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    • 1. 发明专利
    • Wavelength measuring apparatus for semiconductor device, and inspection apparatus for semiconductor device
    • 半导体器件的波长测量装置和半导体器件的检测装置
    • JP2008151546A
    • 2008-07-03
    • JP2006337626
    • 2006-12-14
    • Daitron Technology Co Ltdダイトロンテクノロジー株式会社
    • IGAWA KATSUHIKO
    • G01J9/00H01S5/00
    • PROBLEM TO BE SOLVED: To measure the wave length of light emission of semiconductor device in a wide band of wavelength with a low cost constitution.
      SOLUTION: The wave length measurement apparatus for measuring the wave length λ of the emission light of the semiconductor device 1 is characteristically provide with: a threshold voltage measurement means 20 for measuring the forward rising voltage V
      F of the semiconductor device 1; a light receiving means 40 for detecting the output light from the semiconductor device 1; a plurality of color filters 70a, 70b and 70c with different transparency properties; a filter selection means 84 for selecting one color filter from among the plurality of color filters 70a, 70b and 70c based on the forward rising voltage V
      F measured by the threshold voltage measurement means 20; a transmittance detection means 86 for calculating the transmittance R
      P of the one color filter selected based on the each detected value P
      O1 , P
      O2 while detecting respectively the filtered light by the light receiving means 80 through the one color filter selected and the light not filtered; and a wave length calculation means 88 for calculating the emission light wave length λ of the semiconductor device 1 from the transmittance R
      P .
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:以低成本构成测量宽波段的半导体器件的发光波长。 解决方案:用于测量半导体器件1的发射光的波长λ的波长测量装置的特征在于提供:阈值电压测量装置20,用于测量正向上升电压V SB> >半导体器件1; 用于检测来自半导体器件1的输出光的光接收装置40; 具有不同透明性的多个滤色片70a,70b,70c; 滤波器选择装置84,用于基于由阈值电压测量装置20测量的正向上升电压V SB> F而从多个滤色器70a,70b和70c中选择一个滤色器; 用于计算基于每个检测值P O1 ,P O2 的一个滤色器的透射率R SB> P 的透射率检测装置86,同时 通过所选择的一个滤色器分别检测由光接收装置80滤光的光,并且不过滤光; 以及用于从透射率R SB> P 计算半导体器件1的发射光波长λ的波长计算装置88。 版权所有(C)2008,JPO&INPIT
    • 2. 发明专利
    • Motion characteristic measuring device for electronic element
    • 电子元件运动特性测量装置
    • JP2004101461A
    • 2004-04-02
    • JP2002266553
    • 2002-09-12
    • Daitron Technology Co Ltdダイトロンテクノロジー株式会社
    • SUGIYAMA YASUHISAIGAWA KATSUHIKO
    • G01R31/26
    • PROBLEM TO BE SOLVED: To provide an index table type measuring device for fully-automatically and efficiently measuring the motion characteristic of an electronic element sensitive to an environmental temperature.
      SOLUTION: A unique probe electrode mechanism created by this inventor and the like is used for a rotary connector, and the electric connection among various electronic or electric elements mounted in a rotating table and various electronic or electric apparatuses statically mounted at the external of the rotating table is switchable. Further the discontinuity of the operation amount to a controlled object by an electronic temperature controller, generated in accompany with the intermittent rotation of an index table is regarded and processed as disturbance to solve the discontinuity of the control at short times. Further the specific correspondence between a thermoelectric element on the table and the electronic temperature controller mounted around the external of the table, generated in accompany with the intermittent rotation of the index table, is constantly kept.
      COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种用于全面自动且有效地测量对环境温度敏感的电子元件的运动特性的指标表型测量装置。 解决方案:由本发明人等创建的独特的探针电极机构用于旋转连接器,并且安装在旋转台中的各种电子或电气元件之间的电连接以及静态安装在外部的各种电子或电气设备 的旋转台是可切换的。 此外,伴随着索引表的间歇旋转而产生的电子温度控制器对受控对象的操作量的不连续性被认为是处理为干扰,以在短时间内解决控制的不连续性。 此外,不断保持桌子上的热电元件与安装在桌子外部的电子温度控制器之间的特定对应关系,伴随着折射台的间歇旋转而产生。 版权所有(C)2004,JPO
    • 4. 发明专利
    • Inspection method of semiconductor laser element, and equipment thereof
    • 半导体激光元件检测方法及其设备
    • JP2007214197A
    • 2007-08-23
    • JP2006029907
    • 2006-02-07
    • Daitron Technology Co Ltdダイトロンテクノロジー株式会社
    • IGAWA KATSUHIKO
    • H01S5/00G01R31/26
    • PROBLEM TO BE SOLVED: To provide an inspection method for inspecting the aging variation of the current-optical output characteristics of a semiconductor laser, which is capable of correctly measuring an optical output power value even in the case of high-speed short pulse drive, and to provide equipment thereof.
