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1. 发明专利

JP2010162464A Gas treatment device and method of replacing treating agent for gas treatment device 审中-公开
标题翻译：气体处理装置和替代气体处理装置处理剂的方法
公开(公告)号：JP2010162464A
公开(公告)日：2010-07-29
申请号：JP2009005761
申请日：2009-01-14
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KOMAI TETSUO , SHINOHARA TOYOJI , NOMURA NORIHIKO , HASHIMOTO YUTAKA , KORIYAMA HIDETO , YOSHIDA KAORI
IPC分类号： B01J8/02 , B01D53/70
CPC分类号： Y02C20/30
摘要： PROBLEM TO BE SOLVED: To provide a gas treatment device which can efficiently replace a treating agent packed inside a treatment tank and a method of replacing the treating agent for the gas treatment device. SOLUTION: The gas treatment device 10a includes the treatment tank 11 filled with the treating agent 80. The treatment tank 11 has a gas inlet 15 through which a gas to be treated is introduced into the treatment tank 11, a gas outlet 16 through which the internal gas of the treatment tank 11 is made to run out of the treatment tank 11, a treating agent introduction port 17 through which the treating agent 80 is guided into the treatment tank 11, a treating agent drain port 18 through which the treating agent 80 to be replaced is drained from the treatment tank 11, and a filling promotion mechanism 21a which makes even the surface level of the introduced treating agent 80. In addition, the gas treatment device 10a comprises a first opening/closing device 71 which is installed in the treating agent introduction port 17 and opens/closes the treating agent introduction port 17 when the treating agent 80 for treating the gas to be treated is introduced, and a second opening/closing device 72 which is installed in the treating agent drain port 18 and opens/closes the treating agent drain port 18 when the treating agent 80 to be replaced is drained. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：提供一种能够有效地更换填充在处理槽内的处理剂的气体处理装置及更换气体处理装置的处理剂的方法。解决方案：气体处理装置10a包括填充有处理剂80的处理槽11.处理槽11具有气体入口15，待处理气体通过该进气口15被引入处理槽11中，气体出口16 使处理槽11的内部气体从处理槽11中流出，将处理剂80引导到处理槽11中的处理剂引入口17，处理剂排出口18，从处理槽11排出待更换的处理剂80，甚至使导入的处理剂80的表面水平均匀的填充促进机构21a。此外，气体处理装置10a包括：第一开闭装置71，安装在处理剂引入口17中，并且当用于处理待处理气体的处理剂80被引入时打开/关闭处理剂引入口17，并且第二打开/关闭偏差 ce 72，其安装在处理剂排出口18中，并且当要更换的处理剂80排出时打开/关闭处理剂排出口18。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2010158619A Agent of treating fluorine-containing compound, and method of treating emission 有权
标题翻译：处理含氟化合物的代理，以及处理排放的方法
公开(公告)号：JP2010158619A
公开(公告)日：2010-07-22
申请号：JP2009002192
申请日：2009-01-08
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MORI YOICHI , KOMAI TETSUO , SHINOHARA TOYOJI , KORIYAMA HIDETO
IPC分类号： B01D53/70 , B01D53/68 , B01J20/04
CPC分类号： Y02C20/30
摘要： PROBLEM TO BE SOLVED: To provide a treatment agent excellent in durability capable of efficiently decomposing a fluorine-containing compound in emission, and a method of treating emission. SOLUTION: The agent of treating a fluorine-containing compound in emission is produced by kneading and molding a mixture of Al(OH) 3 having a mean diameter (a median diameter) of at least 55 μm and equal to or smaller than 160 μm and Ca(OH) 2 in a mole ratio of 3:7 to 5:5 into a molded article made to have a bulk density of at least 950 g/L and subsequently drying and calcining the molded article, or by packing a treatment agent comprising a composite oxide as its main component obtained by calcining a mixture of Al(OH) 3 and Ca(OH) 2 , at a packing density of at least 0.68 kg/L. The method of treating emission includes causing the agent to make contact with emission comprising a fluorine-containing compound at a temperature of 550 to 850°C. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够有效地分解含氟化合物的排放性的耐久性优异的处理剂，以及处理发射的方法。解决方案：通过将平均直径（中值粒径）至少为55的Al（OH）3 SBS混合物捏合和模塑来制备排放中的含氟化合物的处理剂 μm且等于或小于160μm的Ca（OH）2 SBB，摩尔比为3:7至5:5的Ca（OH）2 SBB，制成成型体的体积密度为至少950g / 然后干燥和煅烧模塑制品，或通过将包含复合氧化物的处理剂作为其主要组分，通过煅烧Al（OH）3 SB和Ca（OH） 2 ，填充密度至少为0.68kg / L。处理发射的方法包括使试剂在550至850℃的温度下与包含含氟化合物的发射物接触。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2010131584A Gas treatment device and semiconductor manufacturing apparatus 有权
