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1. 发明专利

JP2002063815A OXIDE SUPERCONDUCTOR AND ITS MANUFACTURING METHOD 失效
公开(公告)号：JP2002063815A
公开(公告)日：2002-02-28
申请号：JP2000246454
申请日：2000-08-15
申请人： FUJIKURA LTD , KANSAI ELECTRIC POWER CO , TOKYO ELECTRIC POWER CO , RAILWAY TECHNICAL RES INST , INT SUPERCONDUCTIVITY TECH
发明人： KAKIMOTO KAZUTOMI , IZUMI TORU , YASUHARA NATSUO , NAKAMURA YUICHI , IZUMI TERUO , SHIOBARA TORU
IPC分类号： H01B12/06 , H01B13/00 , H01L39/14 , H01L39/24
摘要： PROBLEM TO BE SOLVED: To provide an oxide superconductor, in which an oxide superconducting layer of the required composition is generated by suppressing crystallization of unwanted compounds and a high critical current is shown, even when technology is used, in which the constituent element of the oxide intermediate layer is added in the molten liquid. SOLUTION: In this method, an oxide intermediate layer 2 is formed on the base material 1, made of a high melting point metal and a solid solution layer 4 having the same structure as that of the oxide superconductor substance, containing the oxide intermediate layer constituent element is formed on the oxide intermediate layer 2. Furthermore, an oxide superconducting layer 5, having peritectic temperature lower than that of the solid solution layer having the same structure as the oxide superconductor substance is formed on the solid solution layer 4 which has the same structure as that of the oxide superconductor substance.

2. 发明专利

JP2002150854A OXIDE SUPERCONDUCTOR, AND MANUFACTURING METHOD OF THE SAME 失效
公开(公告)号：JP2002150854A
公开(公告)日：2002-05-24
申请号：JP2000341075
申请日：2000-11-08
申请人： FUJIKURA LTD , TOKYO ELECTRIC POWER CO , KANSAI ELECTRIC POWER CO , SUMITOMO ELECTRIC INDUSTRIES , RAILWAY TECHNICAL RES INST , INT SUPERCONDUCTIVITY TECH
发明人： KAKIMOTO KAZUTOMI , YASUHARA NATSUO , IZUMI TORU , HASEGAWA KATSUYA , NAKAMURA YUICHI , IZUMI TERUO , SHIOBARA TORU
IPC分类号： H01L39/24 , H01B12/06 , H01B13/00 , H01M12/06
摘要： PROBLEM TO BE SOLVED: To enable to grow a solid solution in a thermodynamically stable state, to enable to stably form the solid solution layer and the oxide superconductor layer by liquid phase epitaxy method, and to make the oxide superconductor of good quality grow with good yield. SOLUTION: An oxide middle layer 2 is formed on a base material 1 made of a metal with high melting point, and a seed film layer 3 having a structure same with the structure of the oxide superconductor which contains the element constituting the oxide middle layer, is formed on the oxide middle layer, and a solid solution layer 4 is formed by the liquid phase epitaxy method of the element constituting the oxide superconductor which contains the element constituting the oxide middle layer, on the seed film layer, and the oxide superconductor layer 5 is formed on the oxide superconductive solid solution layer.

3. 发明专利

JP2000299026A OXIDE SUPERCONDUCTOR, ITS MANUFACTURE AND BASE MATERIAL FOR OXIDE SUPERCONDUCTOR 失效
公开(公告)号：JP2000299026A
公开(公告)日：2000-10-24
申请号：JP10861099
申请日：1999-04-15
申请人： FUJIKURA LTD , TOKYO ELECTRIC POWER CO , RAILWAY TECHNICAL RES INST , SUMITOMO ELECTRIC INDUSTRIES , INT SUPERCONDUCTIVITY TECH
发明人： KAKIMOTO KAZUTOMI , YASUHARA NATSUO , IZUMI TERUO , SHIOBARA TORU , NAKAMURA YUICHI , DAIMATSU KAZUYA , FUJINO KOZO
IPC分类号： H01B12/06 , H01B13/00
摘要： PROBLEM TO BE SOLVED: To form a thick oxide superconductive layer at a large deposition rate by immersing and lifting a base material formed with two oxide intermediate layers on the surface of a high-melting point metal in a fused solution containing an oxide superconductive layer constituting element. SOLUTION: A base material 1 is a flexible tape with the thickness of 0.1-0.5 mm and made of a high-melting point metal with the melting point of 1000-2000 deg.C such as hastelloy. A first intermediate layer 2 is made of MgO or NiO, and it is hardly reacted with the base material 1 and a second intermediate layer 3 even at a high temperature of 980-1100 deg.C. The second intermediate layer 3 is made of BaZrO3, it has low reactivity with the first intermediate layer 2 and a fused solution of an oxide supercondutor, and its crystal structure is somewhat approximate to the oxide superconductor. The first intermediate layer 2 and the second intermediate layer 3 are formed at the thickness of about 1 μm by the CVD method. The master film 4 of the oxide superconductor must have has same composition as that of an oxide superconductive layer 5, and it is formed at the thickness of 0.01-1 μm by the laser deposition of Y1Ba2Cu3Oy, for example.

