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1. 发明专利

JPH10219426A MEMBER FOR SEMICONDUCTOR MANUFACTURING PROCESS 失效
公开(公告)号：JPH10219426A
公开(公告)日：1998-08-18
申请号：JP3551397
申请日：1997-02-04
申请人： EBARA CORP , TOCALO CO LTD
发明人： MIYASAKA MATSUSUKE , NAKAHAMA SHUHEI , TAKAYAMA HIROKAZU , NIIMURA YOSHIHIRO , HARADA YOSHIO , TAKEUCHI JUNICHI , SUGIMOTO KATSUHISA
IPC分类号： C23C10/50 , C23C10/28 , C23C10/48
摘要： PROBLEM TO BE SOLVED: To obtain a stock having high durability to the corrosion and erosion damage, e.g. of equipment used in a semiconductor manufacturing process, particularly a dry process, by forming an aluminum diffusion layer on the part in the vicinity of the surface of a metallic base material and improving sputtering resistance, halide resistance, and blast erosion resistance. SOLUTION: A metallic Al layer is formed on a metallic base material 1 by a thermal spraying and diffusing method or a PVD method and then heated at a temp. not lower than the melting point of Al, or a film having an Al diffusion layer is formed on a stainless steel, an Ni-base alloy, etc., by a hot-dip Al coating method and a fusing method. By the above procedure, a diffusion layer 2, resultant from Al infiltrated into the base material, and an Al2 O3 layer 4 are formed, or, a diffusion layer 2 resultant from Al infiltrated into the base material is formed in the metallic base material 1 by a powder diffusion method. By using equipment for semiconductor manufacturing process, etc., constituted of this corrosion resisting member, a stable operation can be maintained over a long period.

2. 发明专利

JPH0874025A MEMBER COATED WITH CHROMIUM CARBIDE BY THERMAL SPRAYING 失效
公开(公告)号：JPH0874025A
公开(公告)日：1996-03-19
申请号：JP15798995
申请日：1995-06-23
申请人： EBARA CORP , TOCALO CO LTD
发明人： NAKAHAMA SHUHEI , NAGAHARA HISAMICHI , KAWASAKI MASAMICHI , HARADA YOSHIO , TAKEUCHI JUNICHI
IPC分类号： C23C4/10 , C23C4/18
摘要： PURPOSE: To make an important contribution to an improvement in wear resistance and erosion resistance by forming a thermally sprayed film of chromium carbide by a reformed layer adhered and impregnated with Cr23 C6 type chromium on its surface layer. CONSTITUTION: A chromium carbide cermet film 2 which is formed by a thermal spraying method on a metallic base material 1 consisting of of iron, steel or super alloy is shown in (A) of Fig. In the Fig., (B) illustrates the film 2 of (A) after the film is brought into contact with chromium halide vapor contg. high-temp. gaseous hydrogen. The very small metal chromium 3 precipitated in the gaseous chromium halide atm. infiltrates the film 2 through the pore parts 4 of the film and metallurgically bonds thereto by reacting with the base material 1 and forming an allay metal 5. While the very small metal Cr adheres on the surface, the metal Cr reacts with the chromium carbide components or the free carbon included therein and forms the Cr23 C6 type chromium carbide 6. As a result, the reforming with the surface layer of the thermally sprayed film of the chromium carbide is executed.

3. 发明专利

JPH0874024A FORMATION OF CARBIDE-BASE COMPOSITE FILM AND COMPOSITE FILM 失效
公开(公告)号：JPH0874024A
公开(公告)日：1996-03-19
申请号：JP15798895
申请日：1995-06-23
申请人： EBARA CORP , TOCALO CO LTD
发明人： NAKAHAMA SHUHEI , NAGAHARA HISAMICHI , KAWASAKI MASAMICHI , HARADA YOSHIO , TAKEUCHI JUNICHI
IPC分类号： C23C4/10 , C23C4/18
摘要： PURPOSE: To improve the resistance to wear and erosion by coating a carbide- base thermally sprayed film with a Cr23 C6 -type carbide and infiltrating the carbide into the film. CONSTITUTION: The film 32 of various carbide cermets is formed on a metallic substrate 21 of steel or superalloy, etc., by thermal spraying as shown in Figure A. The sectional structure after the film A is brought into contact with the high-temp. vapor of chromium halide contg. gaseous hydrogen as shown in Figure B. The fine metallic chromium 33 deposited in the chromium halide gas atmosphere intrudes into the inside through the pore part 34 of the film 32, reacts with the substrate 31 to form an alloy layer 35 and is metallurgically joined to the base material. Fine metallic Cr deposited on the film 32 reacts with chromium carbide or the free carbon contained in the chromium carbide to form a Cr22 C6 -type carbide layer 36. The carbide thermally sprayed film is reformed in this way.

