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    • 4. 发明专利
    • SUBSTRATE HOLDING JIG FOR LPE PROCESS
    • JPH11292691A
    • 1999-10-26
    • JP12288798
    • 1998-04-16
    • FUJI ELECTROCHEMICAL CO LTD
    • SUZUKI TOSHIYASU
    • C30B19/06C30B29/28H01L21/68H01L21/683
    • PROBLEM TO BE SOLVED: To provide the subject jig intended for shortening film growth time necessary for affording a specified film thickness so as to improve the mass productivity of single crystal film. SOLUTION: This jig is intended for holding a substrate 24 when a single crystal film is to be grown on the substrate by LPE process, and has such a scheme that a stirring blade section 32 is set up on the lower part of a substrate holder 30 so as to develop a forced convection current in a stock melt in association with the rotation of the substrate holder 30 for horizontally holding the substrate; the substrate holder 30 has so designed that three or more supports 34 are cylindrically arranged with the upper ends joinedly made narrower and there are provided holding pieces 38 projected inside at midway points of the respective supports and intended for placing the substrate thereon; and the stirring blade section is so designed that two or more blades 46 are symmetrically projected on the outer circumferential surface of a cylindrical body 44 which is fixed on the bottom of the substrate holder, and an upward convection current is forcedly developed in the stock melt as the substrate holder is rotated.
    • 7. 发明专利
    • PRODUCTION OF MAGNETOOPTICAL ELEMENT MATERIAL
    • JPH10167895A
    • 1998-06-23
    • JP34058896
    • 1996-12-05
    • FUJI ELECTROCHEMICAL CO LTD
    • SUZUKI TOSHIYASU
    • G02F1/09C30B19/04C30B19/12C30B29/28H01F1/34H01F10/24H01F41/28
    • PROBLEM TO BE SOLVED: To reduce the generation of pits in an LEP(liquid phase-epitaxial) film used as a magnetooptical element material even at the time of growing the LEP film having an increased thickness and also, to inhibit the loss in mass of a platinum crucible from being caused in the growth process of the LEP film, in the production. SOLUTION: In this production, a melt in a platinum crucible in which a magnetic garnet single crystal raw material is melted, is maintained at a growth temp. such that the melt is in a supersaturated state and in that state, a nonmagnetic garnet substrate used as a seed is immersed in the surface of the melt to grow a single crystal film on the surface of the substrate by a liquid phase-epitaxial(LEP) growth method and to produce a magnetooptical element material. At this time, a high temp. maintenance stage for maintaining the melt at a higher temp. (e.g. >=950 deg.C) than the growth temp. and a growth stage for growing the single crystal film at the growth temp. are altemately and plural times repeatedly performed, wherein: the first high temp. maintenance stage is a stage for melting and agitating the raw material and maintaining the resulting melt in the above high temp. state; and each of the second and the following high temp. maintenance stages consists of three steps, i.e., a step for gradually cooling the substrate on which the single crystal film is formed, by utilizing a temp. gradient within a furnace and thereafter taking out the substrate from the furnace to its outside, a step for replenishing the melt in the platinum crucible with the crystal component (i.e. the raw material) in an amount equivalent to the amount of that consumed by the growth of the single crystal film and a step for maintaining the melt in the above high temp. state and agitating the melt.