4. 发明专利

JP2000302596A OXIDE SUPERCONDUCTOR AND ITS PRODUCTION 失效
公开(公告)号：JP2000302596A
公开(公告)日：2000-10-31
申请号：JP10861199
申请日：1999-04-15
申请人： FUJIKURA LTD , TOKYO ELECTRIC POWER CO , RAILWAY TECHNICAL RES INST , SUMITOMO ELECTRIC INDUSTRIES , INT SUPERCONDUCTIVITY TECH
发明人： KAKIMOTO KAZUTOMI , YASUHARA NATSUO , IZUMI TERUO , SHIOBARA TORU , NAKAMURA YUICHI , DAIMATSU KAZUYA , FUJINO KOZO
IPC分类号： C30B29/22 , H01B12/06
摘要： PROBLEM TO BE SOLVED: To provide an oxide superconductor having a thick-filmy oxide superconducting layer on a base material and also to provide an oxide superconductor production process by which a thick-filmy oxide superconducting layer can be formed on a base material at a remarkably higher film forming rate as compared with that attained by a vapor phase process without causing any damage to the base material by a melt. SOLUTION: This superconductor is provided with: a base material 1 consisting of a high-melting point metal; an oxide intermediate layer 2 formed on at least one surface of the base material 1; an oxide superconductor seed film 3 formed on the intermediate layer 2; a superconducting base material layer 5 that contains at least one of constituent elements of the oxide intermediate layer 2 and is formed on the oxide superconductor seed film 3 by a liquid phase epitaxy; and a thick-filmy oxide superconducting layer 6 formed on the superconducting base material layer 5 by a liquid phase epitaxy.

5. 发明专利

JP2003096563A METHOD FOR FORMING POLYCRYSTALLINE THIN FILM AND OXIDE SUPERCONDUCTOR 审中-公开
公开(公告)号：JP2003096563A
公开(公告)日：2003-04-03
申请号：JP2001288868
申请日：2001-09-21
申请人： FUJIKURA LTD , INT SUPERCONDUCTIVITY TECH
发明人： IIJIMA YASUHIRO , KAKIMOTO KAZUTOMI
IPC分类号： C01G1/00 , C23C14/48 , C30B29/22 , H01B13/00 , H01L39/24
摘要： PROBLEM TO BE SOLVED: To provide a method for obtaining polycrystalline thin film which aligns c-axis of the crystal grain useful for the formation of oxide superconductor perpendicularly to the film forming surface of substrate, in addition, also aligns a-axis or b-axis of crystal axis of the crystal grain along the surface parallel to the film forming surface and is excellent in crystalline orientation. SOLUTION: This method forms the polycrystalline thin film of multiple oxide having a pyrochlore crystalline structure represented by composition formula of YZrO, GdZrO or EuZrO on the film forming surface of polycrystalline substrate. Therein, the temperature of the polycrystalline substrate is retained to a specified temperature of 90-300 deg.C and the thin film is formed by the ion beam assist method. In this polycrystalline thin film obtained by the method, a grain boundary oblique angle constituted by the same crystalline axis of respective crystal grains along the surface parallel to the film forming surface of the polycrystalline substrate is