标题翻译：气体处理装置和半导体制造装置
公开(公告)号：JP2010131584A
公开(公告)日：2010-06-17
申请号：JP2009127308
申请日：2009-05-27
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MORI YOICHI , KOMAI TETSUO , SHINOHARA TOYOJI , KORIYAMA HIDETO , IKEDA HIROSHI
IPC分类号： B01D53/86 , B01D53/68 , B01J23/02 , B01J37/04 , B01J37/08 , H01L21/3065
CPC分类号： Y02C20/30 , Y02P70/605
摘要： PROBLEM TO BE SOLVED: To provide a gas treatment device for efficiently decomposing and treating a gas containing PFC, and having a reduced frequency of replacement of PFC decomposing/treating agent. SOLUTION: The gas treatment device 1 treating the gas containing PFC (perfluoro compound), includes a dehydration unit 10 for reducing H 2 O contained in the gas containing PFC, and a PFC-treating unit 20 configured to introduce the gas containing PFC which has H 2 O reduced by the dehydration unit 10, and filled with a decomposition/treatment agent containing a composite oxide of Al 2 O 3 and CaO for decomposing/treating PFC. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于有效分解和处理含有PFC的气体并且具有降低的PFC分解/处理剂的更换频率的气体处理装置。解决方案：处理含有PFC（全氟化合物）的气体的气体处理装置1包括用于还原含PFC的PFC中含有的H 2 SB 2的脱水装置10以及PFC处理装置 20，其被配置为引入含有通过脱水单元10还原的H 2 SB 2 O 3的含有气体的气体，并且填充有含有Al 2 S 2 O 3的复合氧化物的分解/处理剂用于分解/处理PFC的CaO＆lt; SB＆gt; 3＆gt;和CaO。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2010158620A Method of treating emission comprising fluorine-containing compound, and reaction vessel for treating emission 有权
标题翻译：处理包含含氟化合物的排放方法和用于处理排放物的反应容器
公开(公告)号：JP2010158620A
公开(公告)日：2010-07-22
申请号：JP2009002193
申请日：2009-01-08
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MORI YOICHI , KOMAI TETSUO , SHINOHARA TOYOJI , KORIYAMA HIDETO
IPC分类号： B01D53/70 , B01D53/68 , B01D53/86 , B01J23/02 , B01J37/08
CPC分类号： Y02C20/30
摘要： PROBLEM TO BE SOLVED: To provide a method of treating emission capable of efficiently treating the same by effectively utilizing a lower temperature zone in a reaction vessel not reaching a treatment temperature for a fluorine-containing compound, and an agent for treating emission. SOLUTION: The method of treating emission comprising a fluorine-containing compound includes causing emission 10 to flow through a reaction vessel 1 in the downstream direction, which reaction vessel 1 is filled with an alkali agent 6 comprising Ca(OH) 2 , Mg(OH) 2 or at least one kind of calcined products thereof on its upstream side along the flow of the emission 10 and is also filled with a PFC treatment agent 7 comprised of a composite oxide obtained by calcining a mixture of Al(OH) 3 and Ca(OH) 2 downstream. The PFC treatment agent 7 is produced by molding a mixture of Al(OH) 3 having a mean diameter (a median diameter) of at least 55 μm and equal to or smaller than 160 μm and Ca(OH) 2 in a mole ratio of 3:7 to 5:5 into a molded article, drying the molded article, and calcining the dried article at a temperature in a range of higher than 430°C and equal to or lower than 890°C. The reaction vessel 1 is preferably heated up to 500°C or higher. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：待解决的问题：提供一种处理能够有效地处理排放物的方法，其有效地利用在达不到含氟化合物的处理温度的反应容器中的较低温度区域，以及用于处理排放物质。解决方案：包含含氟化合物的排放物的处理方法包括使排出物10沿下游方向流过反应容器1，该反应容器1填充有包含Ca（OH） 2 ，Mg（OH） 2 或其沿着排放物10的流动的上游侧的至少一种煅烧产物，并且还填充有PFC处理剂7，其包含通过在下游煅烧Al（OH）3 SB 3和Ca（OH）2 SBB的混合物获得的复合氧化物。 PFC处理剂7通过将平均直径（中值粒径）为至少55μm且等于或小于160μm的Al（OH）3 SB / 3 SB的混合物成型为Ca（OH）） 2 以3:7至5:5的摩尔比进入模塑制品中，干燥模塑制品，并将干燥制品在高于430℃的温度下煅烧并且等于达到或低于890℃。优选将反应容器1加热至500℃以上。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2009034671A Treatment apparatus of perfluoro compound (pfc) and treatment method of pfc-containing gas 有权
标题翻译：全氟化合物（PFC）的处理装置和含PFC的气体的处理方法
公开(公告)号：JP2009034671A
公开(公告)日：2009-02-19
申请号：JP2008179115
