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1. 发明专利

JP2014184716A Pattern formation device and pattern formation method 有权
标题翻译：图案形成装置和图案形成方法
公开(公告)号：JP2014184716A
公开(公告)日：2014-10-02
申请号：JP2013265205
申请日：2013-12-24
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社
发明人： SHOJI KAZUHIRO , KAWAGOE MICHIFUMI , UENO HIROYUKI , SHIBAFUJI YAYOI , MASUICHI MIKIO , UENO MIKA
IPC分类号： B41F17/14 , B41F1/16 , B41F3/20 , B41F17/36 , B41M1/34 , H05K3/12
摘要： PROBLEM TO BE SOLVED: To butt a proof or a board on a blanket with the high precision of position.SOLUTION: While the peripheral part of a blanket being held in adsorptive manner by a frame-like lower stage 61, the central part of the blanket is locally held by a plurality of hands 625 which can rise and fall individually. By making a transfer roller unit 64 run along the undersurface of the blanket so as to push up the blanket partially, the blanket is abutted on the proof or board arranged above a blanket. Since the hand 625 descends in series with movement of the transfer roller unit 64 so as to evacuate downward, the interference with the transfer roller unit 64 is avoided.
摘要翻译：要解决的问题：以高精度的位置对接毯子上的证明或板。解决方案：当毯子的周边部分被框架状下层61吸附的方式时，其中心部分毯子由多个可以单独上升和下降的手625的局部保持。通过使转印辊单元64沿着毯子的下表面延伸以部分地推起毯子，毯子抵靠在布置在毯子上方的隔板或板上。由于手625随着转印辊单元64的移动而串联下降以便向下抽空，所以避免了与转印辊单元64的干涉。

2. 发明专利

JP2014192286A Peeling device and peeling method 有权
标题翻译：剥离装置和剥离方法
公开(公告)号：JP2014192286A
公开(公告)日：2014-10-06
申请号：JP2013065522
申请日：2013-03-27
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社
发明人： UENO MIKA , UENO HIROYUKI , SHIBAFUJI YAYOI , KAWAGOE MICHIFUMI , MASUICHI MIKIO , TANIGUCHI KAZUTAKA
IPC分类号： H05K3/20
摘要： PROBLEM TO BE SOLVED: To provide a technology capable of well peeling two plate-like bodies tightly fitting to each other, and especially coping with increase in size of the plate-like body.SOLUTION: (-Y) side end pat of a substrate SB in a work piece WK placed on a stage 30 is pulled up by adsorption-holding using a first adsorption unit 51, and a peeling roller 340 abutted with the substrate SB is moved in (+Y) direction, thus peeling is made to progress. A lower surface of the work piece WK is imaged with an imaging part 37 from below an abutment nip region R4 of the peeling roller 340, to detect position of a peeling border line that occurs at a border between a peeling region and a non-peeling region, for determining moving start timing of the peeling roller 340.
摘要翻译：要解决的问题：提供一种能够良好地剥离彼此紧密配合的两个板状体的技术，特别是应对板状体的尺寸增大。（A）侧基（-Y）使用第一吸附单元51将放置在台架30上的工件WK中的SB吸附到吸附保持中，并且与基板SB抵接的剥离辊340沿（+ Y）方向移动，从而进行剥离。从剥离辊340的邻接夹持区域R4的下方，用成像部37对成形工件WK的下表面进行成像，以检测在剥离区域和非剥离区域之间的边界处发生的剥离边界线的位置区域，用于确定剥离辊340的移动开始正时。