4. 发明专利

JP2010229492A Method for modifying surface of white yttrium oxide thermal-sprayed film, and member coated with yttrium oxide thermal-sprayed film 有权
标题翻译：用于改性白氧化铅热喷涂膜表面的方法，以及用氧化钛热喷涂膜包覆的部件
公开(公告)号：JP2010229492A
公开(公告)日：2010-10-14
申请号：JP2009078348
申请日：2009-03-27
申请人： Tocalo Co Ltd , トーカロ株式会社
发明人： HARADA YOSHIO , TAKEUCHI JUNICHI , YAMAZAKI MAKOTO , INABA MITSUHARU , KOBAYASHI KEIGO
IPC分类号： C23C4/10 , C23C4/08
摘要： PROBLEM TO BE SOLVED: To provide techniques for producing a white secondary recrystallized layer, which has a white appearance color and is dense, smooth and excellent in plasma-erosion resistance, on the surface of an yttrium oxide thermal-sprayed film. SOLUTION: In the method for forming a secondary recrystallized layer having a white appearance color, the surface of the white yttrium oxide thermal-sprayed film formed by an atmospheric plasma thermal spray method is treated with a laser beam in a highly oxidative gas atmosphere. The member coated with an Y 2 O 3 thermal-sprayed film is provided has the white secondary recrystallized layer on the surface. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供在氧化钇热喷涂膜的表面上生产具有白色外观颜色并且致密，光滑和优异的耐等离子体侵蚀性的白色二次再结晶层的技术。解决方案：在形成具有白色外观颜色的二次再结晶层的方法中，通过大气等离子体热喷涂法形成的白色氧化钇热喷涂膜的表面用高度氧化气体中的激光束大气层。涂覆有Y 2＆lt; 3＆gt; 3＆lt; 3＆gt; 3＆lt; 3＆gt;热喷涂膜的部件具有表面上的白色二次再结晶层。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2010229491A Method for whitening black surface of yttrium oxide thermal-sprayed film, and member coated with white yttrium oxide thermal-sprayed film 有权
标题翻译：白色氧化铝热喷涂膜黑色表面的白色氧化膜热喷涂膜的方法
公开(公告)号：JP2010229491A
公开(公告)日：2010-10-14
申请号：JP2009078325
申请日：2009-03-27
申请人： Tocalo Co Ltd , トーカロ株式会社
发明人： HARADA YOSHIO , TAKEUCHI JUNICHI , YAMAZAKI MAKOTO , INABA MITSUHARU , KOBAYASHI KEIGO
IPC分类号： C23C4/18 , C23C28/00
摘要： PROBLEM TO BE SOLVED: To provide techniques for whitening a surface of a black yttrium thermal-sprayed film and/or a surface of a black secondary recrystallized layer thereof. SOLUTION: A black yttrium oxide thermal-sprayed film is changed into white by irradiating the surface of the film with a laser beam in a sealed state with a highly oxidative gas such as oxygen gas, ozone gas and nitrous oxide gas, as well as yttrium oxide particles constituting the surface of the film are fused to integrate to produce a secondary recrystallized layer. Thus, white characters, numbers, line patterns or the like can be drawn on the surface of the black film. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供使黑色钇热喷涂膜的表面和/或其黑色二次再结晶层的表面变白的技术。解决方案：通过用密封状态的激光束用氧气，臭氧气体和一氧化二氮气体等高度氧化气体照射膜的表面，将黑色氧化钇热喷涂膜变成白色，如并且构成膜的表面的氧化钇粒子被熔合以一体化以产生二次再结晶层。因此，可以在黑色膜的表面上绘制白色字符，数字，线条图案等。版权所有（C）2011，JPO＆INPIT

