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JP2009303097A Piezoelectric device and manufacturing method thereof 审中-公开
标题翻译：压电器件及其制造方法
公开(公告)号：JP2009303097A
公开(公告)日：2009-12-24
申请号：JP2008157537
申请日：2008-06-17
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： TONEGAWA YUKIHIRO , USUI TAKESHI
IPC分类号： H03H3/04 , H01L41/083 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/23 , H01L41/253 , H01L41/313 , H03H9/19 , H03H9/215
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric device that includes a piezoelectric vibrating piece of which the frequency is precisely adjusted according to a frequency adjusting method which suppresses the influence of a change in environmental temperature, and the manufacturing method thereof. SOLUTION: The correction frequency data generating section 70 of a frequency adjusting device 50 estimates a temperature in the vicinity of a workpiece 20' at the time when measured frequency data are obtained by temperature change data of the temperature in the vicinity of the workpiece 20', stored in a storage section 71 beforehand, and actual ion beam radiation time data, calculates frequency data at a normal temperature by an arithmetic section 72 from the estimated temperature and temperature characteristic data of a piezoelectric vibrating piece stored in the storage section 71 beforehand and calculates a frequency correction amount in comparison with a target frequency at the normal temperature. Further, the temperature in the vicinity of the workpiece 20' at the time, when the frequency adjustment based on the frequency correction amount is finished, is estimated from the temperature change data and correction frequency data being the frequency correction amount at that temperature, are generated and transmitted to a control section 120. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：提供一种压电装置，其包括根据抑制环境温度变化的影响的频率调节方法精确地调节频率的压电振动片及其制造方法。解决方案：频率调整装置50的校正频率数据生成部70估计在测量频率数据通过温度附近的温度变化数据获得的工件20'附近的温度预先存储在存储部71中的工件20'和实际的离子束辐射时间数据，通过存储在存储部中的压电振动片的估计温度和温度特性数据由运算部72计算常温下的频率数据 71，并且在正常温度下与目标频率相比算出频率校正量。此外，根据温度变化数据和作为该温度下的频率校正量的校正频率数据，估计当基于频率校正量的频率调整结束时工件20'附近的温度为生成并发送到控制部分120.版权所有（C）2010，JPO＆INPIT

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