3. 发明专利

JP2014188839A Pattern formation method and pattern formation device 有权
标题翻译：图案形成方法和图案形成装置
公开(公告)号：JP2014188839A
公开(公告)日：2014-10-06
申请号：JP2013066310
申请日：2013-03-27
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社
发明人： UENO HIROYUKI , KAWAGOE MICHIFUMI , MASUICHI MIKIO , SHOJI KAZUHIRO , SHIBAFUJI YAYOI , UENO MIKA , TANIGUCHI KAZUTAKA
IPC分类号： B41F33/14 , B41F1/00 , B41F1/16 , B41F1/56 , B41F17/14 , B41F17/36 , B41M1/02 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To raise accuracy of pattern formation by successfully performing positioning, namely, pre-alignment of a plate-like object to a target position before forming a pattern by pressing one surface of a blanket to be held by first holding means and one surface of the plate-like object to be held by second holding means to each other.SOLUTION: At least one of first holding means and second holding means 41 is moved, at least a part of an outer edge of a plate-like object PP held by the second holding means 41 is imaged before forming a pattern by pressing one surface of a blanket and one surface of the plate-like object PP against each other, and the second holding means 41 is moved in parallel with the one surface of the plate-like object PP as holding the plate-like object PP on the basis of an imaging result to position the plate-like object PP at a target position.
摘要翻译：要解决的问题：为了通过成功地进行定位来提高图案形成的精度，即通过按压由第一保持装置保持的毯子的一个表面，在形成图案之前将板状物体预对准目标位置，以及板状物体的一个表面由第二保持装置彼此保持。解决方案：第一保持装置和第二保持装置41中的至少一个移动，板状物体的外边缘的至少一部分由第二保持装置41保持的PP在通过将毯子的一个表面和板状物体PP的一个表面彼此按压而形成图案之前成像，并且第二保持装置41与基于成像结果来保持板状物体PP的板状物体PP，将板状物体PP定位在目标位置。

4. 发明专利

JP2014185022A Peeling device and peeling method 有权
标题翻译：剥离装置和剥离方法
公开(公告)号：JP2014185022A
公开(公告)日：2014-10-02
申请号：JP2013062126
申请日：2013-03-25
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社
发明人： UENO MIKA , KAWAGOE MICHIFUMI , MASUICHI MIKIO , UENO HIROYUKI , SHOJI KAZUHIRO , SHIBAFUJI YAYOI
IPC分类号： B65H41/00 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a peeling device and a peeling method which peel and separate two closely-attached plate-like bodies, and prevent local peeling between the plate-like bodies which interferes a suitable progress of peeling.SOLUTION: A vacuum suction groove 314 for sucking and holding a peripheral edge part of a blanket BL is formed on a horizontal surface part 311 of a stage 310 on which a laminate formed by closely attaching a substrate SB and the blanket BL through a pattern is mounted. An annular groove 313 for surrounding an effective area AR of the laminate with an effective pattern formed is formed on an inner side of the vacuum suction groove 314. The annular groove 313 is released to an atmosphere by communicating with an external space so as to prevent the blanket BL from being peeled from the substrate SB by propagating a negative pressure supplied to the vacuum suction groove 314 to the effective area AR.
摘要翻译：要解决的问题：提供剥离和分离两个紧密连接的板状体的剥离装置和剥离方法，并且防止板状体之间的局部剥离，这妨碍了适当的剥离进程。解决方案：真空吸在台架310的水平面部311上形成有用于吸附和保持橡皮布BL的周边部分的槽314，其上安装有通过图案紧密附着基板SB和橡皮布BL而形成的层压体。在真空吸引槽314的内侧形成用于围绕形成有效图案的层叠体的有效区域AR的环状槽313.环状槽313通过与外部空间连通而释放到大气中，以防止通过将供给真空吸入槽314的负压传递到有效区域AR，橡皮布BL从基板SB剥离。