申请日：2008-07-09
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MORI YOICHI , KOMAI TETSUO , KORIYAMA HIDETO , SHINOHARA TOYOJI
IPC分类号： B01D53/70 , B01D53/34 , B01D53/68
CPC分类号： Y02C20/30
摘要： PROBLEM TO BE SOLVED: To provide a treatment apparatus of PFC gas with excellent thermal efficiency and efficiently decomposing PFC-containing gas even at low temperature, and a treatment method using the treatment apparatus of PFC gas, and efficiently treating while extending a service life of a PFC decomposition agent. SOLUTION: The treatment apparatus comprises an apparatus body 10 having rod-like inner heaters 11 and cylindrically disposed outer heaters 12 with given spaces from the inner heaters 11. A treating agent disposing part 13 for filling the PFC decomposition agent is formed between the inner heaters 11 and outer heaters 12. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：为了提供即使在低温下也具有优异的热效率和有效分解含PFC气体的PFC气体的处理装置，以及使用PFC气体处理装置的处理方法，使用寿命的PFC分解剂。解决方案：处理装置包括具有棒状内部加热器11和圆筒形布置的外部加热器12的设备主体10，其具有来自内部加热器11的给定空间。用于填充PFC分解剂的处理剂设置部分13形成在内加热器11和外加热器12.版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2010201358A Exhaust gas treatment system and operation method thereof 有权
标题翻译：排气处理系统及其操作方法
公开(公告)号：JP2010201358A
公开(公告)日：2010-09-16
申请号：JP2009050375
申请日：2009-03-04
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KOMAI TETSUO , SHINOHARA TOYOJI , NOMURA NORIHIKO , HASHIMOTO YUTAKA , KORIYAMA HIDETO
IPC分类号： B01D53/70 , B01D53/34
摘要： PROBLEM TO BE SOLVED: To fully use the treatment capacity of a treatment agent of an exhaust gas treatment apparatus as much as possible, using a centralized piping connecting structure. SOLUTION: An exhaust gas treatment system includes: a plurality of exhaust gas treatment units 14a-14d including treatment tanks 40; a common inlet duct 30 into which an exhaust gas supplied to the plurality of exhaust gas treatment units flows; an outlet duct 32 for exhausting the gas treated in the exhaust gas treatment units; and a central control section 56 for controlling the operation conditions of the exhaust gas treatment units. The exhaust gas treatment system has: sections 42 installed on the downstream sides of the exhaust gas treatment units, and detecting the exhaust gas treatment capacities of the exhaust gas treatment units; outlet valves 44 installed in treated gas outflow lines 24 extending from the exhaust gas treatment units and connected to the outlet duct 32; and treated gas returning lines 46 diverged on the upstream side of the outlet valves from the treated gas outflow lines, and converged to the common inlet duct. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：尽可能充分利用废气处理装置的处理剂的处理能力，使用集中管道连接结构。解决方案：废气处理系统包括：多个排气处理单元14a-14d，其包括处理槽40; 供给多个排气处理单元的废气流入的公共入口管道30; 用于排出在废气处理单元中处理的气体的出口管道32; 以及用于控制废气处理单元的操作条件的中央控制部分56。废气处理系统具有：安装在废气处理单元的下游侧的部分42，并且检测废气处理单元的废气处理能力; 出口阀44安装在从排气处理单元延伸并连接到出口管道32的经处理的气体流出管线24中; 并且经处理的气体返回管线46在出口阀的上游侧从经处理的气体流出管线分流，并且会聚到共同的入口管道。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2010158643A Exhaust gas treatment apparatus equipped with backup treatment tank 有权
标题翻译：排气处理设备配备备用处理罐
公开(公告)号：JP2010158643A
公开(公告)日：2010-07-22
申请号：JP2009003686
申请日：2009-01-09
申请人： Ebara Corp , 株式会社荏原製作所
发明人： SHINOHARA TOYOJI , KORIYAMA HIDETO , KOMAI TETSUO
IPC分类号： B01D53/70 , B01D53/68 , B01J20/04
CPC分类号： Y02C20/30
