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    • 2. 发明专利
    • Aligner
    • 定位仪
    • JP2005189714A
    • 2005-07-14
    • JP2003433935
    • 2003-12-26
    • Fuji Photo Film Co Ltd富士写真フイルム株式会社
    • UEMURA TAKAYUKINAKATANI DAISUKESUMI KATSUTO
    • G03F7/20
    • PROBLEM TO BE SOLVED: To simultaneously expose an image with high sensitivity (for example, a print pattern image requiring high resolution) and an image with low sensitivity (for example, a through hole image where the inner wall and peripheral edge of the through hole is required to be protected with copper foil) by using a recording medium having a multilayer photosensitive layer applied thereon.
      SOLUTION: Simultaneous exposure can be performed while a redundant period for exposure is prevented by using a DFR (dry film resist) composed of a first photosensitive layer 110 and a second photosensitive layer 108, separately using the layers to a pattern image and a through hole image and thinning the dot pattern data in the pattern image region. Thinning of the dot pattern after shading correction responding to the DFR is carried out on the basis of a preliminarily determined thinning pattern. As the edge portion of the image is basically excluded for thinning in the thinning pattern, enhancing the edge portion is maintained to prevent decrease in the resolution.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了以高灵敏度同时曝光图像(例如,需要高分辨率的打印图案图像)和具有低灵敏度的图像(例如,通孔图像,其中内壁和外围边缘 通过使用其上施加有多层感光层的记录介质,通孔需要用铜箔保护)。 解决方案:通过使用由第一感光层110和第二感光层108构成的DFR(干膜抗蚀剂),分别使用层与图案图像来防止用于曝光的冗余周期,同时曝光,以及 通孔图像并使图案图像区域中的点图案数据变薄。 基于预先确定的稀疏图案,进行根据DFR的阴影校正后的点图案的变薄。 由于图像的边缘部分基本上被排除在稀疏图案中以减薄,因此保持增强边缘部分以防止分辨率的降低。 版权所有(C)2005,JPO&NCIPI