      SOLUTION: In the inspection equipment 10 of a semiconductor laser which inspects the aging variation of the current-optical output characteristics of a semiconductor laser element 1 driven by pulse current, a drive circuit 20 which outputs pulse current to the semiconductor laser element 1 sets pulse current at a bottom level from a predetermined time to a bottom time Tb. Pulse light of the bottom level is made to emit from the semiconductor laser element 1 during the predetermined period in front of the bottom time Tb.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种用于检查半导体激光器的电流 - 光学输出特性的老化变化的检查方法,其即使在高速短路的情况下也能够正确地测量光输出功率值 脉冲驱动,并提供其设备。 解决方案:在检测由脉冲电流驱动的半导体激光元件1的电流 - 光输出特性的老化变化的半导体激光器的检查设备10中,向半导体激光元件输出脉冲电流的驱动电路20 1将从预定时间到底部时间Tb的底部电平设置脉冲电流。 在底部时间Tb之前的预定时段内,使底层的脉冲光从半导体激光元件1发射。 版权所有(C)2007,JPO&INPIT
    • 5. 发明专利
    • Method and device for detecting input/output characteristics of semiconductor laser element
    • 用于检测半导体激光元件的输入/输出特性的方法和装置
    • JP2007207999A
    • 2007-08-16
    • JP2006024953
    • 2006-02-01
    • Daitron Technology Co Ltdダイトロンテクノロジー株式会社
    • IGAWA KATSUHIKO
    • H01S5/00
    • PROBLEM TO BE SOLVED: To provide a method of accurately detecting input/output characteristics of a semiconductor laser element in short pulse driving.
      SOLUTION: Input/output characteristics of a semiconductor laser element 1 are detected in short pulse driving by an input/output characteristic detecting method. At this time, the input/output characteristics and its differential characteristics are measured using both a first light receiving element 60 that receives the total optical flux of a pulse beam radiated from the semiconductor laser element 1, and a second light receiving element 62 which has a light receiving area smaller than that of the first light receiving element 60, and is provided with sufficient response performance for detecting a pulse beam outputted in short pulse driving during the pulse driving with a relatively long pulse width. Based on the coupling efficiency CE of the second light receiving element 62 which is calculated from the measuring result, the input/output characteristics of the semiconductor laser element 1 are calibrated in short pulse driving which is measured by the second light receiving element 62.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种在短脉冲驱动中准确地检测半导体激光元件的输入/输出特性的方法。 解决方案:通过输入/输出特性检测方法在短脉冲驱动中检测半导体激光元件1的输入/输出特性。 此时,输入/输出特性及其差分特性是使用接收从半导体激光元件1辐射的脉冲光束的总光通量的第一光接收元件60和具有 光接收面积小于第一光接收元件60的光接收面积,并且具有足够的响应性能,用于在脉冲驱动期间以较长的脉冲宽度检测在短脉冲驱动中输出的脉冲光束。 基于从测量结果计算的第二光接收元件62的耦合效率CE,半导体激光元件1的输入/输出特性在由第二光接收元件62测量的短脉冲驱动中被校准。 P>版权所有(C)2007,JPO&INPIT
    • 6. 发明专利
    • Signal-detecting device for semiconductor laser element and input/output characteristics detecting device using the same
    • 用于半导体激光元件的信号检测装置和输入/输出特性检测使用该装置的装置
    • JP2006310665A
    • 2006-11-09
    • JP2005133668
    • 2005-04-28
    • Daitron Technology Co Ltdダイトロンテクノロジー株式会社
    • IGAWA KATSUHIKO
    • H01S5/00
    • PROBLEM TO BE SOLVED: To provide, at low cost, an input/output characteristics detecting device which can set a plurality of sampling times in a single pulse, with arbitrary timing and measure the input/output characteristics of a semiconductor laser element at each sampling times.