5. 发明专利

JP2014146770A Peeling device and peeling method 有权
标题翻译：剥离装置和剥离方法
公开(公告)号：JP2014146770A
公开(公告)日：2014-08-14
申请号：JP2013016036
申请日：2013-01-30
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社
发明人： KAWAGOE MICHIFUMI , SHOJI KAZUHIRO , SHIBAFUJI YAYOI , MASUICHI MIKIO , UENO HIROYUKI , UENO MIKA
IPC分类号： H01L21/02
摘要： PROBLEM TO BE SOLVED: To provide a technique for satisfactorily peeling two tabular bodies from each other without any damage thereto even if a pattern or the like is supported between the two tabular bodies.SOLUTION: A peeling device comprises: first holding means 310 for holding a first tabular body BL; peeling start means 321 for bending, in a columnar surface manner, one end of the first tabular body in a direction opposite to a second tabular body so that part of a close contact region of the second tabular body with which the first tabular body comes into close contact is converted into a peeled region where the first tabular body is peeled, with a peeling borderline defined by a boundary between the close contact region and the peeled region formed as a single and straight line; second holding means 122 for holding the second tabular body SB where the peeling borderline is formed; and spacing means for increasing the distance between the first holding means and the second holding means so as to make the first tabular body and the second tabular body spaced apart from each other.
摘要翻译：要解决的问题：提供一种即使在两个平板体之间支撑图案或类似物的情况下，也可以使两片平片体相互剥离而不会受到任何损害的技术。解决方案：剥离装置包括：第一保持装置310，用于保持第一片状体BL; 剥离开始装置321，以柱状表面方式弯曲第一平板状体的一端与第二平片体相反的方向，使得第一平板状体的第二平板体的紧密接触区域的一部分紧密接触被转换成剥离区域，其中第一片状体被剥离，剥离边界线由紧密接触区域和形成为单条和直线的剥离区域之间的边界限定; 用于保持形成剥离边界线的第二平板体SB的第二保持装置122; 以及间隔装置，用于增加第一保持装置和第二保持装置之间的距离，以使第一平板体和第二平板体彼此间隔开。

6. 发明专利

JP2012195521A Film formation method and semiconductor device manufacturing method 审中-公开
标题翻译：薄膜形成方法和半导体器件制造方法
公开(公告)号：JP2012195521A
公开(公告)日：2012-10-11
申请号：JP2011060005
申请日：2011-03-18
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社
发明人： KAWAGOE MICHIFUMI , SHIBAFUJI YAYOI
IPC分类号： H01L21/316 , H01L21/312 , H01L21/768 , H01L23/532
摘要： PROBLEM TO BE SOLVED: To provide a technology for enabling formation of an excellent film on a substrate surface by transferring a polysilazane film formed on a support.SOLUTION: A coating liquid P containing a polysilazane material is coated on a surface of a sheet film F and a polysilazane thin film R is obtained by causing a solvent to vaporize. Prior to transfer to a semiconductor substrate, UV light L of uniform strength is irradiated from a UV light source 202 via a diffuser 203 on a thin film R. Accordingly, viscosity of a surface Ra of the thin film R is selectively increased and when performing substrate transfer, an air gap can be formed without filling trenches formed on a substrate surface.
摘要翻译：要解决的问题：提供通过转移形成在载体上的聚硅氮烷膜，能够在基板表面上形成优异的膜的技术。解决方案：将含有聚硅氮烷材料的涂布液P涂覆在薄膜F的表面上，并通过使溶剂蒸发而获得聚硅氮烷薄膜R. 在转移到半导体衬底之前，通过薄膜R上的扩散器203从UV光源202照射具有均匀强度的UV光L.因此，选择性地增加薄膜R的表面Ra的粘度，并且当执行衬底转移，可以形成气隙而不填充形成在衬底表面上的沟槽。版权所有（C）2013，JPO＆INPIT

