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    • 2. 发明专利
    • Manufacturing method of minute pattern forming body
    • 分形图形体的制造方法
    • JP2007103409A
    • 2007-04-19
    • JP2005287498
    • 2005-09-30
    • Dainippon Printing Co LtdFujitsu Ltd大日本印刷株式会社富士通株式会社
    • SASAKI HIRONORIMIYAZAKI SUSUMUHIKICHI TATSUGOSHIMIZU MOCHIHIROMIKI SHUICHIOGAWA TAKAYOSHISATO YOSHIHIROKUSHIDA YASUYUKI
    • H01L21/027B05D1/40B05D3/10G03F7/30G03F7/40
    • PROBLEM TO BE SOLVED: To provide a manufacturing method of a minute pattern forming body, with which occurrence of minute defects can be reduced. SOLUTION: The manufacturing method of the minute pattern forming body has a resist layer forming process for applying photosensitive resist on a substrate and forming a resist layer, an exposure process for exposing the resist layer, a developing process for developing the resist layer after the exposure process with developer and a rinse process for rinsing the resist layer after the developing process with rinse liquid. The substrate is horizontally rotated around a perpendicular axis at the time of the rinse process, and rinse liquid is discharged to the resist layer after the developing process in a belt shape by a slit nozzle. Flow velocity of rinse liquid discharged from a discharge opening of the slit nozzle is within a range of 0.65×10 4 to 3×10 4 cm/min. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种微小图案形成体的制造方法,能够减少微小缺陷的发生。 解决方案:微型图案形成体的制造方法具有用于在基板上施加光敏抗蚀剂并形成抗蚀剂层的抗蚀剂层形成工艺,用于曝光抗蚀剂层的曝光工艺,用于显影抗蚀剂层的显影工艺 在用显影剂曝光过程之后,以及用漂洗液冲洗显影过程后的抗蚀剂层的漂洗工艺。 在冲洗过程中,基板在垂直轴线处水平旋转,并且在通过狭缝喷嘴形成带状的显影处理之后,冲洗液体被排出到抗蚀剂层。 从狭缝喷嘴的排出口排出的冲洗液的流速在0.65×10 4 〜3×10 4 cm / min的范围内。 版权所有(C)2007,JPO&INPIT
    • 8. 发明专利
    • Magnetic head driving actuator
    • 空值
    • JPS5736471A
    • 1982-02-27
    • JP10881680
    • 1980-08-09
    • Fujitsu Ltd
    • SATO YOSHIHIRO
    • H02K33/18G11B5/54G11B21/02
    • G11B5/54
    • PURPOSE:To increase the positioning accuracy of a magnetic head, by attaching a ferromagnetic material bar on a bobbin and thus suppressing the vibration of a carriage system. CONSTITUTION:A plural number of ferromagnric material bars 30 are attached equidistantly around the main body of a bobbin 5. Thus the magnetic force of a single direction is applied to each bar 30 to attract the bar 30 toward three magnets provided around the magnetic field in the gap of a voice coil motor magnetic circuit or toward a center yoke 2. This is equivalent to the fact that a reinforcing member is provided around the main body of the bobbin 5 to stretch the bobbin toward the outer or inner side. As a result, the circular vibration toward the radius of the bobbin 5 is suppressed significantly.
    • 目的:为了提高磁头的定位精度,通过将铁磁材料棒安装在线轴上,从而抑制滑架系统的振动。 构成:将多个铁磁材料棒30等距地安装在线轴5的主体周围。因此,单个方向的磁力被施加到每个杆30,以将杆30吸引到设置在磁场周围的三个磁体 音圈电机磁路的间隙或中心磁轭2.这相当于在绕线管5的主体周围设置加强部件,以将线轴向外侧或内侧拉伸的事实。 结果,显着地抑制朝向线轴5的半径的圆周振动。