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JP2007157169A Flow control system of cooling water supply device in semiconductor manufacturing device 审中-公开
标题翻译：半导体制造装置中冷却水供应装置的流量控制系统
公开(公告)号：JP2007157169A
公开(公告)日：2007-06-21
申请号：JP2007004811
申请日：2007-01-12
申请人： Fujikoshi Mach Corp , 不二越機械工業株式会社
发明人： NAKAMURA YOSHIO , HASEGAWA TAKESHI , SEKI TOSHIAKI , OGAWA MITSUE
IPC分类号： G05D7/06 , H01L21/02
摘要： PROBLEM TO BE SOLVED: To provide a flow control system capable of automatically adjusting flow rate.
SOLUTION: This system comprises a branch conduit for supplying cooling water to each semiconductor manufacturing device 51-53; a branch pipe flow control valve; a semiconductor manufacturing device operation part for inputting a setting condition of flow rate of cooling water; a branch pipe flow sensor; a semiconductor manufacturing device instruction processing part including a flow control comparator outputting a signal related to control of the branch pipe flow control valve; an automatic input means 50 automatically inputting a setting condition that is the total sum of supply quantity of cooling water to each semiconductor device; an operation part 32 receiving the setting condition input by the automatic input means 50; a flow control valve 34 provided in a common conduit 16; a flow sensor 26 for detecting the flow rate of cooling water within the common conduit 16; and an instruction processing part 40 including a flow control comparator 36 for comparing a set signal inputted from the operation part 32 with a detection signal by the flow sensor 26 and outputting a signal related to control of the flow control valve 34.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够自动调节流量的流量控制系统。解决方案：该系统包括用于向每个半导体制造装置51-53供应冷却水的分支导管; 分支管流量控制阀; 半导体制造装置操作部，其输入冷却水的流量的设定条件; 支管流量传感器; 半导体制造装置指令处理部，其包括：流量控制比较器，输出与分支管流量控制阀的控制有关的信号; 自动输入装置50自动输入作为每个半导体装置的冷却水供给量的总和的设定条件; 接收由自动输入装置50输入的设定条件的操作部32; 设置在公共管道16中的流量控制阀34; 用于检测公共管道16内的冷却水的流量的流量传感器26; 以及指令处理部40，其包括用于将从操作部32输入的设定信号与流量传感器26的检测信号进行比较的流量控制比较器36，并输出与流量控制阀34的控制有关的信号。（C）2007，JPO＆INPIT

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