      SOLUTION: Detecting circuits 30 and 50 for a pulse signal outputted from the semiconductor laser element comprise amplifiers 32 and 52 for the pulse signal, A/D converters 34 and 54, which digitally convert amplified pulse signals, and latch circuits 36 and 56 constituted of three-stage latch ICs. Digital signals corresponding to the pulse signals are inputted to the latch circuits 36 and 56, and one latch timing signal each is input to respective latches IC of three stages, during one pulse of the pulse signal by a timing circuit 40 at points t1, t2, and t3 of time, in the order, from the rising point t0 of time to detect digital signals, corresponding to the crest values of the pulse signals at the points t1, t2, and t3 of the times (sampling times), when latch timing signals are inputted.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供一种输入/输出特性检测装置,可以以任意定时在单个脉冲中设置多个采样时间并且测量半导体激光元件的输入/输出特性, 在每个采样时间。 解决方案:从半导体激光元件输出的脉冲信号的检测电路30和50包括用于脉冲信号的放大器32和52,数字转换放大的脉冲信号的A / D转换器34和54以及锁存电路36和 56由三级锁存IC构成。 对应于脉冲信号的数字信号被输入到锁存电路36和56,并且一个锁存定时信号分别在时间电路40的点t1,t2处在脉冲信号的一个脉冲期间输入到三级的各个锁存器IC 和t3的时间,从时间的上升点t0到检测数字信号,对应于在时间点t1,t2和t3的脉冲信号的峰值(采样时间),当锁存时 定时信号被输入。 版权所有(C)2007,JPO&INPIT
    • 7. 发明专利
    • Tester for multi-wavelength laser diode package
    • 多波长激光二极管封装测试仪
    • JP2005142184A
    • 2005-06-02
    • JP2003373954
    • 2003-11-04
    • Daitron Technology Co Ltdダイトロンテクノロジー株式会社
    • IGAWA KATSUHIKO
    • H01S5/062H01S5/022
    • PROBLEM TO BE SOLVED: To effectively shorten time required for testing a multi-wavelength LD package to be tested.
      SOLUTION: Current drive circuits or current drive control circuits are provided respectively corresponding to a plurality of LD chips included in the multi-wavelength LD package. Wavelength laser light emitted from the LD chips activated by currents from these current drive circuits or the current drive control circuits are separated into each of wavelength components via a branching means. Light outputs of the separated wavelength components are detected by respective light emitting elements. Operating characteristics of the plurality n of the LD chips in the multi-wavelength LD package are simultaneously tested on the basis of the light output detection values of the wavelength components.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:有效缩短测试要测试的多波长LD封装所需的时间。 解决方案:分别对应于包括在多波长LD封装中的多个LD芯片提供电流驱动电路或电流驱动控制电路。 通过来自这些电流驱动电路或电流驱动控制电路的电流激活的LD芯片发出的波长激光经由分支装置分离成波长成分。 分离的波长分量的光输出由各个发光元件检测。 基于波长分量的光输出检测值,同时测试多波长LD封装中的多个n个LD芯片的工作特性。 版权所有(C)2005,JPO&NCIPI
    • 8. 发明专利
    • Method of driving and driving apparatus for laser-diode element
    • 激光二极管元件的驱动和驱动装置的方法
    • JP2005129832A
    • 2005-05-19
    • JP2003365920
    • 2003-10-27
    • Daitron Technology Co Ltdダイトロンテクノロジー株式会社
    • IGAWA KATSUHIKO
    • G11B7/125H01S5/0683
    • PROBLEM TO BE SOLVED: To effectively enhance control accuracy of a driving control system in driving a LD element with high-speed short-pulse current under constant optical output control (APC), by solving the incompatibility between upgrading of the response speed and stabilization of the optical coupling efficiency of a photodiode for detecting optical output of the driven LD element without sacrificing neither the response speed nor the optical coupling efficiency. SOLUTION: By properly selecting a pair of photodiodes having a large and a small light-receiving face, the optical output of the LD element driven with high-speed short-pulse current is accurately detected. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了有效提高驱动控制系统在恒定光输出控制(APC)下用高速短脉冲电流驱动LD元件的控制精度,通过解决升级响应速度之间的不兼容性 以及用于检测驱动LD元件的光输出的光电二极管的光耦合效率的稳定性,而不牺牲响应速度和光耦合效率。 解决方案:通过适当选择具有大的和小的光接收面的一对光电二极管,精确地检测由高速短脉冲电流驱动的LD元件的光输出。 版权所有(C)2005,JPO&NCIPI