6. 发明专利

JP2011060668A Manufacturing method of long oxide superconductor by laser vapor deposition method 审中-公开
标题翻译：通过激光蒸镀沉积方法制备超氧化物超导体的制备方法
公开(公告)号：JP2011060668A
公开(公告)日：2011-03-24
申请号：JP2009210877
申请日：2009-09-11
申请人： Fujikura Ltd , 株式会社フジクラ
发明人： KAKIMOTO KAZUTOMI
IPC分类号： H01B13/00 , C01G1/00 , C01G3/00 , C23C14/24 , C23C14/28 , H01B12/06
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method capable of generating uniformly a stable plume for a long lime and forming an oxide superconductor layer of a uniform film quality for a long base material.
SOLUTION: In the forming method of an oxide superconductor layer in which laser beams are converged and irradiated on a target to generate a plume and particles from the plume is deposited on a long base material of a tape shape, the long base material is wound around between rotation members inside a depressurized chamber to constitute a plurality of neighboring lanes, the target is arranged in the vicinity of the long base material lane, and by using a laser vapor depositing unit with a converging means for converging and irradiating laser beams on the target and by establishing a focus distance of the converging means to be in a range of 1.0-2.0 m and an energy density of the laser beams to be in a range of 1.0-4.0J/cm
2 , the laser beams are converged and irradiated from an oblique direction on the target and are made to scan on the target, and the plumes are generated on each of the irradiated positions of the laser beams to carry out deposition.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够均匀生成长石灰的稳定羽流并形成长基材的均匀膜质量的氧化物超导体层的制造方法。解决方案：在氧化物超导体层的形成方法中，其中激光束会聚并照射在靶上以产生羽流，并且来自羽流的颗粒沉积在长条形带状基材上，长基材围绕在减压室内的旋转部件之间缠绕以构成多个相邻车道，靶设置在长基材车道附近，并且通过使用具有用于会聚和照射激光束的会聚装置的激光气相沉积单元并且通过将会聚装置的聚焦距离设定在1.0-2.0μm的范围内，将激光束的能量密度设定在1.0-4.0J / cm 2的范围内。SP >，激光束从目标上的倾斜方向会聚并照射在目标上进行扫描，并且在激光束的每个照射位置上产生羽流以进行沉积。版权所有（C）2011，JPO＆INPIT

7. 发明专利

JP2006233247A Thin film deposition system 审中-公开
标题翻译：薄膜沉积系统
公开(公告)号：JP2006233247A
公开(公告)日：2006-09-07
申请号：JP2005046720
申请日：2005-02-23
申请人： Fujikura Ltd , 株式会社フジクラ
发明人： KAKIMOTO KAZUTOMI
IPC分类号： C23C14/28 , C23C14/08 , H01B12/06 , H01B13/00
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a production apparatus for producing a long-length oxide superconductive wire rod of high quality by preventing deterioration in superconductive properties at the time of forming a film.
SOLUTION: The thin film forming apparatus is provided with: a treatment vessel storing long-length base materials 3; at least a pair of winding member groups 5 obtained by coaxially arranging winding members for winding the long-length base materials; a target holder provided adjacently to the long-length base materials wound around these winding member groups; and a laser light emitting means of emitting laser light to a target 9 held by the target holder, and constituted so that vapor deposition particles produced by emitting laser light to the surface of the target are deposited on the surfaces of the long-length base materials wound around the winding member group and arranged in parallel in a state where a plurality of the lines are made close by circulating these winding material groups, wherein the winding member group 25 is constituted so that a plurality of winding members 24, wherein an outer circumferential edge face to be wound with the long-length base materials is flat, are coaxially arranged.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供一种通过防止在形成膜时的超导性能的劣化来制造高质量的长长度氧化物超导线材的生产设备。解决方案：薄膜形成装置设有：储存长度基材3的处理容器; 至少一对绕组构件组5，其通过同轴地布置用于缠绕长度基材的绕组构件而获得; 与围绕这些绕组构件组的长度基材相邻设置的目标支架; 以及激光发射装置，其将激光发射到由靶保持器保持的靶9，并且构成为使得通过向靶的表面发射激光而产生的气相沉积颗粒沉积在长度基材的表面上缠绕在卷绕部件组上并且通过使这些卷绕材料组循环而使多个线条靠近的状态并联布置，其中卷绕部件组25构成为多个卷绕部件24，其中外周长边基材的边缘面是平的，同轴布置。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2004362784A Oxide superconductor and its manufacturing method 审中-公开
公开(公告)号：JP2004362784A
公开(公告)日：2004-12-24
申请号：JP2003156017
申请日：2003-05-30
申请人： Fujikura Ltd , 株式会社フジクラ
发明人： SUDO YASUNORI , KAKIMOTO KAZUTOMI , IIJIMA YASUHIRO
IPC分类号： C30B29/22 , C23C14/08 , C23C14/28 , C23C14/48 , H01B12/06 , H01B13/00
CPC分类号： Y02E40/642
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconductor capable of efficiently manufacturing the oxide superconductor with excellent crystalline orientation of an oxide superconducting layer, and the oxide superconductor obtained by the same.
SOLUTION: The manufacturing method of the oxide superconductor is provided with a first process of forming a first polycrystal thin film 2 on a metal base material 1 by an ion beam assist method, a second process of forming a second polycrystal thin film 3 on the first polycrystal thin film 2 by a pulsed laser deposition method, and a third process of forming the oxide superconducting layer 4 on the second polycrystal thin film 3 by the pulsed laser deposition method. The first polycrystal thin film 2 and the second polycrystal thin film 3 are to be of almost the same composition. A film thickness of the first polycrystal thin film 2 is to be 2 μm or less.
COPYRIGHT: (C)2005,JPO&NCIPI