6. 发明专利

JP2007107100A Composite film-covered member in plasma treatment container and method for manufacturing the same 审中-公开
标题翻译：等离子体处理容器中的复合薄膜覆盖件及其制造方法
公开(公告)号：JP2007107100A
公开(公告)日：2007-04-26
申请号：JP2006322727
申请日：2006-11-30
申请人： Tocalo Co Ltd , Tokyo Electron Ltd , トーカロ株式会社 , 東京エレクトロン株式会社
发明人： HARADA YOSHIO , TAKEUCHI JUNICHI , HAMAGUCHI TATSUYA , NAGAYAMA MASAYUKI , MIHASHI YASUSHI
IPC分类号： C23C4/10 , C23C4/06
摘要： PROBLEM TO BE SOLVED: To provide a composite film-covered member in a plasma treatment container excellent in plasma erosion resistance, and a method for manufacturing the same. SOLUTION: The composite film-covered member in the plasma treatment container is covered with a composite film obtained by forming an undercoat made of a metal coating film on a surface of a substrate, then forming an intermediate layer made of Al 2 O 3 or a mixture of Al 2 O 3 and Y 2 O 3 on the undercoat, and subsequently forming a Y 2 O 3 sprayed coating as a topcoat. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供等离子体耐侵蚀性优异的等离子体处理容器中的复合膜覆盖部件及其制造方法。解决方案：等离子体处理容器中的复合膜覆盖部件被覆在由基板表面上形成由金属涂膜形成的底涂层所形成的复合膜，然后形成由Al 2 O 3 或混合物，或者是 O 3 和Y 2 O SB > 3 ，然后形成作为顶涂层的Y SB / O 3 SB 3喷涂涂层。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2006152385A Composite layer coating member having excellent environmental corrosion resistance and excellent wear resistance and production method thereof 有权
标题翻译：具有优异环境耐腐蚀性和优异耐磨性及其生产方法的复合层涂层成员
公开(公告)号：JP2006152385A
公开(公告)日：2006-06-15
申请号：JP2004345541
申请日：2004-11-30
申请人： Air Water Inc , Tocalo Co Ltd , エア・ウォーター株式会社 , トーカロ株式会社
发明人： HARADA YOSHIO , TAKEUCHI JUNICHI , TERATANI TAKEMA , FUJIKAWA HISAO , WATANABE TAKANORI , MINAMI KATSUHARU
IPC分类号： C23C8/24 , C23C8/36 , C23C8/48 , C23C10/48 , C23C10/50
摘要： PROBLEM TO BE SOLVED: To provide a composite layer coating member which exhibits the high hardness possessed by a nitrided layer and excellent wear resistance, and a production method thereof.
SOLUTION: The composite layer coating member 10 includes a metallic base material 11, an Al layer 12 formed on the surface of the metallic base material 11, an Al diffused layer 12 of 12 to 28 mass% in Al concentration on the surface formed on the surface of the metallic base material 11, and an AlN layer 13 formed by nitriding the aluminum included in the Al diffused layer 12. The Al diffused layer 12 is formed by a powder process and the AlN layer 13 is formed by subjecting the Al diffused layer 12 to a nitriding treatment.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种表现出由氮化层具有的高硬度和优异的耐磨性的复合层涂层构件及其制造方法。解决方案：复合层涂层构件10包括金属基材11，在金属基材11的表面上形成的Al层12，表面上Al浓度为12〜28质量％的Al扩散层12 形成在金属基材11的表面上的AlN层13和通过氮化Al扩散层12中所含的铝形成的AlN层13.Al扩散层12通过粉末法形成，AlN层13通过使 Al扩散层12进行氮化处理。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2006152384A Composite layer coating member having excellent halogen corrosion resistance and production method thereof 审中-公开
标题翻译：复合层涂层具有优异的耐腐蚀性及其生产方法
公开(公告)号：JP2006152384A
公开(公告)日：2006-06-15
申请号：JP2004345537
申请日：2004-11-30
申请人： Tocalo Co Ltd , Toyo Tanso Kk , トーカロ株式会社 , 東洋炭素株式会社
发明人： TOJO TETSURO , TAKEBAYASHI HITOSHI , MOTOMIYA MAKOTO , HARADA YOSHIO , TAKEUCHI JUNICHI , TERATANI TAKEMA
IPC分类号： C23C30/00 , C23C8/02 , C23C8/24
摘要： PROBLEM TO BE SOLVED: To provide a composite layer coating member which exhibits excellent halogen corrosion resistance in addition to high hardness and excellent wear resistance, and a production method thereof.