摘要： PROBLEM TO BE SOLVED: To provide an exhaust gas treatment apparatus which continues treatment even at the time of exchanging a treatment tank or the like and which can be installed in a narrower installation space. SOLUTION: The exhaust gas treatment apparatus is an exhaust gas treatment apparatus 10a for treating an object gas to be treated by passing an exhaust gas containing the object gas to be treated through a treatment tank filled with a treatment agent and is equipped with a main treatment tank 11 for passing the exhaust gas, a first treatment agent 12 packed in the main treatment tank 11 for treating the object gas to be treated, a backup treatment tank 21 with a smaller capacity than that of the main treatment tank 11 for passing the exhaust gas, a second treatment agent 22 different from the first treatment agent 12 and packed in the backup treatment tank 21 for treating the object gas to be treated, and switching devices 31 to 36 for switching the exhaust gas flow between the main treatment tank 11 and the backup treatment tank 21. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供即使在更换处理罐等时也可以安装在更窄的安装空间中的继续处理的废气处理装置。解决方案：废气处理装置是一种废气处理装置10a，用于通过使含有待处理对象气体的废气通过填充有处理剂的处理槽来处理待处理的对象气体，并且装备有用于通过废气的主处理槽11，填充在用于处理待处理气体的主处理槽11中的第一处理剂12，具有比主处理槽11的容量小的备用处理槽21，通过排气，与第一处理剂12不同的第二处理剂22，填充在用于处理被处理对象气体的备用处理槽21中，切换装置31〜36，用于切换主处理罐11和备用处理罐21.版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2010149084A Exhaust gas treatment method including increasing treatment temperature, operation method of exhaust gas treatment apparatus, and exhaust gas treatment apparatus 有权
标题翻译：排气处理方法，包括增加处理温度，排气处理装置的操作方法和排气处理装置
公开(公告)号：JP2010149084A
公开(公告)日：2010-07-08
申请号：JP2008332459
申请日：2008-12-26
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KOMAI TETSUO , SHINOHARA TOYOJI , KORIYAMA HIDETO
IPC分类号： B01D53/86 , B01D53/68 , B01D53/70 , B01D53/94 , B01D53/96 , B01J23/02
摘要： PROBLEM TO BE SOLVED: To provide an exhaust gas treatment method, an operation method of an exhaust gas treatment apparatus, and the exhaust gas treatment apparatus by which power consumption is suppressed and activity of a decomposing agent is increased to maximize the treatment capability of the decomposing agent. SOLUTION: The exhaust gas treatment method, including a decomposition step in which an exhaust gas is treated by the decomposing agent at a predetermined treatment temperature to decompose a to-be-decomposed gas in the exhaust gas, further includes a steps in which the decomposition process is started with a treatment-starting temperature at a predetermined treatment temperature (ST01), every time an almost breakthrough condition of the decomposing agent is detected (ST03: Y), the treatment temperature is increased higher than a treatment temperature when the almost breakthrough condition is detected (ST04), and the decomposition step (ST02) for decomposing the to-be-decomposed gas in the exhaust gas is repeated (ST02-ST05) until the treatment temperature exceeds a predetermined upper limit temperature (ST05: Y). COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供排气处理方法，排气处理装置的操作方法和消耗功率消耗的排气处理装置和分解剂的活性增加以使处理最大化分解剂的能力。解决方案：包括分解步骤的废气处理方法，其中排气在预定处理温度下由分解剂处理以分解废气中的待分解气体，还包括以下步骤：在预定处理温度（ST01）下以处理开始温度开始分解处理，每当检测到分解剂的几乎穿透状态（ST03：Y）时，处理温度比处理温度高检测到几乎突破的条件（ST04），并且重复用于分解废气中的待分解气体的分解步骤（ST02）（ST02-ST05），直到处理温度超过预定的上限温度（ST05： Y）。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2009034662A Fluorine fixing agent, perfluorocarbon decomposition processing agent, and method for preparing the same 有权
标题翻译：氟代固定剂，全氟碳分解加工剂及其制备方法
公开(公告)号：JP2009034662A
公开(公告)日：2009-02-19
申请号：JP2008071336
申请日：2008-03-19
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MORI YOICHI , KOMAI TETSUO , KORIYAMA HIDETO
IPC分类号： B01J20/08 , B01D53/70
CPC分类号： Y02C20/30
摘要： PROBLEM TO BE SOLVED: To provide a fluorine fixing agent excellent in endurance and perfluorocarbon processing capacity and capable of efficiently collecting fluorine, and to provide a fluorine fixing agent preparing method. SOLUTION: The fluorine fixing agent preparing method comprises: a step of burning a mixture of Al(OH) 3 having a mean particle size of ≥60 μm and ≤160 μm and Ca(OH) 2 in a molar ratio of 3:7 to 5:5 at a temperature range of >430°C and ≤890°C in the current of nitrogen or air. The fluorine fixing agent obtained by the fluorine fixing agent making method is also disclosed. COPYRIGHT: (C)2009,JPO&INPIT

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