9. 发明专利

JP2004262695A Method and apparatus for depositing thin film 审中-公开
标题翻译：沉积薄膜的方法和装置
公开(公告)号：JP2004262695A
公开(公告)日：2004-09-24
申请号：JP2003053296
申请日：2003-02-28
申请人： Fujikura Ltd , 株式会社フジクラ
发明人： KAKIMOTO KAZUTOMI , IIJIMA YASUHIRO
IPC分类号： C30B23/08 , C23C14/08 , C23C14/28 , C30B29/22
摘要： PROBLEM TO BE SOLVED: To provide a method and an apparatus for depositing a thin film, by which a stable plume can be generated for a long period of time, and the thin film excellent in in-plane uniformity of the film thickness, especially film thickness uniformity in the width direction can be deposited, and thereby, a long size and high quality thin film can be deposited uniformly.
SOLUTION: The method for depositing the thin film comprises irradiating a target 7 which moves transversely while being rotated around a shaft 5 for rotating a holder with laser light 8 so as to evaporate superconductive oxide particles of the target 7 and forming the thin film by depositing the particles on a substrate. The method is characterized by inclining the surface 7a of the target 7 with respect to the shaft 5 for rotating the holder by using a spacer 44 and irradiating the target 7 with the laser light 8 while transversely moving the inclined target 7 being rotated around the center axis of the shaft 5 for rotating the holder.
COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于沉积薄膜的方法和设备，通过该方法和设备可以长期地产生稳定的羽流，并且薄膜的面内均匀性优异的薄膜特别是能够沉积宽度方向的膜厚均匀性，能够均匀地沉积长尺寸，高品质的薄膜。解决方案：用于沉积薄膜的方法包括照射横向移动的靶7，同时围绕轴5旋转，以便用激光8旋转保持器，以便蒸发靶7的超导氧化物颗粒并形成薄的通过将颗粒沉积在基底上。该方法的特征在于，通过使用间隔件44使目标7的表面7a相对于轴5倾斜以旋转保持器，并且在激光8照射目标7的同时横向移动围绕中心旋转的倾斜目标7 轴5的轴线旋转支架。版权所有（C）2004，JPO＆NCIPI

10. 发明专利

JPH07326233A OXIDE SUPERCONDUCTOR AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH07326233A
公开(公告)日：1995-12-12
申请号：JP11934894
申请日：1994-05-31
申请人： FUJIKURA LTD
发明人： KAKIMOTO KAZUTOMI , NAKAGAWA MIKIO , SADAKATA NOBUYUKI , SAITO TAKASHI , KONO TSUKASA
IPC分类号： C01G1/00 , C01G3/00 , C01G15/00 , H01B12/02 , H01L39/02
摘要： PURPOSE:To provide an oxide superconductor and a method for manufacturing the same capable of preventing deterioration of superconductivity by realizing the structure capable of preventing diffusion of constituent elements of the oxide superconductor. CONSTITUTION:An oxide superconductor 11 is covered with a metal sheath 12, outside of which an insulating material 14 is disposed via an intermediate material 13 made of polycrystalline substance. A crystal grain diameter of the intermediate material 13 is larger than that of the metal sheath 12. Consequently, the intermediate material having a crystal grain diameter larger than that of the metal sheath is inserted between the metal sheath and the insulative material, followed by a heat treatment, thus restraining element diffusion from the oxide superconductor.

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