SOLUTION: The composite layer coating member 10 includes a metallic base material 11, an Al layer 12 formed on the surface of the metallic base material 11, and an AlN layer 13 formed on the surface of the Al layer 12. The Al layer 12 is formed by a hot dip coating process or vapor deposition, such as a PVD process, and the AlN layer 13 is formed by subjecting the Al layer 12 to a nitriding treatment.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决问题的方法：提供除了高硬度和优异的耐磨性之外还具有优异的耐卤素腐蚀性的复合层涂层构件及其制造方法。解决方案：复合层涂层构件10包括金属基材11，形成在金属基材11的表面上的Al层12和形成在Al层12的表面上的AlN层13.Al 层12通过热浸涂法或PVD沉积法形成，并且通过对Al层12进行氮化处理而形成AlN层13。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2006063421A Method for repairing member in semiconductor-manufacturing apparatus 审中-公开
标题翻译：在半导体制造设备中修复会员的方法
公开(公告)号：JP2006063421A
公开(公告)日：2006-03-09
申请号：JP2004249997
申请日：2004-08-30
申请人： Sharp Corp , Tocalo Co Ltd , シャープ株式会社 , トーカロ株式会社
发明人： HARADA YOSHIO , TAKEUCHI JUNICHI , SHIODE OSAMU , MAKITA KATSUYA
IPC分类号： C23C4/06 , C23C4/10
摘要： PROBLEM TO BE SOLVED: To provide a method for reusing various apparatuses used in a semiconductor manufacturing process, particularly in a dry process, by simply repairing the surface of a member composing the apparatus, which has been corrosively worn due to the action of a halogen-based gas, and for improving the durability of the apparatuses. SOLUTION: The method for repairing the member for the semiconductor-manufacturing apparatus comprises build-up-spraying a nickel-containing material on a corrosively worn part inside the metallic member arranged in the semiconductor-manufacturing apparatus which uses the halogen-based gas; or further thermal-spraying and layering Cr 2 O 3 , Al 2 O 3 or a mixture thereof on the build-up-sprayed layer. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种在半导体制造工艺中使用的各种装置，特别是在干法中重复使用的方法，通过简单地修复由于作用而被腐蚀地磨损的构成装置的构件的表面的卤素气体，并且用于提高装置的耐久性。解决方案：用于修复半导体制造装置的构件的方法包括：将含镍材料堆积在布置在使用卤素基的半导体制造装置的半导体制造装置中的金属构件内的腐蚀性磨损部分上加油站; 或进一步的热喷涂和层压Cr 2 SB 3 O 3，或者其上的混合物积层喷涂层。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JPH10154596A ELECTROSTATIC CHUCK MEMBER 失效
公开(公告)号：JPH10154596A
公开(公告)日：1998-06-09
申请号：JP31089296
申请日：1996-11-21
申请人： TOCALO CO LTD , HITACHI LTD
发明人： HARADA YOSHIO , TAKEUCHI JUNICHI , YAMAZAKI MAKOTO , ITO YOICHI
IPC分类号： C23C4/08 , C23C28/00 , H05F7/00
摘要： PROBLEM TO BE SOLVED: To reduce temperature dependency of a specific resistance value, and expand an applicable temperature range by using an electrostatic chuck member where an insulating film composed of a metallic undercoat and an Al2 O3 -NiO ceramic overcoat laminated on it is arranged on a metallic or carbon substrate. SOLUTION: When this electrostatic chuck member is manufactured, after a surface of a metallic or carbon substrate 1 is activated, a metallic undercoat 2 is executed in a thickness of 30 to 150μm by an arc flame spraying method or an atmospheric plasma flame sparying method by using metal such as Ni, Al, Cr, Co, Mo and W or these alloy as a flame spraying material. An Al2 O3 - NiO ceramic overcoat 3 is executed on it by an atmospheric flame spraying method or a reduced pressure flame spraying method, and a mixing rate of NiO is preferable to be in a range of 4 to 10%.

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