人： INOTANI NOBUHIKO , MARUYAMA KAZUNORI , MIYAMOTO AKINORI , HASEGAWA SHINYA
IPC分类号： G01J3/45 , G01N21/35 , G01N21/3563 , G01N21/3586
摘要： PROBLEM TO BE SOLVED: To provide a time delay mechanism for varying an optical path length using a plurality of lenses arranged on an optical axis in a terahertz time domain spectral apparatus. SOLUTION: The time delay unit in the terahertz time domain spectral apparatus includes the plurality of lenses arranged so that an incident surface may be vertical to the optical axis with the optical axis of laser light as the center, a mirror provided so that incident laser light from one of lenses can be reflected and the reflected light can be emitted by one of other lenses, and a means for varying an optical path length by moving the incident position of laser light to a lens. COPYRIGHT: (C)2011,JPO&INPIT

10. 发明专利

JP2008288303A Electrostatic charge estimating element 有权
标题翻译：静电电荷估算元件
公开(公告)号：JP2008288303A
公开(公告)日：2008-11-27
申请号：JP2007130284
申请日：2007-05-16
申请人： Fujitsu Ltd , 富士通株式会社
发明人： MARUYAMA KAZUNORI , ENDO YASUHIRO , OSHIMA YOSHITAKA , WAKANA SHINICHI
IPC分类号： H01L21/66 , G01R29/24
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic charge estimating element which can estimate the amount of electrostatic charge of a workpiece in a manufacturing apparatus quantitatively at high spacial resolution, and can be reused.
SOLUTION: An electrostatic charge estimating unit quantitatively estimating the total amount of electrostatic charges accumulated on the surface of a workpiece board includes a basic substance 1 having conductivity at least on its surface, an electrooptical effect film 5 disposed on the basic substance 1, an isolated transparent electrode 6 disposed on the electrooptical effect film 5, and an insulating protective film 7 covering an area that is not projectively overlapping the electrooptical effect film 5 of the basic substance 1.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以以高空间分辨率定量地估计制造装置中的工件的静电电荷量的静电电荷估计元件，并且可以重复使用。解决方案：定量估计在工件板表面积累的静电电荷的总量的静电电荷估计单元包括至少在其表面上具有导电性的碱性物质1，设置在碱性物质1上的电光效应膜5 ，设置在电光效应膜5上的隔离透明电极6和覆盖不与碱性物质1的电光效应膜5重叠的区域的绝缘保护膜7.版权所有（C）2009，JPO＆INPIT

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