7. 发明专利

JP2014184998A Method and device for transfer of plate-like conveyed object, and pattern forming apparatus 审中-公开
标题翻译：板状传送对象传输的方法和装置，以及图案形成装置
公开(公告)号：JP2014184998A
公开(公告)日：2014-10-02
申请号：JP2013059727
申请日：2013-03-22
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社
发明人： UENO HIROYUKI , MASUICHI MIKIO , KAWAGOE MICHIFUMI , SHIBAFUJI YAYOI , SHOJI KAZUHIRO , UENO MIKA
IPC分类号： B65H5/10 , B41F17/14 , B65H5/08
摘要： PROBLEM TO BE SOLVED: To satisfactorily transfer a plate-like conveyed object that is held while a lower surface circumferential edge is supported by first holding means to second holding means for sucking and holding the upper surface of the plate-like conveyed object on an upper part of the first holding means.SOLUTION: A transfer method of a plate-like conveyed object includes: a first suction step of making a first suction member fall from a first through-hole penetrated and provided in the vertical direction to second holding means, and sucking and holding a first suction position of the upper surface of the plate-like conveyed object held by first holding means; a second suction step of making a second suction member fall from a second through-hole penetrated and provided in the vertical direction at the position different from the first through-hole to the second holding means, and sucking and holding a second suction position different from the first suction position among the upper surface of the plate-like conveyed object; and a movement step of lifting the first suction member and the second suction member holding the plate-like conveyed object, which are retreated into the first through-hole and the second through-hole, respectively, and moving the plate-like conveyed object from the first holding means to the second holding means.
摘要翻译：要解决的问题：为了令将通过第一保持机构支撑下表面周缘的保持状态的板状输送物转印到第二保持机构上，以将板状输送物体的上表面吸附保持在上部第一保持装置的一部分。解决方案：板状输送物体的转印方法包括：使第一吸引部件从第一通孔向垂直方向贯穿并设置在第二保持机构的第一吸入工序，并且吸住并保持由第一保持装置保持的板状输送对象的上表面的第一吸引位置; 第二抽吸步骤，使第二吸引部件从与第一贯通孔不同的位置沿垂直方向贯通并设置的第二通孔落下到第二保持机构，吸入并保持与在板状输送物体的上表面之间的第一吸引位置; 以及移动步骤，其将分别退回到第一通孔和第二通孔的第一吸引构件和保持板状输送物体的第二吸引构件分别提升，并将板状输送物体从第一保持装置到第二保持装置。

8. 发明专利

JP2014166746A Pattern formation device and pattern formation method 有权
标题翻译：图案形成装置和图案形成方法
公开(公告)号：JP2014166746A
公开(公告)日：2014-09-11
申请号：JP2013262351
申请日：2013-12-19
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社
发明人： KAWAGOE MICHIFUMI , MASUICHI MIKIO , UENO HIROYUKI , SHOJI KAZUHIRO , SHIBAFUJI YAYOI , UENO MIKA
IPC分类号： B41F17/14 , B41F3/20 , B41M1/02 , B41M1/34 , H01L21/027 , H05K3/12
CPC分类号： B29C59/02 , B29C59/026 , B41F17/14
摘要： PROBLEM TO BE SOLVED: To contact a plate or a substrate with a blanket with high position precision.SOLUTION: The pattern formation device comprises: first holding means 61 that holds a blanket BL for supporting a pattern formation material PT on one side thereof, in a horizontal attitude where a supporting surface of the pattern formation material is directed upward; second holding means 41 that holds a processing object by closely opposing a plate PP for patterning the pattern formation material or a substrate SB on which a pattern is transcribed, as the processing object, on an upper surface of the blanket BL held by the first holding means 61; and push-up means 641 that pushes up partially an effective region of the central portion of the blanket BL from a lower surface of the blanket BL to contact the processing object held by the second holding means 41 and further moves along the lower surface of the blanket BL to change a position to push up the blanket BL.
摘要翻译：要解决的问题：用具有高位置精度的毯子接触板或基板。解决方案：图案形成装置包括：第一保持装置61，其保持用于在其一侧支撑图案形成材料PT的橡皮布BL，图案形成材料的支撑表面向上的水平姿态; 第二保持装置41，其通过紧密地相对于用于将图案形成材料图案化的板PP或其上转印有图案的基板SB作为加工对象紧密地对置在由第一保持件保持的橡皮布BL的上表面上手段61; 以及从橡皮布BL的下表面部分地推出橡皮布BL的中央部分的有效区域的上推装置641，以接触由第二保持装置41保持的处理对象，并进一步沿着第二保持装置41的下表面移动毯子BL改变一个位置来推上毯子BL。

9. 发明专利

JP2010135485A Thin film forming apparatus 审中-公开
标题翻译：薄膜成型装置
公开(公告)号：JP2010135485A
公开(公告)日：2010-06-17
申请号：JP2008308598
申请日：2008-12-03
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社
发明人： SHIBAFUJI YAYOI , YANAGIDA TAKAAKI , UENO HIROYUKI , FURUMURA TOMOYUKI , MASUICHI MIKIO
IPC分类号： H01L21/31 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To provide a thin film forming apparatus that forms a thin film on a substrate by transferring a thin film material formed on a carrier such as a sheet film to the substrate, wherein a degree of vacuum needed for thin film formation is ensured and the maintainability is excellent.
SOLUTION: In the thin film forming apparatus, the thin film is transferred to the substrate while the sheet film where the thin film is formed and the substrate are inserted between an upper block and a lower block. An upper plate 11 on which the upper block is mounted and a bottom plate 19 on which the lower block is mounted are coupled to each other by a frame 10 assembled by combining angles 101. A processing chamber 1 is constituted by fitting a panel-like front plate 13, a side plate 14, and a back plate 16 to an opening in a side surface of the frame through seal members 138, 148, 168.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种薄膜形成装置，其通过将形成在诸如薄膜的载体上的薄膜材料转印到基板上而在基板上形成薄膜，其中薄的所需的真空度确保成膜，可维护性优异。解决方案：在薄膜形成装置中，将薄膜转印到基板上，同时将形成薄膜的薄膜和衬底插入在上部块和下部块之间。安装有上部块的上板11和安装有下块的底板19通过组合角度101组装的框架10彼此联接。处理室1通过将板状装配前板13，侧板14和后板16，通过密封构件138,148,168到框架的侧表面中的开口。（C）2010年，JPO和INPIT

10. 发明专利

JP2009195851A Coating machine 审中-公开
标题翻译：涂装机
公开(公告)号：JP2009195851A
公开(公告)日：2009-09-03
申请号：JP2008041901
申请日：2008-02-22
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社
发明人： SHIBAFUJI YAYOI , MASUICHI MIKIO , TAKAMURA YUKIHIRO , KAWAGOE MICHIFUMI , SAGARA SHUICHI , MATSUKA TAKESHI
IPC分类号： B05C5/00 , B05C11/10 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To provide a coating machine which prevents application displacement by external force from piping to be connected.
SOLUTION: A coating solution is discharged from the tip of a nozzle. A substrate is mounted on the upper part of a stage. A nozzle moving mechanism reciprocates the nozzle to cross the surface of the stage in a space over the stage. A first guide member is installed to cross the surface of the stage in a space over the stage. A slide support member supports the nozzle and can move in the transverse direction along the first guide member. A driving mechanism reciprocates the slide support member along the first guide member. Flexible piping or wiring is tensioned in the reciprocation direction of the slide support member and moved in the reciprocation direction with the slide support member with the reciprocation of the slide support member.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种防止来自管道的外力施加位移的涂布机的连接。解决方案：涂料溶液从喷嘴的尖端排出。衬底安装在平台的上部。喷嘴移动机构使喷嘴往复运动，以在台架上方的空间中穿过工作台的表面。第一引导构件安装成跨越舞台上的空间中的台面。滑动支撑构件支撑喷嘴并且可以沿着第一引导构件在横向方向上移动。驱动机构沿着第一引导构件使滑动支撑构件往复运动。柔性管道或布线在滑动支撑构件的往复运动方向上张紧，并随着滑动支撑构件与滑动支撑构件的往复运动而沿往复运动方向移动。版权所有（C）2009，JPO＆INPIT

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